| Project/Area Number |
26390104
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Multi-year Fund |
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| Section | 一般 |
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| Research Field |
General applied physics
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| Research Institution | Kyushu Institute of Technology |
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Principal Investigator |
Ariyoshi Tetsuya 九州工業大学, マイクロ化総合技術センター, 助教 (60432738)
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| Co-Investigator(Kenkyū-buntansha) |
有馬 裕 九州工業大学, マイクロ化総合技術センター, 教授 (10325582)
馬場 昭好 九州工業大学, マイクロ化総合技術センター, 准教授 (80304872)
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| Project Period (FY) |
2014-04-01 – 2017-03-31
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| Project Status |
Completed (Fiscal Year 2016)
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| Budget Amount *help |
¥4,940,000 (Direct Cost: ¥3,800,000、Indirect Cost: ¥1,140,000)
Fiscal Year 2016: ¥520,000 (Direct Cost: ¥400,000、Indirect Cost: ¥120,000)
Fiscal Year 2015: ¥520,000 (Direct Cost: ¥400,000、Indirect Cost: ¥120,000)
Fiscal Year 2014: ¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
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| Keywords | X線センサー / トレンチ構造型フォトダイオード / 低被曝線量 / 半導体デバイス / X線CT / 直接変換型X線センサ / 側面X線検出 |
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| Outline of Final Research Achievements |
Medical X-ray diagnosis devices such as CT scanners entails the problem of X-ray radiation dose. By improving the sensitivity of the X-ray sensors, the X-ray radiation dose can be decreased and everyone can easily use various kinds of safe X-ray diagnosis without restrictions. In this study, we propose a direct conversion type silicon X-ray sensor adopting a trench-structured photodiodes. This proposed X-ray sensor has the features of high sensitivity, high speed response, long device lifetime, low power consumption, and high energy resolution. The prototype X-ray sensor was fabricated, and this sensor demonstrated the absorbed X-ray-to-current signal conversion efficiency approaching the theoretical limit.
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