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MEMS sensor based in-situ measurements systems for detecting breathing and optical surface image characteristics at small airways

Research Project

Project/Area Number 26286034
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypePartial Multi-year Fund
Section一般
Research Field Nano/Microsystems
Research InstitutionHiroshima City University

Principal Investigator

Shikida Mitsuhiro  広島市立大学, 情報科学研究科, 教授 (80273291)

Co-Investigator(Kenkyū-buntansha) 川部 勤  名古屋大学, 医学系研究科(保健), 教授 (20378219)
溝尻 瑞枝  名古屋大学, 工学(系)研究科(研究院), 助教 (70586594)
Co-Investigator(Renkei-kenkyūsha) HASEGAWA Yoshihiro  広島市立大学, 情報科学研究科, 助教 (40402507)
Project Period (FY) 2014-04-01 – 2018-03-31
Project Status Completed (Fiscal Year 2017)
Budget Amount *help
¥15,730,000 (Direct Cost: ¥12,100,000、Indirect Cost: ¥3,630,000)
Fiscal Year 2017: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
Fiscal Year 2016: ¥5,460,000 (Direct Cost: ¥4,200,000、Indirect Cost: ¥1,260,000)
Fiscal Year 2015: ¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2014: ¥4,290,000 (Direct Cost: ¥3,300,000、Indirect Cost: ¥990,000)
KeywordsMEMS / マイクロデバイス / 知能機械 / マイクロ・ナノデバイス / マイクロマシン / 医療・福祉
Outline of Final Research Achievements

MEMS technologies were applied for producing the in-situ measurement system that could be used to detect both breathing and optical surface image properties at the small airways. The response time value of the flow sensor was shortened to less than 52 ms by decreasing the thermal capacity of around the heater. Then the thermal flow sensor was integrated onto a basket forceps to fix the flow sensor onto the inside surface of the airway. The basket-forceps-type flow sensor was applied in an animal experiment in which it successfully detected the breathing properties in the airway of a rat. Finally, the tube flow sensor was developed to be easily attached to an optical fiberscope. The fabricated tube flow sensor was attached to the outside of a fiberscope with 1.6 mm in diameter, and it was inserted into a tube that was connected to the airway of a rat. An optical image in the tube was captured, and its breathing airflow rate was successfully detected.

Report

(5 results)
  • 2017 Annual Research Report   Final Research Report ( PDF )
  • 2016 Annual Research Report
  • 2015 Annual Research Report
  • 2014 Annual Research Report
  • Research Products

    (49 results)

All 2018 2017 2016 2015 2014 Other

All Journal Article (8 results) (of which Peer Reviewed: 8 results,  Open Access: 2 results,  Acknowledgement Compliant: 2 results) Presentation (37 results) (of which Int'l Joint Research: 16 results) Remarks (2 results) Patent(Industrial Property Rights) (2 results)

  • [Journal Article] Development of tube flow sensor by using film transfer technology and its application to in situ breathing and surface image evaluation in airways2018

    • Author(s)
      Okihara Chiaki、Hasegawa Yoshihiro、Matsushima Miyoko、Kawabe Tsutomu、Shikida Mitsuhiro
    • Journal Title

      Microsystem Technologies

      Volume: online Issue: 8 Pages: 3417-3424

    • DOI

      10.1007/s00542-018-3733-5

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Catheter type thermal flow sensor with small footprint for measuring breathing function2018

    • Author(s)
      Hasegawa Y.、Kawaoka H.、Mitsunari Y.、Matsushima M.、Kawabe T.、Shikida M.
    • Journal Title

      Microsystem Technologies

      Volume: online Issue: 8 Pages: 3455-3465

    • DOI

      10.1007/s00542-018-3748-y

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Heartbeat signal detection from analysis of airflow in rat airway under different depths of anesthesia conditions2017

    • Author(s)
      KAWAOKA Hidenori, YAMADA Takayuki, MATSUSHIMA Miyoko, KAWABE Tsutomu, HASEGAWA Yoshihiro, SHIKIDA Mitsuhiro
    • Journal Title

      IEEE Sensors Journal

      Volume: 17 Issue: 14 Pages: 4369-4377

    • DOI

      10.1109/jsen.2017.2707594

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Vacuum cavity encapsulation for response time shortening in flexible thermal flow sensor2017

    • Author(s)
      Shikida Mitsuhiro、Kim Pilyoung、Shibata Shunji
    • Journal Title

