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Modeling of structure formation in the intial stage of laser plasma interaction and its application to the study of EUV source

Research Project

Project/Area Number 26610195
Research Category

Grant-in-Aid for Challenging Exploratory Research

Allocation TypeMulti-year Fund
Research Field Plasma science
Research InstitutionNational Institutes for Quantum and Radiological Science and Technology (2016-2017)
Japan Atomic Energy Agency (2014-2015)

Principal Investigator

Sasaki Akira  国立研究開発法人量子科学技術研究開発機構, 関西光科学研究所 光量子科学研究部, 主幹研究員(定常) (10215709)

Co-Investigator(Kenkyū-buntansha) 砂原 淳  大阪大学, レーザー科学研究所, 招へい准教授 (00370213)
西原 功修  大阪大学, レーザー科学研究所, 名誉教授 (40107131)
西川 亘  岡山大学, 自然科学研究科, 助教 (80243492)
Project Period (FY) 2014-04-01 – 2018-03-31
Project Status Completed (Fiscal Year 2017)
Budget Amount *help
¥3,120,000 (Direct Cost: ¥2,400,000、Indirect Cost: ¥720,000)
Fiscal Year 2016: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2015: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Fiscal Year 2014: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Keywordsレーザー生成プラズマ / 流体シミュレーション / EUV光源 / 状態方程式 / 相転移 / 臨界現象
Outline of Final Research Achievements

Theoretical investigation of the particle emission from short pulse laser irradiated solid targets is carried out, and simulation code is developed, for its application to the analysis of laser pumped plasma (LPP) Extreme Ultra-Violet (EUV) light source.
We develop the algorithms for the reorganization of mesh, along the distribution of the material, for the 2 dimensional Lagrangian hydrodynamics model. Furthermore, the liquid-to-gas transition is taken into account firstly by determining the ratio of volumes of liquid and gas region corresponding to the average temperature and density, and secondly by splitting the target cell and redistributing the mass and internal energy to the divided cells. Test calculations are carried out for uniformly heated tin cylinder to show the initial bubble formation to subsequent decomposition of the target into particles.

Report

(5 results)
  • 2017 Annual Research Report   Final Research Report ( PDF )
  • 2016 Research-status Report
  • 2015 Research-status Report
  • 2014 Research-status Report
  • Research Products

    (24 results)

All 2018 2017 2016 2015 2014

All Journal Article (8 results) (of which Peer Reviewed: 5 results,  Open Access: 4 results,  Acknowledgement Compliant: 4 results) Presentation (16 results) (of which Int'l Joint Research: 4 results)

  • [Journal Article] Modeling of ablation of the target material for the plasma for coherent and incoherent EUV sources2018

    • Author(s)
      A. Sasaki, A. Sunahara, K. Nishihara, T. Nishikawa
    • Journal Title

      Springer Proceedings in Physics, Proceedings of 15th International Conference on X-Ray Lasers (ICXRL 2016)

      Volume: 202 Pages: 373-373

    • DOI

      10.1007/978-3-319-73025-7_55

    • ISBN
      9783319730240, 9783319730257
    • Related Report
      2017 Annual Research Report
    • Peer Reviewed
  • [Journal Article] A numerical model of emission of particle debris from laser-irradiated metal targets2017

    • Author(s)
      A. Sasaki, A. Sunahara, K. Nishihara, T. Nishikawa
    • Journal Title

      AIP Advances

      Volume: 7 Issue: 9 Pages: 095005-095005

    • DOI

      10.1063/1.4991398

    • Related Report
      2017 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] プラズマEUV光源の原子過程と流体力学シミュレーションの課題2016

    • Author(s)
      佐々木明
    • Journal Title

      放射線化学

      Volume: 102 Pages: 35-40

    • Related Report
      2016 Research-status Report
  • [Journal Article] Investigation of the ionization balance of bismuth-to-tin plasmas for the extreme ultraviolet light source based on a computer-generated collisional radiative model2016

