Development of a System for 3-D Micro Metrology Using a Nano Order Diameter Optical Fiber Probe

• Project/Area Number: 26420392
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Research Field: Measurement engineering
• Research Institution: The University of Kitakyushu
• Principal Investigator: Murakami Hiroshi 北九州市立大学, 国際環境工学部, 准教授 (00416512)
• Project Period (FY): 2014-04-01 – 2018-03-31
• Project Status: Completed (Fiscal Year 2017)
• Budget Amount: ¥4,940,000 (Direct Cost: ¥3,800,000、Indirect Cost: ¥1,140,000); Fiscal Year 2017: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000); Fiscal Year 2016: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000); Fiscal Year 2015: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000); Fiscal Year 2014: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
• Keywords: 小径穴測定 / 微細形状測定 / 光ファイバプローブ / CO２レーザ

Outline of Final Research Achievements

The stylus tip with a diameter within the range of 1.2 and 300 µm have been fabricated with high yield by using the CO2 laser.We conducted the performance test of the water repellent coating on the stylus tip for the purpose of preventing adhesion to the measured surface by the surface force, and the durability test. As a result, the separation distance of the stylus tip was reduced by 30% by employing the coated stylus tip. The minimum diameter of the available stylus shaft is examined using FDTD method.As a result, it is shown that the minimum diameter of the available stylus shaft is about 0.2 µm for the laser diode with 375 nm wavelength. Also, the resolution of the measurement system using the stylus with a diameter of 1 µm is approximately 5 nm.

