Project/Area Number |
26630037
|
Research Category |
Grant-in-Aid for Challenging Exploratory Research
|
Allocation Type | Multi-year Fund |
Research Field |
Design engineering/Machine functional elements/Tribology
|
Research Institution | Niigata University |
Principal Investigator |
NITTA ISAMI 新潟大学, 自然科学系, 教授 (30159082)
|
Project Period (FY) |
2014-04-01 – 2016-03-31
|
Project Status |
Completed (Fiscal Year 2015)
|
Budget Amount *help |
¥3,770,000 (Direct Cost: ¥2,900,000、Indirect Cost: ¥870,000)
Fiscal Year 2015: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2014: ¥2,860,000 (Direct Cost: ¥2,200,000、Indirect Cost: ¥660,000)
|
Keywords | 機械要素 / レーザ走査干渉計 / 位相シフト法 / 広視野レーザ顕微鏡 / シュリンクフィッタ / ナノ計測 / 広領域 |
Outline of Final Research Achievements |
With a Cr coated reference plate, strange interference fringe patterns were measured, which were saw-tooth waveforms rather than sinusoidal ones. By using this pehnomenon, we tried to develop a new non-contact measurement method for precision molds, without phase shift technique, from the one-time measurement by using the metal-coated interference plate. Materials coated on the reference plates and their thicknesses affected the brightness distributions. A multiple reflection of the laser beam between the reference plate and the mold surface was considered to be a cause of the saw-tooth waveforms. We investigated the basic characteristic of the brightness distribution of the saw-tooth waveforms. Since the saw-tooth waveforms also convey information on tilt directions of mold surfaces, the 3 dimensional shape of the mold of the optical lens can be determined from one-time measurement. A software program to interpret the fringe patterns as 3 dimensional shapes was also developed.
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