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Development of new technique of laser fine fabrication by use of coherent intense soft x-rays

Research Project

Project/Area Number 25289244
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypePartial Multi-year Fund
Section一般
Research Field Composite materials/Surface and interface engineering
Research InstitutionJapan Atomic Energy Agency

Principal Investigator

Kawachi Tetsuya  国立研究開発法人日本原子力研究開発機構, 原子力科学研究部門 量子ビーム応用研究センター, 室長代理 (40343941)

Co-Investigator(Kenkyū-buntansha) ISHINO Masahiko  国立研究開発法人日本原子力研究開発機構, 原子力科学研究部門量子ビーム応用研究センター, 研究副主幹 (80360410)
PIKUZ Tatiana  独立行政法人日本原子力研究開発機構, 原子力科学研究部門量子ビーム応用研究センター, リサーチフェロー (20619978)
HASEGAWA Noboru  国立研究開発法人日本原子力研究開発機構, 原子力科学研究部門量子ビーム応用研究センター, 研究職 (50360409)
NISHIKINO Masaharu  国立研究開発法人日本原子力研究開発機構, 原子力科学研究部門量子ビーム応用研究センター, 研究副主幹 (70370450)
Project Period (FY) 2013-04-01 – 2016-03-31
Project Status Completed (Fiscal Year 2015)
Budget Amount *help
¥13,520,000 (Direct Cost: ¥10,400,000、Indirect Cost: ¥3,120,000)
Fiscal Year 2015: ¥2,860,000 (Direct Cost: ¥2,200,000、Indirect Cost: ¥660,000)
Fiscal Year 2014: ¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000)
Fiscal Year 2013: ¥6,110,000 (Direct Cost: ¥4,700,000、Indirect Cost: ¥1,410,000)
Keywords材料加工 / 量子ビーム / 高性能レーザー / 高輝度X線 / 材料加工・処理 / 高輝度X線 / 材料加工、処理
Outline of Final Research Achievements

Recently new phenomena on the interaction of EUV light sources with matter such as extremely low ablation threshold of the substances illuminated by high brilliant soft x-ray pulse and nano-scale surface modification of substances under the low intensity exposure of the soft x-rays have been discovered, and they have a potential to strongly improve the existing laser fabrication techniques. However, the mechanism of these interesting phenomena has not been understood yet. In this study, we will proceed our research activity to understand qualitatively the fundamental process in the interaction between soft x-rays and matter and to clarify the desicive mechanism of the generation of nano-scale structure on the surface.

Report

(4 results)
  • 2015 Annual Research Report   Final Research Report ( PDF )
  • 2014 Annual Research Report
  • 2013 Annual Research Report
  • Research Products

    (33 results)

All 2016 2015 2014 2013 Other

All Int'l Joint Research (1 results) Journal Article (17 results) (of which Int'l Joint Research: 4 results,  Peer Reviewed: 17 results,  Acknowledgement Compliant: 6 results,  Open Access: 2 results) Presentation (15 results) (of which Int'l Joint Research: 3 results,  Invited: 9 results)

  • [Int'l Joint Research] ロシア科学アカデミー合同高温研究所/ロシア科学アカデミーランダウ理論研究所/ロモノソフ モスクワ州立大学(ロシア連邦)

    • Related Report
      2015 Annual Research Report
  • [Journal Article] Observation of dynamics and modification of solid surface using a picosecond soft x-ray laser2015

    • Author(s)
      M. Nishikino, T. Kawachi, N. Hasegawa, M. Ishino, Y. Minami, T. Suemoto, N. Ohnishi, A. M. Ito, K. Satoe, A. Y. Faenov , N. A. Inogamov, and M. Yamagiwa
    • Journal Title

      SPIE

      Volume: 9589 Pages: 958902-958902

    • DOI

      10.1117/12.2186363

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
  • [Journal Article] Nonlinear increase of X-ray intensities from thin foils irradiated with a 200 TW femtosecond laser2015