    • Author(s)
      A. Sasaki, A. Sunahara, K. Nishihara, T. Nishikawa
    • Journal Title

      AIP Advances

      Volume: 6 Issue: 10 Pages: 105002-105002

    • DOI

      10.1063/1.4964496

    • Related Report
      2016 Research-status Report
    • Open Access / Acknowledgement Compliant
  • [Journal Article] Atomic processes and equation of state of high Z plasmas for EUV sources and their effects on the spatial and temporal evolution of the plasmas2016

    • Author(s)
      A.Sasaki, A. Sunahara, H. Furukawa, K. Nishikawa, T. Nishikawa, F. Koike
    • Journal Title

      J. Phys. Conf Ser.

      Volume: 668 Pages: 012099-012099

    • DOI

      10.1088/1742-6596/688/1/012099

    • Related Report
      2015 Research-status Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] Simulation of discharge in insulating gas from initial partial discharge to growth of a stepped leader using the percolation model2016

    • Author(s)
      A. Sasaki, S. Kato, E. Takahashi, Y. Kishimoto, T. Fujii, S. Kanazawa
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 55 Issue: 2 Pages: 026101-026101

    • DOI

      10.7567/jjap.55.026101

    • NAID

      210000146037

    • Related Report
      2015 Research-status Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Modeling of initial interaction between the laser pulse and Sn droplet target and pre-plasma formation for the LPP EUV source2016

    • Author(s)
      A. Sasaki, K. Nishihara, A. Sunahara, H. Furukawa, T. Nishikawa
    • Journal Title

      Proceedings of SPIE

      Volume: 9776 Pages: 97762C-97762C

    • DOI

      10.1117/12.2219045

    • Related Report
      2015 Research-status Report
    • Acknowledgement Compliant
  • [Journal Article] Statistics of Clusters of Ionized Regions in the Simulation of Discharge using a Percolation Model2014

    • Author(s)
      A. Sasaki, S. Kato
    • Journal Title

      Plasma Fusion Res.

      Volume: 9 Pages: 3401120-3401120

    • NAID

      130005260469

    • Related Report
      2014 Research-status Report
    • Peer Reviewed / Open Access
  • [Presentation] Modeling of emission of particle debris from ablation of the tin target for the laser produced plasma extreme ultra-violet light source2018

    • Author(s)
      Akira Sasaki
    • Organizer
      SPIE Advance Lithography 2018
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] EUV光源用ターゲットのアブレーションにおける 気泡、粒子の生成過程2017

    • Author(s)
      佐々木明、砂原淳、 西原功修
    • Organizer
      日本物理学会第72回年次大会
    • Place of Presentation
      大阪大学豊中キャンパス(大阪府豊中市)
    • Year and Date
      2017-03-17
    • Related Report
      2016 Research-status Report
  • [Presentation] Numerical analysis of particle emission from laser irradiated tin targets for the optimization of the EUV source2017

    • Author(s)
      A. Sasaki, A. Sunahara, H. Furukawa, K. Nishihara, K. Nishikawa
    • Organizer
      SPIE Advanced Lithography
    • Place of Presentation
      San Jose, U. S. A.
    • Year and Date
      2017-02-26
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research
  • [Presentation] Modeling of Particle Debris from the Target of Laser Produced Plasma EUV Sources2017

    • Author(s)
      Akira Sasaki
    • Organizer
      2017 EUV source workshop
    • Related Report
      2017 Annual Research Report
    • Int'l Joint Research
  • [Presentation] EUV光源ターゲットのアブレーションによる粒子発生のモデル構築2017

    • Author(s)
      佐々木 明, 砂原 淳, 西原 功修, 西川 亘
    • Organizer
      応用物理学会 第78回応用物理学会秋季学術講演会
    • Related Report
      2017 Annual Research Report
  • [Presentation] レーザーアブレーションからのデブリ粒子発生のモデリング2017

