Development of new technique of laser fine fabrication by use of coherent intense soft x-rays

• Project/Area Number: 25289244
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Partial Multi-year Fund
• Section: 一般
• Research Field: Composite materials/Surface and interface engineering
• Research Institution: Japan Atomic Energy Agency
• Principal Investigator: Kawachi Tetsuya 国立研究開発法人日本原子力研究開発機構, 原子力科学研究部門 量子ビーム応用研究センター, 室長代理 (40343941)
• Co-Investigator(Kenkyū-buntansha): ISHINO Masahiko 国立研究開発法人日本原子力研究開発機構, 原子力科学研究部門量子ビーム応用研究センター, 研究副主幹 (80360410) ; PIKUZ Tatiana 独立行政法人日本原子力研究開発機構, 原子力科学研究部門量子ビーム応用研究センター, リサーチフェロー (20619978) ; HASEGAWA Noboru 国立研究開発法人日本原子力研究開発機構, 原子力科学研究部門量子ビーム応用研究センター, 研究職 (50360409) ; NISHIKINO Masaharu 国立研究開発法人日本原子力研究開発機構, 原子力科学研究部門量子ビーム応用研究センター, 研究副主幹 (70370450)
• Project Period (FY): 2013-04-01 – 2016-03-31
• Project Status: Completed (Fiscal Year 2015)
• Budget Amount: ¥13,520,000 (Direct Cost: ¥10,400,000、Indirect Cost: ¥3,120,000); Fiscal Year 2015: ¥2,860,000 (Direct Cost: ¥2,200,000、Indirect Cost: ¥660,000); Fiscal Year 2014: ¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000); Fiscal Year 2013: ¥6,110,000 (Direct Cost: ¥4,700,000、Indirect Cost: ¥1,410,000)
• Keywords: 材料加工 / 量子ビーム / 高性能レーザー / 高輝度Ｘ線 / 材料加工・処理 / 高輝度X線 / 材料加工、処理

Outline of Final Research Achievements

Recently new phenomena on the interaction of EUV light sources with matter such as extremely low ablation threshold of the substances illuminated by high brilliant soft x-ray pulse and nano-scale surface modification of substances under the low intensity exposure of the soft x-rays have been discovered, and they have a potential to strongly improve the existing laser fabrication techniques. However, the mechanism of these interesting phenomena has not been understood yet. In this study, we will proceed our research activity to understand qualitatively the fundamental process in the interaction between soft x-rays and matter and to clarify the desicive mechanism of the generation of nano-scale structure on the surface.

Research Products

• [Int'l Joint Research] ロシア科学アカデミー合同高温研究所/ロシア科学アカデミーランダウ理論研究所/ロモノソフ モスクワ州立大学(ロシア連邦)
• [Journal Article] Observation of dynamics and modification of solid surface using a picosecond soft x-ray laser (2015)
  • Author(s): M. Nishikino, T. Kawachi, N. Hasegawa, M. Ishino, Y. Minami, T. Suemoto, N. Ohnishi, A. M. Ito, K. Satoe, A. Y. Faenov , N. A. Inogamov, and M. Yamagiwa
  • Journal Title: SPIE Volume: 9589 Pages: 958902-958902
  • DOI: 10.1117/12.2186363
  • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
• [Journal Article] Nonlinear increase of X-ray intensities from thin foils irradiated with a 200 TW femtosecond laser (2015)
  • Author(s): A. Ya. Faenov, J. Colgan, S. B. Hansen, A. Zhidkov, T. A. Pikuz, M. Nishiuchi, S. A. Pikuz, I. Yu. Skobelev, J. Abdallah, H. Sakaki, A. Sagisaka, A. S. Pirozhkov, K. Ogura, Y. Fukuda, M. Kanasaki, N. Hasegawa, M. Nishikino, M. Kando, Y. Watanabe, T. Kawachi, S. Masuda, T. Hosokai, R. Kodama and K. Kondo