    • Author(s)
      A. Ya. Faenov, J. Colgan, S. B. Hansen, A. Zhidkov, T. A. Pikuz, M. Nishiuchi, S. A. Pikuz, I. Yu. Skobelev, J. Abdallah, H. Sakaki, A. Sagisaka, A. S. Pirozhkov, K. Ogura, Y. Fukuda, M. Kanasaki, N. Hasegawa, M. Nishikino, M. Kando, Y. Watanabe, T. Kawachi, S. Masuda, T. Hosokai, R. Kodama and K. Kondo
    • Journal Title

      Scientific Reports

      Volume: 5 Issue: 1 Pages: 13436-13436

    • DOI

      10.1038/srep13436

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] 3D visualization of XFEL beam focusing properties using LiF crystal X-ray detector2015

    • Author(s)
      T. Pikuz, A. Faenov, T. Matsuoka, S. Matsuyama, K. Yamauchi, N. Ozaki, B. Albertazzi, Y. Inubushi, M. Yabashi, K. Tono, Y. Sato, H. Yumoto, H. Ohashi, S. Pikuz, A. N. Grum-Grzhimailo, M. Nishikino, T. Kawachi, T. Ishikawa, R. Kodama
    • Journal Title

      Sci. Rep.

      Volume: 5 Issue: 1 Pages: 17713-17713

    • DOI

      10.1038/srep17713

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Open Access / Int'l Joint Research
  • [Journal Article] SPIE2015

    • Author(s)
      M. Ishino, N. Hasegawa, M.Nishikino, T.Pikuz, I. Skobelev, A. Faenov, N. Inogamov, T. Kawachi, M. Yamagiwa
    • Journal Title

      SPIE, X-Ray Lasers and Coherent X-Ray Sources: Development and Applications XI

      Volume: 9589 Pages: 958904-958904

    • DOI

      10.1117/12.2186053

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
  • [Journal Article] Hydrodynamics driven by ultrashort laser pulse: simulations and the optical pump, x-ray probe experiment2015

    • Author(s)
      N.A. Inogamov, V. Zhakhovsky, N. Hasegawa, M. Nishikino, M. Yamagiwa, M. Ishino, M. Agranat, S. Ashitokov, A. Faenov, V. Khokolov, D. Ilnitski, Yu Petrov, K. Migdal, T. Pikuz, S. Takayoshi, T. Eyama, N. Kakimoto, T. Tomita, M. Baba, Y. Minami, T. Suemoto, and T. Kawachi
    • Journal Title

      Applied Physics B

      Volume: online Issue: 3 Pages: 1-7

    • DOI

      10.1007/s00340-015-6039-7

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Very low temperature in warm dense matter formed by focused picosecond soft x-ray laser pulses2014

    • Author(s)
      M. Ishino, N. Hasegawa, M. Nishikino, T. Pikuz, I. Skobelev, A. Faenov, N. Inogamov, T. Kawachi and M. Yamagiwa
    • Journal Title

      Journal of Applied Physics

      Volume: 116 Issue: 18

    • DOI

      10.1063/1.4901943

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Surface nano-structure produced by spallation of metal irradiated by ultrashort laser pulse2014

    • Author(s)
      N. Inogamov, V. Zhakhovsky, S. Ashitkov, Yu. Emirov, A. Faenov, T. Pikuz, M. Ishino, M. Kando, N. Hasegawa, M. Nishikino, T. Kawachi, M. Agranat, A. Andriash, S. Kuratov, I. Oleynik
    • Journal Title

      Journal of Physics: Conference series

      Volume: 500 Issue: 11 Pages: 112070-112070

    • DOI

      10.1088/1742-6596/500/11/112070

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Ultrafast lasers and soild in highly excited states: results of hydrodynamics and molecular dynamics simulations2014

    • Author(s)
      N. Inogamov, V. Zhakhovsky, V. Khokholov, S. Ashitkov, Yu. Emirov, K. Khichshenko, A. Faenov, T. Pikuz, M. Ishino, M. Kando, N. Hasegawa, M. Nishikino, P. Komarov, B. Demaske, M. Agranat, S. Anisimov, T. Kawachi , I. Oleynik
    • Journal Title

      Journal of Physics: Conference series

      Volume: 510 Pages: 012041-012041

    • DOI

      10.1088/1742-6596/510/1/012041

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Soft picosecond X-ray laser nanomodification of gold and aluminum surfaces2014

