| Budget Amount *help |
¥5,070,000 (Direct Cost: ¥3,900,000、Indirect Cost: ¥1,170,000)
Fiscal Year 2016: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2015: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
Fiscal Year 2014: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
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| Outline of Final Research Achievements |
In this research project, fundamental properties in hydrocarbon plasmas have been examined using both numerical simulation and diagnostic, since fast deposition of the diamond-like carbon (DLC) thin films has strongly been required in various technological fields. A numerical simulation of hydrocarbon plasmas has been conducted using an axially three-dimensional fluid model. Diagnostic of hydrocarbon plasmas has also been done using Langmuir probe technique and quadrupole mass spectrometry. From the plasma diagnostic, it was clarified that the identification and the amount of flux of ions and radicals, which play an important role in the DLC thin films deposition, in hydrocarbon plasmas. From the plasma simulation results, clarifying the mechanism of glow to arc transition is very important to produce uniform atmospheric-pressure plasmas. It is clarified that suppressing the rapid electron production through electron-impact ionization is very effective to suppress the transition.
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