  • Journal Title: Scientific Reports Volume: 5 Issue: 1 Pages: 13436-13436
  • DOI: 10.1038/srep13436
  • Peer Reviewed / Open Access / Int'l Joint Research
• [Journal Article] 3D visualization of XFEL beam focusing properties using LiF crystal X-ray detector (2015)
  • Author(s): T. Pikuz, A. Faenov, T. Matsuoka, S. Matsuyama, K. Yamauchi, N. Ozaki, B. Albertazzi, Y. Inubushi, M. Yabashi, K. Tono, Y. Sato, H. Yumoto, H. Ohashi, S. Pikuz, A. N. Grum-Grzhimailo, M. Nishikino, T. Kawachi, T. Ishikawa, R. Kodama
  • Journal Title: Sci. Rep. Volume: 5 Issue: 1 Pages: 17713-17713
  • DOI: 10.1038/srep17713
  • Peer Reviewed / Open Access / Int'l Joint Research
• [Journal Article] SPIE (2015)
  • Author(s): M. Ishino, N. Hasegawa, M.Nishikino, T.Pikuz, I. Skobelev, A. Faenov, N. Inogamov, T. Kawachi, M. Yamagiwa
  • Journal Title: SPIE, X-Ray Lasers and Coherent X-Ray Sources: Development and Applications XI Volume: 9589 Pages: 958904-958904
  • DOI: 10.1117/12.2186053
  • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
• [Journal Article] Hydrodynamics driven by ultrashort laser pulse: simulations and the optical pump, x-ray probe experiment (2015)
  • Author(s): N.A. Inogamov, V. Zhakhovsky, N. Hasegawa, M. Nishikino, M. Yamagiwa, M. Ishino, M. Agranat, S. Ashitokov, A. Faenov, V. Khokolov, D. Ilnitski, Yu Petrov, K. Migdal, T. Pikuz, S. Takayoshi, T. Eyama, N. Kakimoto, T. Tomita, M. Baba, Y. Minami, T. Suemoto, and T. Kawachi
  • Journal Title: Applied Physics B Volume: online Issue: 3 Pages: 1-7
  • DOI: 10.1007/s00340-015-6039-7
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Very low temperature in warm dense matter formed by focused picosecond soft x-ray laser pulses (2014)
  • Author(s): M. Ishino, N. Hasegawa, M. Nishikino, T. Pikuz, I. Skobelev, A. Faenov, N. Inogamov, T. Kawachi and M. Yamagiwa
  • Journal Title: Journal of Applied Physics Volume: 116 Issue: 18
  • DOI: 10.1063/1.4901943
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Surface nano-structure produced by spallation of metal irradiated by ultrashort laser pulse (2014)
  • Author(s): N. Inogamov, V. Zhakhovsky, S. Ashitkov, Yu. Emirov, A. Faenov, T. Pikuz, M. Ishino, M. Kando, N. Hasegawa, M. Nishikino, T. Kawachi, M. Agranat, A. Andriash, S. Kuratov, I. Oleynik
  • Journal Title: Journal of Physics: Conference series Volume: 500 Issue: 11 Pages: 112070-112070
  • DOI: 10.1088/1742-6596/500/11/112070
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Ultrafast lasers and soild in highly excited states: results of hydrodynamics and molecular dynamics simulations (2014)
  • Author(s): N. Inogamov, V. Zhakhovsky, V. Khokholov, S. Ashitkov, Yu. Emirov, K. Khichshenko, A. Faenov, T. Pikuz, M. Ishino, M. Kando, N. Hasegawa, M. Nishikino, P. Komarov, B. Demaske, M. Agranat, S. Anisimov, T. Kawachi , I. Oleynik
  • Journal Title: Journal of Physics: Conference series Volume: 510 Pages: 012041-012041
  • DOI: 10.1088/1742-6596/510/1/012041