      Microsystem Technologies

      Volume: 23 Issue: 8 Pages: 3547-3558

    • DOI

      10.1007/s00542-016-3168-9

    • Related Report
      2017 Annual Research Report 2016 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Characterization of basket-forceps-type micro-flow-sensor for breathing measurements in small airway2017

    • Author(s)
      HARADA Naoaki, HASEGAWA Yoshihiro, ONO Ryota, MATSUSHIMA Miyoko, KAWABE Tsutomu, SHIKIDA Mitsuhiro
    • Journal Title

      Microsystem Technologies

      Volume: 23 Issue: 12 Pages: 5397-5406

    • DOI

      10.1007/s00542-016-3265-9

    • Related Report
      2017 Annual Research Report 2016 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Respiration and heartbeat signal detection from airflow at airway in rat by catheter flow sensor with tmeparature compensation function2017

    • Author(s)
      HASEGAWA Yoshihiro, KAWAOKA Hidenori, YAMADA Takayuki, MATSUSHIMA Miyoko, KAWABE Tsutomu, SHIKIDA Mitsuhiro
    • Journal Title

      Journal of Micromechanics and Microengineering

      Volume: 27 Issue: 12 Pages: 1-11

    • DOI

      10.1088/1361-6439/aa9595

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Development of implantable catheter flow sensor into inside of bronchi for laboratory animal2015

    • Author(s)
      M. Shikida, T. Matsuyama, T. Yamada, M. Matsushima, T. Kawabe
    • Journal Title

      Microsystem Technologies

      Volume: Online Issue: 12 Pages: 2239-2245

    • DOI

      10.1007/s00542-013-1924-7

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Fabrication of flexible thermal MEMS device based on Cu on polyimide substrate and its flow sensor application2015

    • Author(s)
      M. Shikida, Y. Niimi, S. Shibata
    • Journal Title

      Microsystem Technologies

      Volume: Online Issue: 3 Pages: 677-685

    • DOI

      10.1007/s00542-015-2704-3

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Presentation] Integration of flow sensor and optical fiberscope for in-situ breathing and surface image evaluations in small airway2017

    • Author(s)
      C. Okihara, Y. Hasegawa, M. Matsushima, T. Kawabe, M. Shikida
    • Organizer
      19th International Conference on Solid-State Sensors, Actuators and Microsystems
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of catheter flow sensor for breathing measurements at different levels of tracheobronchial airway2017

    • Author(s)
      T. Fujinori, Y. Hasegawa, M. Matsushima, T. Kawabe, M. Shikida
    • Organizer
      Eurosensors2017
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of small-footprint thermal sensor detecting airflow at mouth in baby2017

    • Author(s)
      Y. Mitsunari, Y. Hasegawa, M. Matsushima, T. Kawabe, M. Shikida
    • Organizer
      Eurosensors2017
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Micromachined tube type thermal flow sensor for adult-sized tracheal intubation tube2017

    • Author(s)
      S. Watanabe, Y. Hasegawa, M. Matsushima, T. Kawabe, M. Shikida
    • Organizer
      Eurosensors2017
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 末梢気道におけるその場観察と呼吸量計測を可能とする光ファイバースコープ搭載型流量センサの開発2017

    • Author(s)
      沖原千明,長谷川義大,松島充代子,川部勤,式田光宏
    • Organizer
      第34回「センサ・マイクロマシンと応用システム」シンポジウム
    • Related Report
      2017 Annual Research Report
  • [Presentation] 気流検出機能付気管チューブシステムとそれによるその場呼吸計測法に関する研究2017

    • Author(s)
      渡辺瞬,長谷川義大,松島充代子,川部勤,式田光宏
    • Organizer
      第34回「センサ・マイクロマシンと応用システム」シンポジウム
    • Related Report
      2017 Annual Research Report
  • [Presentation] 経気管支的に肺機能計測が可能な気管支径対応カテーテル型流量センサの開発2017

    • Author(s)
      藤範知弘,長谷川義大,松島充代子,川部勤,式田光宏
    • Organizer
      第34回「センサ・マイクロマシンと応用システム」シンポジウム
    • Related Report
      2017 Annual Research Report
  • [Presentation] 乳幼児口元気流計測を目的とした熱式チューブ型マイクロ流量センサの開発2017

