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Development of memory diode and its application to densest array memory

Research Project

Project/Area Number 26289099
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypePartial Multi-year Fund
Section一般
Research Field Electron device/Electronic equipment
Research InstitutionTokyo University of Agriculture and Technology

Principal Investigator

Suda Yoshiyuki  東京農工大学, 工学(系)研究科(研究院), 教授 (10226582)

Co-Investigator(Kenkyū-buntansha) 塚本 貴広  東京農工大学, 工学(系)研究科(研究院), 助教 (50640942)
Project Period (FY) 2014-04-01 – 2017-03-31
Project Status Completed (Fiscal Year 2016)
Budget Amount *help
¥16,120,000 (Direct Cost: ¥12,400,000、Indirect Cost: ¥3,720,000)
Fiscal Year 2016: ¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2015: ¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2014: ¥7,280,000 (Direct Cost: ¥5,600,000、Indirect Cost: ¥1,680,000)
Keywords半導体メモリ / 不揮発性メモリ / 抵抗変化型メモリ / PNダイオード / クロスポイント型配列 / SiC / 界面準位 / 先端機能デバイス / 電子デバイス・機器 / 界面電位
Outline of Final Research Achievements

We clarified the fundamental structure and operation physics about the proposed memory diode having both resistive-nonvolatile-memory and rectifying characteristics which are suited for the theoretically densest cross-point array. We analyzed the origin of electron-trapping defects which contribute to the memory effect, and clarified the relationship between the electron-trap-layer structures, the fabrication methods, and the memory characteristics. As each specification, we obtained endurance characteristics of 10-to-the-power-7 on/off switching cycles and writing speeds of less than 20 microseconds which surpass those of the current flash memories. Further, we have succeeded in developing the low-temperature fabrication processes with fabrication temperatures of not more than 473 K and show the compatibility of the fabrication of the memory diode with that of metal-layer-sandwiched cross-point memory array.

Report

(4 results)
  • 2016 Annual Research Report   Final Research Report ( PDF )
  • 2015 Annual Research Report
  • 2014 Annual Research Report
  • Research Products

    (17 results)

All 2017 2016 2015 2014 Other

All Journal Article (5 results) (of which Peer Reviewed: 3 results,  Acknowledgement Compliant: 3 results) Presentation (11 results) (of which Int'l Joint Research: 2 results,  Invited: 1 results) Remarks (1 results)

  • [Journal Article] Crystallinity control of SiC grown on Si by sputtering method2017

    • Author(s)
      Ryosuke Watanabe, Takahiro Tsukamoto, Koichi Kamisako, Yoshiyuki Suda
    • Journal Title

      J. Crystal Growth

      Volume: 463 Pages: 67-71

    • DOI

      10.1016/j.jcrysgro.2017.01.042

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed
  • [Journal Article] p-Cu2O/SiOx/n-SiC/n-Si memory diode fabricated with room-temperature-sputtered n-SiC and SiOx2016

    • Author(s)
      Atsushi Yamashita, Takahiro Tsukamoto, Yoshiyuki Suda
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 55 Issue: 12 Pages: 124103-124103

    • DOI

      10.7567/jjap.55.124103

    • NAID

      210000147298

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] p-Cu2O/AlOx/n-SiC/n-Si構造の不揮発性pnメモリダイオードと低電圧動作2016

    • Author(s)
      土屋充沙、塚本貴弘、須田良幸
    • Journal Title

      信学技報

      Volume: 116 Pages: 17-20

    • Related Report
      2016 Annual Research Report
  • [Journal Article] p-Cu2O/SiCxOy/n-SiC/n-Si memory diode having resistive nonvolatile memory and rectifying behaviors2014

    • Author(s)
      Atsushi Yamashita, Yoshihiko Sato, Takahiro Tsukamoto, and Yoshiyuki Suda
    • Journal Title

      Applied Physics Express

      Volume: 7 Issue: 7 Pages: 074203-074203

    • DOI

      10.7567/apex.7.074203

    • NAID

      210000137173

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] p-Cu2O/SiOx/n-SiC構造pnメモリダイオードの低温形成2014

    • Author(s)
      山下敦史、塚本貴広、須田良幸
    • Journal Title

      信学技報

      Volume: 114 Pages: 43-47

    • Related Report
      2014 Annual Research Report
    • Acknowledgement Compliant
  • [Presentation] p-Cu2O/SiNx/n-SiC/n-Si構造の抵抗変化型不揮発性メモリダイオード2017

    • Author(s)
      素村晃浩, 塚本貴広, 加藤格, 雑賀章浩, 須田良幸
    • Organizer
      第64回応用物理学会春季学術講演会
    • Place of Presentation
      パシフィコ横浜(神奈川県、横浜市)
    • Year and Date
      2017-03-14
    • Related Report
      2016 Annual Research Report
  • [Presentation] SiCxOyおよびSiOx電子捕獲層を用いた不揮発性pnメモリダイオードの特性制御SiCxOyおよびSiOx電子捕獲層を用いた不揮発性pnメモリダイオードの特性制御2017

