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Elucidation of quasi phase image appearance for phase shifting method suitable for wide-field laser microscope

Research Project

Project/Area Number 26630037
Research Category

Grant-in-Aid for Challenging Exploratory Research

Allocation TypeMulti-year Fund
Research Field Design engineering/Machine functional elements/Tribology
Research InstitutionNiigata University

Principal Investigator

NITTA ISAMI  新潟大学, 自然科学系, 教授 (30159082)

Project Period (FY) 2014-04-01 – 2016-03-31
Project Status Completed (Fiscal Year 2015)
Budget Amount *help
¥3,770,000 (Direct Cost: ¥2,900,000、Indirect Cost: ¥870,000)
Fiscal Year 2015: ¥910,000 (Direct Cost: ¥700,000、Indirect Cost: ¥210,000)
Fiscal Year 2014: ¥2,860,000 (Direct Cost: ¥2,200,000、Indirect Cost: ¥660,000)
Keywords機械要素 / レーザ走査干渉計 / 位相シフト法 / 広視野レーザ顕微鏡 / シュリンクフィッタ / ナノ計測 / 広領域
Outline of Final Research Achievements

With a Cr coated reference plate, strange interference fringe patterns were measured, which were saw-tooth waveforms rather than sinusoidal ones. By using this pehnomenon, we tried to develop a new non-contact measurement method for precision molds, without phase shift technique, from the one-time measurement by using the metal-coated interference plate. Materials coated on the reference plates and their thicknesses affected the brightness distributions. A multiple reflection of the laser beam between the reference plate and the mold surface was considered to be a cause of the saw-tooth waveforms. We investigated the basic characteristic of the brightness distribution of the saw-tooth waveforms. Since the saw-tooth waveforms also convey information on tilt directions of mold surfaces, the 3 dimensional shape of the mold of the optical lens can be determined from one-time measurement. A software program to interpret the fringe patterns as 3 dimensional shapes was also developed.

Report

(3 results)
  • 2015 Annual Research Report   Final Research Report ( PDF )
  • 2014 Research-status Report
  • Research Products

    (4 results)

All 2015 2014

All Presentation (4 results)

  • [Presentation] 広視野レーザ走査型干渉計を用いたナノ形状計測手法の開発-新規干渉縞パターンの観察-2015

    • Author(s)
      大原佑太
    • Organizer
      精密工学会北陸信越支部
    • Place of Presentation
      金沢工業大学(石川県)
    • Year and Date
      2015-11-14
    • Related Report
      2015 Annual Research Report
  • [Presentation] 広視野レーザ走査干渉計を用いた新規干渉縞パターンの観察2015

    • Author(s)
      大原佑太
    • Organizer
      日本トライボロジー学会
    • Place of Presentation
      姫路商工会議所(兵庫県)
    • Year and Date
      2015-05-27
    • Related Report
      2015 Annual Research Report
  • [Presentation] 広視野レーザ干渉計によるナノ形状の新規計測手法の開発 ‐参照板に成膜する金属材料の影響‐2015

    • Author(s)
      宮田晃輔,大原佑太,横山大地,月山陽介,新田勇
    • Organizer
      日本機械学会北陸信越支部
    • Place of Presentation
      新潟工科大学(新潟県柏崎市)
    • Year and Date
      2015-03-07
    • Related Report
      2014 Research-status Report
  • [Presentation] ECRスパッタ成膜参照板による新規干渉縞パターンの観察2014

    • Author(s)
      大原佑太,横山大地,鈴木天,月山陽介,新田勇
    • Organizer
      日本機械学会
    • Place of Presentation
      東京電機大学(東京都)
    • Year and Date
      2014-09-08
    • Related Report
      2014 Research-status Report

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Published: 2014-04-04   Modified: 2017-05-10  

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