    • Author(s)
      光成勇樹,長谷川義大,松島充代子,川部勤,式田光宏
    • Organizer
      第34回「センサ・マイクロマシンと応用システム」シンポジウム
    • Related Report
      2017 Annual Research Report
  • [Presentation] MEMSセンサ付き気管内チューブの無線化に関する研究2017

    • Author(s)
      波田拓馬,谷口和弘,長谷川義大,式田光宏
    • Organizer
      第34回「センサ・マイクロマシンと応用システム」シンポジウム
    • Related Report
      2017 Annual Research Report
  • [Presentation] Effect of guide tube length on sensor output in inspired airflow measurement2016

    • Author(s)
      Y. Hasegawa, N. Harada, M. Matsushima, T. Kawabe, M. Shikida
    • Organizer
      29th International Microprocesses and Nanotechnology Conference
    • Place of Presentation
      Kyoto, Japan
    • Year and Date
      2016-11-08
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Breathing signal analysis of mouse during drug inhalation2016

    • Author(s)
      H. Kawaoka, Y. Hasegawa, M. Matsushima, T. Kawabe, M. Shikida
    • Organizer
      29th International Microprocesses and Nanotechnology Conference
    • Place of Presentation
      Kyoto, Japan
    • Year and Date
      2016-11-08
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Measurement of heartbeat signals from airflow at mouth in rat by catheter flow sensor2016

    • Author(s)
      H. Kawaoka, Y. Hasegawa, M. Shikida, M. Matsushima, T. Kawabe
    • Organizer
      IEEE Sensors 2016
    • Place of Presentation
      Orland, USA
    • Year and Date
      2016-10-30
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Development of cylinder hollow structure with flow sensor by film transfer technology2016

    • Author(s)
      C. Okihara, Y. Hasegawa, M. Shikida, M. Matsushima, T. Kawabe
    • Organizer
      IEEE Sensors 2016
    • Place of Presentation
      Orland, USA
    • Year and Date
      2016-10-30
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 心拍信号検出を目的とした温度補償機能付カテーテル型流量センサの開発2016

    • Author(s)
      河岡秀宜, 山田貴之, 松島充代子, 川部勤, 長谷川義大, 式田光宏
    • Organizer
      第33回「センサ・マイクロマシンと応用システム」シンポジウム
    • Place of Presentation
      平戸
    • Year and Date
      2016-10-24
    • Related Report
      2016 Annual Research Report
  • [Presentation] 肺機能計測用カテーテル型流量センサの高速応答化に関する研究2016

    • Author(s)
      渡辺瞬, 長谷川義大, 松島充代子, 川部勤, 式田光宏
    • Organizer
      第33回「センサ・マイクロマシンと応用システム」シンポジウム
    • Place of Presentation
      平戸
    • Year and Date
      2016-10-24
    • Related Report
      2016 Annual Research Report
  • [Presentation] 肺機能評価を目的としたバスケット鉗子搭載型MEMS流量センサの開発2016

    • Author(s)
      長谷川義大, 原田直明, 小野良太, 松島充代子, 川部勤, 式田光宏
    • Organizer
      第33回「センサ・マイクロマシンと応用システム」シンポジウム
    • Place of Presentation
      平戸
    • Year and Date
      2016-10-24
    • Related Report
      2016 Annual Research Report
  • [Presentation] Response time shortening in thermal catheter flow sensor2016

    • Author(s)
      S. Watanabe, Y. Hasegawa, M. Matsushima, T. Kawabe, M. Shikida
    • Organizer
      Asia-Paciific Conference on Transducers and Micro-Nano Technology
    • Place of Presentation
      Kanazawa, Japan
    • Year and Date
      2016-06-26
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Micro flow sensor integration onto basket forceps for pulmonary function evaluation2016

    • Author(s)
      N. Harada, R. Ono, M. Matsushima, T. Kawabe, Y. Hasegawa, M. Shikida
    • Organizer
      11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
    • Place of Presentation
      Sendai, Japan
    • Year and Date
      2016-04-17
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Detection of kinetic heartbeat signals from airflow at mouth by catheter flow sensor with temperature compensation2016

    • Author(s)
      H. Kawaoka, T. Yamada, M. Matsushima, T. Kawabe, Y. Hasegawa, M. Shikida
    • Organizer
      IEEE Micro Electro Mechanical Systems Conference
    • Place of Presentation
      Shanghai, China
    • Year and Date
      2016-01-24
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Fabrication of smooth-surfaced flexible thermal sensor for detecting wall shear stress2016