    • Author(s)
      土屋充沙,塚本貴広,加藤格,雑賀章浩,須田良幸
    • Organizer
      第64回応用物理学会春季学術講演会
    • Place of Presentation
      パシフィコ横浜(神奈川県、横浜市)
    • Year and Date
      2017-03-14
    • Related Report
      2016 Annual Research Report
  • [Presentation] p-Cu2O/AlOx/n-SiC/n-Si-structured nonvolatile pn memory diode with low switching voltages2016

    • Author(s)
      Misa Tsuchiya, Tsukamoto Tsukamoto and Yoshiyuki Suda
    • Organizer
      29th Int. Microprocesses and Nanotechnology Conf.
    • Place of Presentation
      ANA Crowne Plaza Kyoto (Kyoto, Japan)
    • Year and Date
      2016-11-08
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] p-Cu2O/AlOx/n-SiC/n-Si構造の不揮発性pnメモリダイオードと低電圧動作2016

    • Author(s)
      土屋充沙、塚本貴弘、須田良幸
    • Organizer
      電子情報通信学会電子デバイス研究会
    • Place of Presentation
      首都大学東京(東京都、八王子市)
    • Year and Date
      2016-07-23
    • Related Report
      2016 Annual Research Report
  • [Presentation] Au/CuOx/(CuxNiySiz)mOn/n-Si構造の抵抗変化型不揮発性メモリ2016

    • Author(s)
      岩佐太陽、塚本貴広、須田良幸
    • Organizer
      第63回応用物理学会春季学術講演会
    • Place of Presentation
      東京工業大学(東京都、目黒区)
    • Year and Date
      2016-03-19
    • Related Report
      2015 Annual Research Report
  • [Presentation] SiGe Sputter Epitaxy and Its Application to SiGe 2D Devices2015

    • Author(s)
      Yoshiyuki Suda, Takahiro Tsukamoto, Nobumitsu Hirose, Akifumi Kasamatsu, Toshiaki Matsui, Takashi Mimura
    • Organizer
      Collaborative Conference on Crystal Growth
    • Place of Presentation
      Eaton Hotel (Hong Kong, China)
    • Year and Date
      2015-12-14
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] 抵抗変化型不揮発性メモリの探索2015

    • Author(s)
      須田良幸
    • Organizer
      De Novo Si Workshop
    • Place of Presentation
      静岡大学(静岡県、浜松市)
    • Year and Date
      2015-10-30
    • Related Report
      2015 Annual Research Report
  • [Presentation] Au/CuOx/NiOx/n-Si 2層金属酸化物構造の抵抗変化型不揮発性メモリ2015

    • Author(s)
      岩佐太陽、塚本貴広、須田良幸
    • Organizer
      第62回応用物理学会春季学術講演会
    • Place of Presentation
      東海大学(神奈川県、平塚市)
    • Year and Date
      2015-03-11 – 2015-03-14
    • Related Report
      2014 Annual Research Report
  • [Presentation] p-Cu2O/AlOx/n-SiC pnダイオード構造の抵抗変化型不揮発性メモリ2015

    • Author(s)
      土屋充沙、山下敦史、塚本貴広、須田良幸
    • Organizer
      第62回応用物理学会春季学術講演会
    • Place of Presentation
      東海大学(神奈川県、平塚市)
    • Year and Date
      2015-03-11 – 2015-03-14
    • Related Report
      2014 Annual Research Report
  • [Presentation] Al/AlOx/SiCxOy/SiC/n-Si Structured Resistive Nonvolatile Memory Formed by Autoxidation of Al2014

    • Author(s)
      Kyohei. Kida, Takahiro Tsukamoto and Yoshiyuki Suda
    • Organizer
      27th Int. Microprocesses and Nanotechnology Conf.
    • Place of Presentation
      ヒルトン福岡シーホーク(福岡県、福岡市)
    • Year and Date
      2014-11-04 – 2014-11-07
    • Related Report
      2014 Annual Research Report
  • [Presentation] p-Cu2O/SiOx/n-SiC pnダイオード構造抵抗変化型メモリの低温形成技術2014

    • Author(s)
      山下敦史、塚本貴広、須田良幸
    • Organizer
      第75回応用物理学会学術講演会
    • Place of Presentation
      北海道大学(北海道、札幌市)
    • Year and Date
      2014-09-17 – 2014-09-20
    • Related Report
      2014 Annual Research Report
  • [Remarks] 須田研究室

    • URL

      http://www.tuat.ac.jp/~boss/

    • Related Report
      2016 Annual Research Report 2015 Annual Research Report 2014 Annual Research Report

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Published: 2014-04-04   Modified: 2018-03-22  

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