    • Author(s)
      佐々木 明
    • Organizer
      第31回数値流体力学シンポジウム
    • Related Report
      2017 Annual Research Report
  • [Presentation] レーザー励起EUV光源におけるターゲットのアブレーションの流体モデリング2016

    • Author(s)
      佐々木明
    • Organizer
      第30回数値流体力学シンポジウム
    • Place of Presentation
      タワーホール船堀(東京都江戸川区)
    • Year and Date
      2016-12-12
    • Related Report
      2016 Research-status Report
  • [Presentation] EUV光源ターゲットのプリパルスレーザー照射による分散過程のモデル化2016

    • Author(s)
      佐々木明
    • Organizer
      プラズマ核融合学会
    • Place of Presentation
      東北大学青葉山キャンパス(宮城県仙台市)
    • Year and Date
      2016-11-30
    • Related Report
      2016 Research-status Report
  • [Presentation] A Macroscopic Model of Particle Emission from Laser Ablation2016

    • Author(s)
      A. Sasaki
    • Organizer
      The 12th annal international laser physics workshop
    • Place of Presentation
      Yerevan, Armenia
    • Year and Date
      2016-07-10
    • Related Report
      2016 Research-status Report
    • Int'l Joint Research
  • [Presentation] 佐々木明、砂原淳、西原功修2016

    • Author(s)
      レーザー励起プラズマEUV光源ターゲット分散過程のモデル構築(2)
    • Organizer
      第63回応用物理学会春季学術講演会
    • Place of Presentation
      東京工業大学(東京都目黒区)
    • Year and Date
      2016-03-19
    • Related Report
      2015 Research-status Report
  • [Presentation] レーザー励起EUV光源におけるターゲットの分散、微粒子発生の流体シミュレーション2015

    • Author(s)
      佐々木明
    • Organizer
      第29回数値流体力学シンポジウム
    • Place of Presentation
      九州大学(福岡県春日市)
    • Year and Date
      2015-12-15
    • Related Report
      2015 Research-status Report
  • [Presentation] 次世代リソグラフィ用 EUV 光源におけるレーザー照射によるターゲット物質の分散、粒子生成過程のモデリング2015

    • Author(s)
      佐々木明
    • Organizer
      日本物理学会2015年秋季大会
    • Place of Presentation
      関西大学(大阪府吹田市)
    • Year and Date
      2015-09-17
    • Related Report
      2015 Research-status Report
  • [Presentation] レーザー励起プラズマEUV光源ターゲット分散過程のモデル構築2015

    • Author(s)
      佐々木明
    • Organizer
      第76回応用物理学会秋季学術講演会
    • Place of Presentation
      名古屋国際会議場(愛知県名古屋市)
    • Year and Date
      2015-09-16
    • Related Report
      2015 Research-status Report
  • [Presentation] EUV光源用Sn液滴ターゲットとレーザー照射初期の相互作用と微粒子生成のモデル化2015

    • Author(s)
      佐々木明、砂原淳、西原功修
    • Organizer
      日本物理学会第70回年次大会
    • Place of Presentation
      早稲田大学(東京新宿区)
    • Year and Date
      2015-03-21
    • Related Report
      2014 Research-status Report
  • [Presentation] 自己組織化ラグランジメッシュを用いた流体コードによるEUV光源ターゲット分散過程のモデル化2015

    • Author(s)
      佐々木明、砂原淳、西原功修
    • Organizer
      第62回応用物理学会春季学術講演会
    • Place of Presentation
      東海大学(神奈川県平塚市)
    • Year and Date
      2015-03-11
    • Related Report
      2014 Research-status Report
  • [Presentation] EUV光源ターゲットとレーザー光の相互作用のモデル化2014

    • Author(s)
      佐々木明、砂原淳、西原功修
    • Organizer
      第75回応用物理学会秋季学術講演会
    • Place of Presentation
      北海道大学(北海道札幌市)
    • Year and Date
      2014-09-19
    • Related Report
      2014 Research-status Report

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Published: 2014-04-04   Modified: 2019-03-29  

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