    • Author(s)
      Y. Hasegawa, T. Yamada, M. Shikida
    • Organizer
      IEEE Micro Electro Mechanical Systems Conference
    • Place of Presentation
      Shanghai, China
    • Year and Date
      2016-01-24
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] マルチ計測モードが可能なMEMS流量センサの開発2016

    • Author(s)
      藤範知弘, 長谷川義大, 松島充代子, 川部勤, 式田光宏
    • Organizer
      第39回日本生体医工学会中国四国支部大会
    • Place of Presentation
      徳島大学
    • Related Report
      2016 Annual Research Report
  • [Presentation] 呼吸心拍測定を目指した温度補償機能付き熱式カテーテル型センサの開発2016

    • Author(s)
      光成勇樹, 長谷川義大, 松島充代子, 川部勤, 式田光宏
    • Organizer
      第39回日本生体医工学会中国四国支部大会
    • Place of Presentation
      徳島大学
    • Related Report
      2016 Annual Research Report
  • [Presentation] 呼吸心拍検出を目的とした温度補償機能付MEMS流量センサの開発2015

    • Author(s)
      河岡秀宜, 山田貴之, 松島充代子, 川部勤, 長谷川義大, 式田光宏
    • Organizer
      第38回日本生体医工学会中国四国支部大会
    • Place of Presentation
      広島市立大学,広島
    • Year and Date
      2015-11-28
    • Related Report
      2015 Annual Research Report
  • [Presentation] 呼吸器系疾患の精密診断を目的としたバスケット鉗子実装型MEMSセンサの開発2015

    • Author(s)
      原田直明, 小野良太, 松島充代子, 川部勤, 長谷川義大, 式田光宏
    • Organizer
      第38回日本生体医工学会中国四国支部大会
    • Place of Presentation
      広島市立大学,広島
    • Year and Date
      2015-11-28
    • Related Report
      2015 Annual Research Report
  • [Presentation] Extraction of heartbeat signal from airflow at mouth by flow sensor2015

    • Author(s)
      H. Kawaoka, T. Yamada, M. Matsushima, T. Kawabe, Y. Hasegawa, M. Shikida
    • Organizer
      Proccedings of IEEE Sensors 2015
    • Place of Presentation
      Busan, Korea
    • Year and Date
      2015-11-01
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Responsible time shorting of flexible thermal flow sensor for medical applications2015

    • Author(s)
      K. Imaeda, S. Shibata, M. Matsushima, T. Kawabe, M. Shikida
    • Organizer
      Proccedings of IEEE Sensors 2015
    • Place of Presentation
      Busan, Korea
    • Year and Date
      2015-11-01
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] MEMSカテーテル型流量センサを用いた呼吸心拍機能検出2015

    • Author(s)
      河岡秀宜, 山田貴之, 松島充代子, 川部勤, 長谷川義大, 式田光宏
    • Organizer
      日本機械学会マイクロ・ナノ工学部門, 第7回 マイクロ・ナノ工学シンポジウム
    • Place of Presentation
      朱鷺メッセ,新潟
    • Year and Date
      2015-10-28
    • Related Report
      2015 Annual Research Report
  • [Presentation] 気道内固定機能付きMEMS流量センサの開発2015

    • Author(s)
      原田直明, 小野良太, 松島充代子, 川部勤, 長谷川義大, 式田光宏
    • Organizer
      日本機械学会マイクロ・ナノ工学部門, 第7回 マイクロ・ナノ工学シンポジウム
    • Place of Presentation
      朱鷺メッセ,新潟
    • Year and Date
      2015-10-28
    • Related Report
      2015 Annual Research Report
  • [Presentation] Basket forceps with flow sensor for evaluating breathing characteristics in small airway2015

    • Author(s)
      N. Harada, R. Ono, M. Matsushima, T. Kawabe, M. Shikida
    • Organizer
      The 18th International Conference on Solid-State Sensors and Actuators
    • Place of Presentation
      Anchorage, Alaska, USA
    • Year and Date
      2015-06-21
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Detection of both heartbeat and respiration signals from airflow at mouth using catheter flow sensor2015

    • Author(s)
      H. Kawaoka, T. Yamada, M. Matsushima, T. Kawabe, M. Shikida
    • Organizer
      The 18th International Conference on Solid-State Sensors and Actuators
    • Place of Presentation
      Anchorage, Alaska, USA
    • Year and Date
      2015-06-21
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Vacuum cavity formation for high thermal isolation in flexible thermal sensor2015

