| Budget Amount *help |
¥4,940,000 (Direct Cost: ¥3,800,000、Indirect Cost: ¥1,140,000)
Fiscal Year 2017: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2016: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2015: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2014: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
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| Outline of Final Research Achievements |
The stylus tip with a diameter within the range of 1.2 and 300 µm have been fabricated with high yield by using the CO2 laser.We conducted the performance test of the water repellent coating on the stylus tip for the purpose of preventing adhesion to the measured surface by the surface force, and the durability test. As a result, the separation distance of the stylus tip was reduced by 30% by employing the coated stylus tip. The minimum diameter of the available stylus shaft is examined using FDTD method.As a result, it is shown that the minimum diameter of the available stylus shaft is about 0.2 µm for the laser diode with 375 nm wavelength. Also, the resolution of the measurement system using the stylus with a diameter of 1 µm is approximately 5 nm.
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