Improvement of compositional analysis on TEM by means of microcalorimeter-EDS

• Project/Area Number: 25390086
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Research Field: Thin film/Surface and interfacial physical properties
• Research Institution: National Institute for Materials Science
• Principal Investigator: HARA TORU 国立研究開発法人物質・材料研究機構, 表界面構造・物性ユニット, 主席研究員 (70238161)
• Co-Investigator(Renkei-kenkyūsha): MARHATA Keisuke 国立大学法人九州大学, 工学研究院エネルギー量子工学部門, 准教授 (30190317) ; NISHIDA Minoru 国立大学法人九州大学, 綜合理工学研究院融合創造理工学部門, 教授 (90183540)
• Project Period (FY): 2013-04-01 – 2016-03-31
• Project Status: Completed (Fiscal Year 2015)
• Budget Amount: ¥4,940,000 (Direct Cost: ¥3,800,000、Indirect Cost: ¥1,140,000); Fiscal Year 2015: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000); Fiscal Year 2014: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000); Fiscal Year 2013: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
• Keywords: 電子顕微鏡 / 組成分析 / 超伝導遷移端センサ / マイクロカロリメータ / X線分析 / 金属材料 / エネルギー分解能 / 分析電子顕微鏡

Outline of Final Research Achievements

We are developing a transition-edge sensor type X-ray detector for electron microscopes. This detector realizes X-ray analysis with very high energy resolution, less than 10eV. The purpose of this study is to develop a method to perform accurate analysis and apply to practical researches. From the present study, X-ray detecting efficiency and detecting limit etc. with the new detecting system were investigated.

Research Products

• [Presentation] マイクロカロリメータEDSによるSTEMでの組成分析の高精度化 (2015)
  • Author(s): 原 徹
  • Organizer: 日本顕微鏡学会第39回関東支部講演会
  • Place of Presentation: 工学院大学新宿キャンパス
  • Year and Date: 2015-02-28
  • Invited
• [Presentation] Development of an Analytical TEM with a Transition-Edge Sensor type Microcalorimeter EDS detector (2014)
  • Author(s): 原 徹、田中啓一、前畑京介、満田和久、山崎典子、山中良浩
  • Organizer: 18th. International Microscopy Congress
  • Place of Presentation: Prague Congress Center, Prague
  • Year and Date: 2014-09-07 – 2014-09-12