    • Author(s)
      P. Kim, S. Shibata, M. Shikida
    • Organizer
      Tech. Dig. of IEEE Micro Electro Mechanical Systems Conference
    • Place of Presentation
      Estoril, Portugal
    • Year and Date
      2015-01-18 – 2015-01-22
    • Related Report
      2014 Annual Research Report
  • [Presentation] 動物実験における呼吸機能評価を目的とした気道内固定機構付き流量センサの開発2014

    • Author(s)
      山田貴之, 松山拓矢, 松島充代子, 川部勤, 式田光宏
    • Organizer
      第23回日本コンピュータ外科学会大会
    • Place of Presentation
      大阪大学コンベンションセンター
    • Year and Date
      2014-11-08 – 2014-11-09
    • Related Report
      2014 Annual Research Report
  • [Presentation] Implantable catheter flow sensor with legs in air passage for laboratory animal2014

    • Author(s)
      T. Yamada, R. Ono, T. Matsuyama, M. Matsushima, T. Kawabe, M. Shikida
    • Organizer
      Proccedings of IEEE Sensors 2014
    • Place of Presentation
      Valencia, Spain
    • Year and Date
      2014-11-02 – 2014-11-06
    • Related Report
      2014 Annual Research Report
  • [Presentation] Flexible thermal MEMS flow sensor based on Cu on polyimide substrate2014

    • Author(s)
      S. Shibata, Y. Niimi, M. Shikida
    • Organizer
      Proccedings of IEEE Sensors 2014
    • Place of Presentation
      Valencia, Spain
    • Year and Date
      2014-11-02 – 2014-11-06
    • Related Report
      2014 Annual Research Report
  • [Presentation] Wearable displacement sensor system based on elevating tube for measuring breathing pattern2014

    • Author(s)
      R. Ono, M. Matsushima, T. Kawabe, M. Shikida
    • Organizer
      Proccedings of IEEE Sensors 2014
    • Place of Presentation
      Valencia, Spain
    • Year and Date
      2014-11-02 – 2014-11-06
    • Related Report
      2014 Annual Research Report
  • [Presentation] 樹脂製フィルムデバイスへのMEMS応用2014

    • Author(s)
      式田光宏
    • Organizer
      日本機械学会マイクロ・ナノ工学部門, 第6回 マイクロ・ナノ工学シンポジウム
    • Place of Presentation
      松江
    • Year and Date
      2014-10-20 – 2014-10-22
    • Related Report
      2014 Annual Research Report
  • [Presentation] 銅張積層板を用いた熱式フレキシブルセンサに関する研究2014

    • Author(s)
      柴田峻志, 新美洋介, 式田光宏
    • Organizer
      日本機械学会マイクロ・ナノ工学部門, 第6回 マイクロ・ナノ工学シンポジウム
    • Place of Presentation
      松江
    • Year and Date
      2014-10-20 – 2014-10-22
    • Related Report
      2014 Annual Research Report
  • [Remarks] 広島市立大学情報科学研究科医用情報科学専攻医用ロボット研究室

    • URL

      http://www.mmse.info.hiroshima-cu.ac.jp/index.html

    • Related Report
      2017 Annual Research Report 2015 Annual Research Report
  • [Remarks] 広島市立大学情報科学研究科医用ロボット研究室

    • URL

      http://www.mmse.info.hiroshima-cu.ac.jp/index.html

    • Related Report
      2016 Annual Research Report 2014 Annual Research Report
  • [Patent(Industrial Property Rights)] 医療用流れ測定装置およびその製造方法2016

    • Inventor(s)
      川部勤,松島充代子,式田光宏,長谷川義大
    • Industrial Property Rights Holder
      国立大学法人名古屋大学,公立大学法人広島市立大学
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2016-212332
    • Filing Date
      2016-10-28
    • Related Report
      2016 Annual Research Report
  • [Patent(Industrial Property Rights)] 気道内気体流量測定装置2015

    • Inventor(s)
      川部勤,式田光宏,松島充代子
    • Industrial Property Rights Holder
      名古屋大学
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2015-019748
    • Filing Date
      2015-02-03
    • Related Report
      2014 Annual Research Report

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Published: 2014-04-04   Modified: 2019-03-29  

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