| Project/Area Number |
26420292
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Multi-year Fund |
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| Section | 一般 |
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| Research Field |
Electronic materials/Electric materials
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| Research Institution | Japan Synchrotron Radiation Research Institute |
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Principal Investigator |
Imai Yasuhiko 公益財団法人高輝度光科学研究センター, 利用研究促進部門, 副主幹研究員 (30416375)
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| Research Collaborator |
SUMITANI Kazushi
KIMURA Shigeru
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| Project Period (FY) |
2014-04-01 – 2017-03-31
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| Project Status |
Completed (Fiscal Year 2016)
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| Budget Amount *help |
¥5,070,000 (Direct Cost: ¥3,900,000、Indirect Cost: ¥1,170,000)
Fiscal Year 2016: ¥650,000 (Direct Cost: ¥500,000、Indirect Cost: ¥150,000)
Fiscal Year 2015: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2014: ¥3,380,000 (Direct Cost: ¥2,600,000、Indirect Cost: ¥780,000)
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| Keywords | マイクロ回折 / マイクロＸ線回折 / ナノビーム回折 / ナノビームＸ線回折 / 逆格子マップ / Ｘ線 / 放射光 / アラインメント |
|---|
| Outline of Final Research Achievements |
Real space mapping of X-ray diffraction measurement have been performed using synchrotron X-ray focused to 100 nm in order to reveal strain distribution in a sample. To achieve high-spatial-resolution, X-rays irradiation position on a sample should not be moved by the sample rotation. For this reason, a sample surface is precisely aligned to the rotation center of a rotation stage.
A technique has been developed to align any position on a sample surface to the rotation center of the rotation stage automatically independent of surface figuration of the sample. Using this technique, large area real space mapping of nano-beam X-ray diffraction has been achieved.
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