Research Products

• [Journal Article] Fabrication of an ultra-small-diameter optical fiber probe using an acid-etch technique and a CO2 laser for 3D micro metrology (2017)
  • Author(s): Hiroshi Murakami, Akio Katsuki, Takao Sajima and Kosuke Uchiyama
  • Journal Title: International Journal of Automation Technology Volume: Vol.11, No.5 Pages: 700-706
  • NAID: 130007505915
  • Peer Reviewed / Open Access
• [Journal Article] Reduction of Liquid Bridge Force for 3D (2016)
  • Author(s): Hiroshi Murakami, Akio Katsuki, Takao Sajima, Mitsuyoshi Fukuda
  • Journal Title: Applied Science Volume: 6, 153 Issue: 5 Pages: 1-11
  • DOI: 10.3390/app6050153
  • Peer Reviewed / Open Access / Acknowledgement Compliant
• [Journal Article] Development of Touch Probing System Using a Fiber Stylus (2016)
  • Author(s): Hiroshi Murakami, Akio Katsuki, Takao Sajima
  • Journal Title: Fibers Volume: 4, 24 Issue: 3 Pages: 1-13
  • DOI: 10.3390/fib4030024
  • Peer Reviewed / Open Access / Acknowledgement Compliant
• [Journal Article] 極小径光ファイバプローブを用いた微小径穴形状精度測定装置の開発 (2015)
  • Author(s): 村上 洋
  • Journal Title: 機械技術 Volume: Vol.63, No.6 Pages: 23-25
• [Journal Article] Study of a Vibrating Fiber Probing System for 3-D Microstructure: Performance Improvement (2014)
  • Author(s): Hiroshi MURAKAMI, Akio KATSUKI, Takao SAJIMA, Takuya SUEMATSU
  • Journal Title: Measurement Science and Technology Volume: 25 Pages: 094010-094010
  • Peer Reviewed / Acknowledgement Compliant
• [Journal Article] Development of a System for 3-D Micro Metrology Using an Ultra-Small-Diameter Optical Fiber Probe (2014)
  • Author(s): Hiroshi Murakami, Akio Katsuki, Takao Sajima, Narumi Tokuoh, Mitsuyoshi Fukuda
  • Journal Title: Proceedings of the 29th Annual Meeting of the American Society for Precision Engineering Volume: 59 Pages: 63-66
  • NAID: 40021394486
  • Peer Reviewed / Acknowledgement Compliant
• [Presentation] 極小径光ファイバプローブを用いた微細三次元形状精度測定システムの開発―光学系の改良― (2017)
  • Author(s): 村上洋，甲木昭雄，佐島隆生，吉田一朗，浜野康雄，本田裕，内山晃介
  • Organizer: 2017年度精密工学会春季大会学術講演会講演論文集
  • Place of Presentation: 慶應義塾大学（神奈川県・横浜市）
  • Year and Date: 2017-03-17
• [Presentation] Fabrication of Probe Tips for Nanoscale 3D Metrology (2017)
  • Author(s): Uchiyama K, Murakami H, Katsuki A, Sajima T, Yamamoto T, Nagata R and Fujiyoshi K
  • Organizer: Proceedings of the 32nd Annual Meeting of the American Society for Precision Engineering
  • Int'l Joint Research
• [Presentation] 微細三次元形状測定用極小径光ファイバプローブの製作 (2017)
  • Author(s): 内山 晃介，村上 洋，甲木 昭雄，佐島 隆生，山本 隆彦，永田 良介，藤吉 国孝，宮國 健司，青木 響也
  • Organizer: 2017年度砥粒加工学会学術講演会
• [Presentation] 極小径光ファイバプローブを用いた微細三次元形状精度測定システムの開発 (2017)
  • Author(s): 村上洋，甲木昭雄，佐島隆生，吉田一朗，浜野康雄，本田裕，内山晃介
  • Organizer: 光計測シンポジウム２０１７
• [Presentation] Development of a System for 3-D Micro Metrology Using an Optical Fiber Probe: Reduction of Surface Force Effect (2016)
  • Author(s): Hiroshi Murakami, Akio Katsuki, Takao Sajima, Mitsuyoshi Fukuda
  • Organizer: Proceedings of the European Optical Society Annual Meeting (EOSAM) 2016
  • Place of Presentation: ベルリン（ドイツ）
  • Year and Date: 2016-09-28
  • Int'l Joint Research
• [Presentation] CO2レーザを用いた微細三次元形状測定用極小径光ファイバプローブの製作 (2016)
  • Author(s): 村上洋，甲木昭雄，佐島隆生
  • Organizer: 2016年度精密工学会秋季大会学術講演会講演論文集
  • Place of Presentation: 茨木大学（茨木県・水戸市）
  • Year and Date: 2016-09-07
• [Presentation] FABRICATION OF AN ULTRA-SMALL-DIAMETER OPTICAL FIBER PROBE FOR 3D MICRO METROLOGY (2015)
  • Author(s): Hiroshi Murakami, Akio Katsuki, Takao Sajima, Mitsuyoshi Fukuda, Masaki Okada, Megumu Nagaura
  • Organizer: XXI IMEKO World Congress
  • Place of Presentation: Prague, Czech Republic
  • Year and Date: 2015-09-02
  • Int'l Joint Research
• [Presentation] Development of a System for 3-D Micro Metrology Using an Ultra-Small-Diameter Optical Fiber Probe (2014)
  • Author(s): Hiroshi Murakami, Akio Katsuki, Takao Sajima, Narumi Tokuoh, Mitsuyoshi Fukuda
  • Organizer: 29th Annual Meeting of the American Society for Precision Engineering
  • Place of Presentation: The Westin Boston Waterfront
  • Year and Date: 2014-11-12
• [Remarks] 村上研究室ホームページ
  • URL: http://www.env.kitakyu-u.ac.jp/~muraka16/
• [Patent(Industrial Property Rights)] 形状測定装置 (2017)
  • Inventor(s): 吉田一朗、村上洋、浜野康雄、本田裕
  • Industrial Property Rights Holder: 吉田一朗、村上洋、浜野康雄、本田裕
  • Industrial Property Rights Type: 特許
  • Industrial Property Number: 2017-040562
  • Filing Date: 2017-03-03