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Soft picosecond X-ray laser nanomodification of gold and aluminum surfaces (2014)
  • Author(s): S. Starikov, A. Faenov, T. Pikuz, I. Skobelev, V. Fortov, S. Tamotsu, M. Ishino, M. Tanaka, N. Hasegawa, M. Nishikino, T. Kaihori, T. Imazono, M. Kando and T. Kawachi
  • Journal Title: Applied Physics B Volume: - Issue: 4 Pages: 1-12
  • DOI: 10.1007/s00340-014-5789-y
  • Peer Reviewed
• [Journal Article] Observation of the nano-sclae surface dynamics of femtosecond laser ablation by time-resolved soft x-ray imaging technique (2013)
  • Author(s): M.Nishikino, N. Hasegawa, T. Tomita, Y. Minami, R. Takei, M. Baba, T. Eyama, S. Takayoshi, T. Kawachi, D. Hatomi, N. Ohnishi, M. Yamagiwa and T. Suemoto
  • Journal Title: Proceedings of SPIE Volume: 8849
  • Peer Reviewed
• [Journal Article] Nanometer-sclae modification on metal surfaces induced by soft x-ray laser pulse irradiations (2013)
  • Author(s): M. Ishino, A. Faenov, M. Tanaka, S. Tamotsu, T. Pikuz, N. Hasegawa, M. Nishikino, N. Inogamov, I. Skobelev, V. Fortov, G. Norman, S. Starikov, V. Stegailov, T. Kaihori, T. Kawachi and M. Yamagiwa
  • Journal Title: Proceedings of SPIE Volume: 8849
  • Peer Reviewed
• [Journal Article] Nano-meter size modification of metal surfaces induced by soft x-ray laser single pulse (2013)
  • Author(s): M. Ishino, A. Faenov, M. Tanaka, T. Pikuz, S. Tamotsu, N. Hasegawa, M. Nishikino, S. Starikov, V. Stegailov, G. Norman, V. Fortov, I. Skobelev, T. Kaihori, and T. Kawachi
  • Journal Title: Springer proceedings in Physics Volume: 147 Pages: 121-124
  • DOI: 10.1007/978-3-319-00696-3_20
  • ISBN: 9783319006956, 9783319006963
  • Peer Reviewed
• [Journal Article] Source development of novel coherent x-rays and their applications in JAEA (2013)
  • Author(s): T. Kawachi, A. Sasaki, M. Nishikino, M. Ishino, N. Hasegawa, T. Imazono, Y. Ochi, M. Tanaka, A. Faenov, T. Pikuz, A. Pirozhkov, T. Esrkepov, T. Nakamura, M. Kando, S. Bulanov, K. Kondo, K. janulewicz, C. Kim, H. Steil, G. Norman, T. Suemoto, T. Tomita, K. Namikawa, M. Yamagiwa adn Y. Kato
  • Journal Title: Springer proceedings in Physics Volume: 147 Pages: 143-150
  • Peer Reviewed
• [Journal Article] Development of soft x-ray microscopy using Fresnel zone plate for observation of laser-induced surface dynamics (2013)
  • Author(s): M. Nishikino, M. Baba, T. Suemoto, N. Hasegawa, M. Ishino, T. Kaihori, T. Kawachi and M. Yamagiwa
  • Journal Title: Springer proceedings in Physics Volume: 147 Pages: 199-202
  • Peer Reviewed
• [Journal Article] 軟Ｘ線による物質アブレーション (2013)
  • Author(s): 牧村哲也、錦野将元、河内哲哉
  • Journal Title: レーザー研究 Volume: 42 Pages: 45-49
  • NAID: 130007897464
  • Peer Reviewed
• [Journal Article] Observations of surface modifications induced by the multiple pulse irradiation using a soft picosecond x-ray laser beam. (2013)
  • Author(s): Ishino, M., Faenov, A.Y., Tanaka, M., Tamotsu, S., Hasegawa, N., Nishikino, M., Pikuz, T.A., Kaihori, T., Kawachi, T.