    • Author(s)
      S. Starikov, A. Faenov, T. Pikuz, I. Skobelev, V. Fortov, S. Tamotsu, M. Ishino, M. Tanaka, N. Hasegawa, M. Nishikino, T. Kaihori, T. Imazono, M. Kando and T. Kawachi
    • Journal Title

      Applied Physics B

      Volume: - Issue: 4 Pages: 1-12

    • DOI

      10.1007/s00340-014-5789-y

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Observation of the nano-sclae surface dynamics of femtosecond laser ablation by time-resolved soft x-ray imaging technique2013

    • Author(s)
      M.Nishikino, N. Hasegawa, T. Tomita, Y. Minami, R. Takei, M. Baba, T. Eyama, S. Takayoshi, T. Kawachi, D. Hatomi, N. Ohnishi, M. Yamagiwa and T. Suemoto
    • Journal Title

      Proceedings of SPIE

      Volume: 8849

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Nanometer-sclae modification on metal surfaces induced by soft x-ray laser pulse irradiations2013

    • Author(s)
      M. Ishino, A. Faenov, M. Tanaka, S. Tamotsu, T. Pikuz, N. Hasegawa, M. Nishikino, N. Inogamov, I. Skobelev, V. Fortov, G. Norman, S. Starikov, V. Stegailov, T. Kaihori, T. Kawachi and M. Yamagiwa
    • Journal Title

      Proceedings of SPIE

      Volume: 8849

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Nano-meter size modification of metal surfaces induced by soft x-ray laser single pulse2013

    • Author(s)
      M. Ishino, A. Faenov, M. Tanaka, T. Pikuz, S. Tamotsu, N. Hasegawa, M. Nishikino, S. Starikov, V. Stegailov, G. Norman, V. Fortov, I. Skobelev, T. Kaihori, and T. Kawachi
    • Journal Title

      Springer proceedings in Physics

      Volume: 147 Pages: 121-124

    • DOI

      10.1007/978-3-319-00696-3_20

    • ISBN
      9783319006956, 9783319006963
    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Source development of novel coherent x-rays and their applications in JAEA2013

    • Author(s)
      T. Kawachi, A. Sasaki, M. Nishikino, M. Ishino, N. Hasegawa, T. Imazono, Y. Ochi, M. Tanaka, A. Faenov, T. Pikuz, A. Pirozhkov, T. Esrkepov, T. Nakamura, M. Kando, S. Bulanov, K. Kondo, K. janulewicz, C. Kim, H. Steil, G. Norman, T. Suemoto, T. Tomita, K. Namikawa, M. Yamagiwa adn Y. Kato
    • Journal Title

      Springer proceedings in Physics

      Volume: 147 Pages: 143-150

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Development of soft x-ray microscopy using Fresnel zone plate for observation of laser-induced surface dynamics2013

    • Author(s)
      M. Nishikino, M. Baba, T. Suemoto, N. Hasegawa, M. Ishino, T. Kaihori, T. Kawachi and M. Yamagiwa
    • Journal Title

      Springer proceedings in Physics

      Volume: 147 Pages: 199-202

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 軟X線による物質アブレーション2013

    • Author(s)
      牧村哲也、錦野将元、河内哲哉
    • Journal Title

      レーザー研究

      Volume: 42 Pages: 45-49

    • NAID

      130007897464

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Observations of surface modifications induced by the multiple pulse irradiation using a soft picosecond x-ray laser beam.2013

    • Author(s)
      Ishino, M., Faenov, A.Y., Tanaka, M., Tamotsu, S., Hasegawa, N., Nishikino, M., Pikuz, T.A., Kaihori, T., Kawachi, T.
    • Journal Title

      Applied Physics A

      Volume: 110 Issue: 1 Pages: 179-188

    • DOI

      10.1007/s00339-012-7100-6

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Observation of X-ray mirage2013

    • Author(s)
      S. Magnitskiy, N. Nagorskiy, A. Faenov, T. Pikuz, M. Tanaka, M. Ishino, M. Nishikino, Y. Fukuda, M. Kando, T. Kawachi and Y. Kato
    • Journal Title

