Development of memory diode and its application to densest array memory
Project/Area Number |
26289099
|
Research Category |
Grant-in-Aid for Scientific Research (B)
|
Allocation Type | Partial Multi-year Fund |
Section | 一般 |
Research Field |
Electron device/Electronic equipment
|
Research Institution | Tokyo University of Agriculture and Technology |
Principal Investigator |
Suda Yoshiyuki 東京農工大学, 工学(系)研究科(研究院), 教授 (10226582)
|
Co-Investigator(Kenkyū-buntansha) |
塚本 貴広 東京農工大学, 工学(系)研究科(研究院), 助教 (50640942)
|
Project Period (FY) |
2014-04-01 – 2017-03-31
|
Project Status |
Completed (Fiscal Year 2016)
|
Budget Amount *help |
¥16,120,000 (Direct Cost: ¥12,400,000、Indirect Cost: ¥3,720,000)
Fiscal Year 2016: ¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2015: ¥4,420,000 (Direct Cost: ¥3,400,000、Indirect Cost: ¥1,020,000)
Fiscal Year 2014: ¥7,280,000 (Direct Cost: ¥5,600,000、Indirect Cost: ¥1,680,000)
|
Keywords | 半導体メモリ / 不揮発性メモリ / 抵抗変化型メモリ / PNダイオード / クロスポイント型配列 / SiC / 界面準位 / 先端機能デバイス / 電子デバイス・機器 / 界面電位 |
Outline of Final Research Achievements |
We clarified the fundamental structure and operation physics about the proposed memory diode having both resistive-nonvolatile-memory and rectifying characteristics which are suited for the theoretically densest cross-point array. We analyzed the origin of electron-trapping defects which contribute to the memory effect, and clarified the relationship between the electron-trap-layer structures, the fabrication methods, and the memory characteristics. As each specification, we obtained endurance characteristics of 10-to-the-power-7 on/off switching cycles and writing speeds of less than 20 microseconds which surpass those of the current flash memories. Further, we have succeeded in developing the low-temperature fabrication processes with fabrication temperatures of not more than 473 K and show the compatibility of the fabrication of the memory diode with that of metal-layer-sandwiched cross-point memory array.
|
Report
(4 results)
Research Products
(17 results)