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Development of Non-equilibrium Plasma CVD deposition in Ambient Air

Research Project

Project/Area Number 26630371
Research Category

Grant-in-Aid for Challenging Exploratory Research

Allocation TypeMulti-year Fund
Research Field Material processing/Microstructural control engineering
Research InstitutionNational Institute for Materials Science

Principal Investigator

Watanabe Makoto  国立研究開発法人物質・材料研究機構, 構造材料研究拠点, グループリーダー (00391219)

Project Period (FY) 2014-04-01 – 2017-03-31
Project Status Completed (Fiscal Year 2016)
Budget Amount *help
¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
Fiscal Year 2016: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2015: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2014: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
KeywordsプラズマCVD / 薄膜 / 成膜プロセス / 大気プラズマCVD / プラズマCVD
Outline of Final Research Achievements

Atmospheric pressure plasma enhanced chemical vapor deposition is an emerging large-scale and cost-effective deposition technique, which utilizes cold plasma in glow discharge state for deposition. In this work, the effects of the plasma source morphology and gas flow onto a substrate were investigated for the different plasma gases of helium and argon. Also, the laser additive manufacturing method was investigated to design and fabricate a complex shape nozzle. It has been revealed that the various processing parameters such as plasma power, distance, plasma gas flow, and precursor delivery gas flow had the significant effects on the deposition rate and quality of the deposited films.

Report

(4 results)
  • 2016 Annual Research Report   Final Research Report ( PDF )
  • 2015 Research-status Report
  • 2014 Research-status Report
  • Research Products

    (2 results)

All 2017 2016

All Presentation (2 results)

  • [Presentation] Ti-6Al-4Vを用いたレーザ積層造形材の微細組織と機械的特性に及ぼす熱処理効果2017

    • Author(s)
      宮崎 史帆, 草野正大, 岸本哲, 渡邊誠, 湯本 敦史
    • Organizer
      日本金属学会 第160回春期講演大会
    • Place of Presentation
      首都大学東京南大沢キャンパス
    • Year and Date
      2017-03-15
    • Related Report
      2016 Annual Research Report
  • [Presentation] レーザ積層造形法によるTi-6Al-4V合金の微細組織および機械的性質2016

    • Author(s)
      草野正大, 宮崎 史帆, 渡邊誠, 岸本哲, 湯本 敦史
    • Organizer
      日本機械学会 第24回機械材料・材料加工技術講演会
    • Place of Presentation
      早稲田大学国際会議場
    • Year and Date
      2016-11-25
    • Related Report
      2016 Annual Research Report

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Published: 2014-04-04   Modified: 2018-03-22  

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