      Nature Communications

      Volume: 2923 Issue: 1 Pages: 1-7

    • DOI

      10.1038/ncomms2923

    • Related Report
      2013 Annual Research Report
    • Peer Reviewed
  • [Presentation] Source Development of Plasma-based Soft X-ray Laser and the Applications for Probing Nano-scale Dynamics of Laser Ablation2016

    • Author(s)
      M. Nishikino and T. Kawachi
    • Organizer
      Compact EUV and X-ray Sources
    • Place of Presentation
      米国、加州
    • Year and Date
      2016-03-20
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 軟X 線レーザーパルスの集光照射によるアルミニウム表面での損傷構造の形成2016

    • Author(s)
      石野雅彦, 錦野将元, 長谷川登, 保智己, Anatory Faenov, Tatiana Pikuz, Vasily Zhakhovsky, Igor Skobelev, Nail Inogamov, 河内哲哉
    • Organizer
      日本物理学会第71回年次大会
    • Place of Presentation
      日本、東北学院大学泉キャンパス (宮城県仙台市)
    • Year and Date
      2016-03-16
    • Related Report
      2015 Annual Research Report
  • [Presentation] X線レーザープローブを用いたfsレーザー薄膜アブレーションの観測2016

    • Author(s)
      M. Nishikino, T. Kawachi, N. Hasegawa, M. Ishino, Y. Minami, T. Suemoto, N. Ohnishi, A. M. Ito, K. Satoe, A. Y. Faenov , N. A. Inogamov, and M. Yamagiwa
    • Organizer
      レーザー学会、第36回年次大会
    • Place of Presentation
      日本、名城大学天白キャンパス (愛知県名古屋市)
    • Year and Date
      2016-01-20
    • Related Report
      2015 Annual Research Report
    • Invited
  • [Presentation] Plasma Soft X-ray laser for probing nano scales dynamics of femto-second laser ablation2015

    • Author(s)
      T. Kawachi, M. Nishikino, N. Hasegawa, Y. Minami, M. Baba, M. Yamagiwa, K. Kondo, N. A. Inogamov, V. Zakhovskii, A. Ya. Faenov and T. Suemoto
    • Organizer
      The 7th Asian Workshop on Coherent X-ray Radiation
    • Place of Presentation
      韓国、光州
    • Year and Date
      2015-08-31
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Observation of dynamics and modification of solid surface using a picosecond soft x-ray laser2015

    • Author(s)
      M. Nishikino, T. Kawachi, N. Hasegawa, M. Ishino, Y. Minami, T. Suemoto, N. Ohnishi, A. M. Ito, K. Satoe, A. Y. Faenov, N. A. Inogamov, and M. Yamagiwa
    • Organizer
      SPIE Optical Engineering and Applications
    • Place of Presentation
      米国、加州
    • Year and Date
      2015-08-15
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] 軟X線レーザーの集光照射による表面ナノ加工2015

    • Author(s)
      石野 雅彦、圓山 桃子、長谷川 登、錦野 将元、保 智己、Faenov Anatoly、Pikuz Tatiana、河内 哲哉、山極 満
    • Organizer
      第62回応用物理学会春期学術講演会
    • Place of Presentation
      東海大学、神奈川県
    • Year and Date
      2015-03-11
    • Related Report
      2014 Annual Research Report
  • [Presentation] Source development and applications of coherent x-rays and energetic particle beam using high peak power lasers (Plenary talk)2015

    • Author(s)
      T. Kawachi
    • Organizer
      The 17th Zvenigorod international conference on plasma physics and controlled fusion
    • Place of Presentation
      Zvenigorod, Moscow, Russia
    • Year and Date
      2015-02-08 – 2015-02-13
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Zeeman splitting of laser-driven soft x-ray laser line by the enhancement of magnetic field in plasma2014

    • Author(s)
      T. Kawachi, N. Hasegawa, A. Iwamae, and H. Yoneda
    • Organizer
      The 22nd International conference on spectral line shapes
    • Place of Presentation
      Tennessee, USA
    • Year and Date
      2014-06-01 – 2014-06-06
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Progress and prospects of coherent x-ray research using high power lasers in JAEA2014

