FORMATION OF THREE-DIMENSIONAL SHAPES IN SEMICONDUCTOR SURFACES FOR FUNCTIONAL DEVICES THROUGH PHOTOCHEMICAL REACTION WITH ELECTROPHILIC FLUORINATION AGENTS
| Project/Area Number |
26289017
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Partial Multi-year Fund |
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| Section | 一般 |
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| Research Field |
Production engineering/Processing studies
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| Research Institution | Osaka University |
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Principal Investigator |
MORITA Mizuho 大阪大学, 工学(系)研究科(研究院), 教授 (50157905)
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| Co-Investigator(Kenkyū-buntansha) |
川合 健太郎 大阪大学, 工学(系)研究科(研究院), 助教 (90514464)
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| Co-Investigator(Renkei-kenkyūsha) |
ADACHI Kenji 大阪大学, 大学院工学研究科, 招へい教授 (60521739)
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| Project Period (FY) |
2014-04-01 – 2017-03-31
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| Project Status |
Completed (Fiscal Year 2016)
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| Budget Amount *help |
¥16,510,000 (Direct Cost: ¥12,700,000、Indirect Cost: ¥3,810,000)
Fiscal Year 2016: ¥5,070,000 (Direct Cost: ¥3,900,000、Indirect Cost: ¥1,170,000)
Fiscal Year 2015: ¥5,330,000 (Direct Cost: ¥4,100,000、Indirect Cost: ¥1,230,000)
Fiscal Year 2014: ¥6,110,000 (Direct Cost: ¥4,700,000、Indirect Cost: ¥1,410,000)
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| Keywords | 半導体表面 / フッ素化剤 / 三次元形状 / 光エッチング / ナノマイクロ加工 |
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| Outline of Final Research Achievements |
Convex spherical shapes have been formed in silicon surfaces by photoetching with N-fluoropyridinium salts using a system with a projector and reduction optics. Silicon optical-waveguides with a vertical-bend structure have been fabricated using photoetching with the system and the vertical transmission of light passed through a horizontal waveguide with the bend structure has been demonstrated. A multiple beam interference system has been developed and silicon surface textures with a grid-like pattern have been formed by photoetching with the three beams interference system.
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Report
(4 results)
Research Products
(8 results)