  • Journal Title: Applied Physics A Volume: 110 Issue: 1 Pages: 179-188
  • DOI: 10.1007/s00339-012-7100-6
  • Peer Reviewed
• [Journal Article] Observation of X-ray mirage (2013)
  • Author(s): S. Magnitskiy, N. Nagorskiy, A. Faenov, T. Pikuz, M. Tanaka, M. Ishino, M. Nishikino, Y. Fukuda, M. Kando, T. Kawachi and Y. Kato
  • Journal Title: Nature Communications Volume: 2923 Issue: 1 Pages: 1-7
  • DOI: 10.1038/ncomms2923
  • Peer Reviewed
• [Presentation] Source Development of Plasma-based Soft X-ray Laser and the Applications for Probing Nano-scale Dynamics of Laser Ablation (2016)
  • Author(s): M. Nishikino and T. Kawachi
  • Organizer: Compact EUV and X-ray Sources
  • Place of Presentation: 米国、加州
  • Year and Date: 2016-03-20
  • Int'l Joint Research
• [Presentation] 軟X 線レーザーパルスの集光照射によるアルミニウム表面での損傷構造の形成 (2016)
  • Author(s): 石野雅彦, 錦野将元, 長谷川登, 保智己, Anatory Faenov, Tatiana Pikuz, Vasily Zhakhovsky, Igor Skobelev, Nail Inogamov, 河内哲哉
  • Organizer: 日本物理学会第71回年次大会
  • Place of Presentation: 日本、東北学院大学泉キャンパス （宮城県仙台市）
  • Year and Date: 2016-03-16
• [Presentation] Ｘ線レーザープローブを用いたfsレーザー薄膜アブレーションの観測 (2016)
  • Author(s): M. Nishikino, T. Kawachi, N. Hasegawa, M. Ishino, Y. Minami, T. Suemoto, N. Ohnishi, A. M. Ito, K. Satoe, A. Y. Faenov , N. A. Inogamov, and M. Yamagiwa
  • Organizer: レーザー学会、第３６回年次大会
  • Place of Presentation: 日本、名城大学天白キャンパス （愛知県名古屋市）
  • Year and Date: 2016-01-20
  • Invited
• [Presentation] Plasma Soft X-ray laser for probing nano scales dynamics of femto-second laser ablation (2015)
  • Author(s): T. Kawachi, M. Nishikino, N. Hasegawa, Y. Minami, M. Baba, M. Yamagiwa, K. Kondo, N. A. Inogamov, V. Zakhovskii, A. Ya. Faenov and T. Suemoto
  • Organizer: The 7th Asian Workshop on Coherent X-ray Radiation
  • Place of Presentation: 韓国、光州
  • Year and Date: 2015-08-31
  • Int'l Joint Research / Invited
• [Presentation] Observation of dynamics and modification of solid surface using a picosecond soft x-ray laser (2015)
  • Author(s): M. Nishikino, T. Kawachi, N. Hasegawa, M. Ishino, Y. Minami, T. Suemoto, N. Ohnishi, A. M. Ito, K. Satoe, A. Y. Faenov, N. A. Inogamov, and M. Yamagiwa
  • Organizer: SPIE Optical Engineering and Applications
  • Place of Presentation: 米国、加州
  • Year and Date: 2015-08-15
  • Int'l Joint Research / Invited
• [Presentation] 軟X線レーザーの集光照射による表面ナノ加工 (2015)
  • Author(s): 石野 雅彦、圓山 桃子、長谷川 登、錦野 将元、保 智己、Faenov Anatoly、Pikuz Tatiana、河内 哲哉、山極 満
  • Organizer: 第62回応用物理学会春期学術講演会
  • Place of Presentation: 東海大学、神奈川県
  • Year and Date: 2015-03-11
• [Presentation] Source development and applications of coherent x-rays and energetic particle beam using high peak power lasers (Plenary talk) (2015)
  • Author(s): T. Kawachi
  • Organizer: The 17th Zvenigorod international conference on plasma physics and controlled fusion
  • Place of Presentation: Zvenigorod, Moscow, Russia
  • Year and Date: 2015-02-08 – 2015-02-13
  • Invited
• [Presentation] Zeeman splitting of laser-driven soft x-ray laser line by the enhancement of magnetic field in plasma (2014)
  • Author(s): T. Kawachi, N. Hasegawa, A. Iwamae, and H. Yoneda
  • Organizer: The 22nd International conference on spectral line shapes