    • Author(s)
      T. Kawachi, M. Nishkino, A. Sasaki, M. Ishino, N. Hasegawa, T. Imazono, T. Pikuz, A. Faenov, M. Magnitskiy, M. Matuyama, T. Tomita, T. Suemoto, A. Pirozhkov, S. Bulanov, H. Kiriyama, M. Kando, M. Yamagiwa, K. Kondo, P. Bolton and Y. Kato
    • Organizer
      The 14th International Conference on X-ray lasers
    • Place of Presentation
      Fortcollins, CO, USA
    • Year and Date
      2014-05-26 – 2014-05-30
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Observation of Weakly Excited Ablation Dynamics with Femtosecond laser by using Time-resolved soft x-ray imaging technique2014

    • Author(s)
      M. Nishikino, N. Hasegawa, T. Eyama, N. Kakimoto, T. Tomita, D. Hatomi, N. Ohnishi, A. Ito, Y. Minami, M. Baba, T. Kawachi, M. Yamagiwa, T. Suemoto
    • Organizer
      The 14th International Conference on X-ray lasers
    • Place of Presentation
      Fortcollins, CO, USA
    • Year and Date
      2014-05-26 – 2014-05-30
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Progress and Prospects of Coherent X-ray Research using High Power Lasers in JAEA2014

    • Author(s)
      T. Kawachi, M. Nishikino, A. Sasaki, M. Ishino, N. Hasegawa, T. Imazono, T. Pikuz, A. faenov, M. Magnitskiy, M. Maruyama, T. Tomita, T. Suemoto, A. Pirozhkov, S. Bulanov, H. Kiriyama, M. Kando, M. Yamagiwa, K. Kondo, P. Bolton, and Y. Kato
    • Organizer
      The 14th International Conference of X-ray Lasers
    • Place of Presentation
      Fort Collins, USA
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] Zeeman splitting of laser-driven soft x-ray laser line by the enhancement of magnetic field in plasma2014

    • Author(s)
      T. Kawachi, N. Hasegawa, A. Iwamae, H. Yoneda
    • Organizer
      The 22nd International Conference of Spectral Line Shapes
    • Place of Presentation
      Tennessee, USA
    • Related Report
      2013 Annual Research Report
    • Invited
  • [Presentation] Observation of the nano-sclae surface dynamics of femtosecond laser ablation by time-resolved soft x-ray imaging technique

    • Author(s)
      M.Nishikino, N. Hasegawa, T. Tomita, Y. Minami, R. Takei, M. Baba, T. Eyama, S. Takayoshi, T. Kawachi, D. Hatomi, N. Ohnishi, M. Yamagiwa and T. Suemoto
    • Organizer
      IFSA2013
    • Place of Presentation
      Nara, Japan
    • Related Report
      2013 Annual Research Report
  • [Presentation] Observation of the nano-sclae surface dynamics of femtosecond laser ablation by time-resolved soft x-ray imaging technique

    • Author(s)
      M.Nishikino, N. Hasegawa, T. Tomita, Y. Minami, R. Takei, M. Baba, T. Eyama, S. Takayoshi, T. Kawachi, D. Hatomi, N. Ohnishi, M. Yamagiwa and T. Suemoto
    • Organizer
      SPIE Optical Engineering and Applications
    • Place of Presentation
      San Diego, USA
    • Related Report
      2013 Annual Research Report
  • [Presentation] Nanometer-sclae modification on metal surfaces induced by soft x-ray laser pulse irradiations

    • Author(s)
      M. Ishino, A. Faenov, M. Tanaka, S. Tamotsu, T. Pikuz, N. Hasegawa, M. Nishikino, N. Inogamov, I. Skobelev, V. Fortov, G. Norman, S. Starikov, V. Stegailov, T. Kaihori, T. Kawachi and M. Yamagiwa
    • Organizer
      SPIE Optical Engineering and Applications
    • Place of Presentation
      San Diego, USA
    • Related Report
      2013 Annual Research Report

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Published: 2013-05-21   Modified: 2023-03-16  

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