Study on an evaluation technique for the millimeter-wave complex permittivity of dielectric films
Project/Area Number |
26420266
|
Research Category |
Grant-in-Aid for Scientific Research (C)
|
Allocation Type | Multi-year Fund |
Section | 一般 |
Research Field |
Electronic materials/Electric materials
|
Research Institution | Utsunomiya University |
Principal Investigator |
KOGAMI Yoshinori 宇都宮大学, 工学(系)研究科(研究院), 教授 (10260473)
|
Project Period (FY) |
2014-04-01 – 2017-03-31
|
Project Status |
Completed (Fiscal Year 2016)
|
Budget Amount *help |
¥4,810,000 (Direct Cost: ¥3,700,000、Indirect Cost: ¥1,110,000)
Fiscal Year 2016: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2015: ¥1,820,000 (Direct Cost: ¥1,400,000、Indirect Cost: ¥420,000)
Fiscal Year 2014: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000)
|
Keywords | 誘電体薄型試料 / 誘電率計測 / ミリ波 / 複素比誘電率 / 誘電体基板 / 空洞共振器法 / 共振電磁界解析 / 高誘電率材料 |
Outline of Final Research Achievements |
A technique to be available for evaluating of the millimeter-wave complex permittivity of thin dielectric films is investigated using a cavity resonator where the sample location can be variable.The rigorous analysis of the resonant EM fields of this resonator is studied to calculate the resonant frequency and the unloaded Q value in dielectric film evaluations. The measuring apparatus is constructed for demonstration of dielectric film evaluations.
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Report
(4 results)
Research Products
(22 results)