  • Place of Presentation: Tennessee, USA
  • Year and Date: 2014-06-01 – 2014-06-06
  • Invited
• [Presentation] Progress and prospects of coherent x-ray research using high power lasers in JAEA (2014)
  • Author(s): T. Kawachi, M. Nishkino, A. Sasaki, M. Ishino, N. Hasegawa, T. Imazono, T. Pikuz, A. Faenov, M. Magnitskiy, M. Matuyama, T. Tomita, T. Suemoto, A. Pirozhkov, S. Bulanov, H. Kiriyama, M. Kando, M. Yamagiwa, K. Kondo, P. Bolton and Y. Kato
  • Organizer: The 14th International Conference on X-ray lasers
  • Place of Presentation: Fortcollins, CO, USA
  • Year and Date: 2014-05-26 – 2014-05-30
  • Invited
• [Presentation] Observation of Weakly Excited Ablation Dynamics with Femtosecond laser by using Time-resolved soft x-ray imaging technique (2014)
  • Author(s): M. Nishikino, N. Hasegawa, T. Eyama, N. Kakimoto, T. Tomita, D. Hatomi, N. Ohnishi, A. Ito, Y. Minami, M. Baba, T. Kawachi, M. Yamagiwa, T. Suemoto
  • Organizer: The 14th International Conference on X-ray lasers
  • Place of Presentation: Fortcollins, CO, USA
  • Year and Date: 2014-05-26 – 2014-05-30
  • Invited
• [Presentation] Progress and Prospects of Coherent X-ray Research using High Power Lasers in JAEA (2014)
  • Author(s): T. Kawachi, M. Nishikino, A. Sasaki, M. Ishino, N. Hasegawa, T. Imazono, T. Pikuz, A. faenov, M. Magnitskiy, M. Maruyama, T. Tomita, T. Suemoto, A. Pirozhkov, S. Bulanov, H. Kiriyama, M. Kando, M. Yamagiwa, K. Kondo, P. Bolton, and Y. Kato
  • Organizer: The 14th International Conference of X-ray Lasers
  • Place of Presentation: Fort Collins, USA
  • Invited
• [Presentation] Zeeman splitting of laser-driven soft x-ray laser line by the enhancement of magnetic field in plasma (2014)
  • Author(s): T. Kawachi, N. Hasegawa, A. Iwamae, H. Yoneda
  • Organizer: The 22nd International Conference of Spectral Line Shapes
  • Place of Presentation: Tennessee, USA
  • Invited
• [Presentation] Observation of the nano-sclae surface dynamics of femtosecond laser ablation by time-resolved soft x-ray imaging technique
  • Author(s): M.Nishikino, N. Hasegawa, T. Tomita, Y. Minami, R. Takei, M. Baba, T. Eyama, S. Takayoshi, T. Kawachi, D. Hatomi, N. Ohnishi, M. Yamagiwa and T. Suemoto
  • Organizer: IFSA2013
  • Place of Presentation: Nara, Japan
• [Presentation] Observation of the nano-sclae surface dynamics of femtosecond laser ablation by time-resolved soft x-ray imaging technique
  • Author(s): M.Nishikino, N. Hasegawa, T. Tomita, Y. Minami, R. Takei, M. Baba, T. Eyama, S. Takayoshi, T. Kawachi, D. Hatomi, N. Ohnishi, M. Yamagiwa and T. Suemoto
  • Organizer: SPIE Optical Engineering and Applications
  • Place of Presentation: San Diego, USA
• [Presentation] Nanometer-sclae modification on metal surfaces induced by soft x-ray laser pulse irradiations
  • Author(s): M. Ishino, A. Faenov, M. Tanaka, S. Tamotsu, T. Pikuz, N. Hasegawa, M. Nishikino, N. Inogamov, I. Skobelev, V. Fortov, G. Norman, S. Starikov, V. Stegailov, T. Kaihori, T. Kawachi and M. Yamagiwa
  • Organizer: SPIE Optical Engineering and Applications
  • Place of Presentation: San Diego, USA