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Piezoelectric analysis for inside of the stressed thin films by cross sectional AFM

Research Project

Project/Area Number 26820294
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeMulti-year Fund
Research Field Inorganic materials/Physical properties
Research InstitutionShizuoka University

Principal Investigator

Sakamoto Naonori  静岡大学, 電子工学研究所, 准教授 (80451996)

Project Period (FY) 2014-04-01 – 2016-03-31
Project Status Completed (Fiscal Year 2015)
Budget Amount *help
¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
Fiscal Year 2015: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
Fiscal Year 2014: ¥1,950,000 (Direct Cost: ¥1,500,000、Indirect Cost: ¥450,000)
Keywords薄膜 / 強誘電体 / 応力 / 断面 / 原子間力顕微鏡 / AFM
Outline of Final Research Achievements

It is expected that by approaching solid probes to the cross section of thin films, many properties involved in the inside of thin films can be analyzed. We aimed to consolidate fabrication technique of cross section of thin films as well as observation techniques of XAFM.
In the present study, we demonstrated XAFM for ferroelectric thin films on oxide electrodes. After cutting, mechanical polishing, and Ar ion milling, the film were subjected to the XAFM.
With XAFM, we could observe the cross section of the film successfully. For the PZT layer, piezoelectric response (so called butterfly curves) and piezoelectric mapping was successfully obtained. We have achieved the purpose of the project, to consolidate fabrication technique. In the future works, we aim quantitative analysis by XAFM.

Report

(3 results)
  • 2015 Annual Research Report   Final Research Report ( PDF )
  • 2014 Research-status Report
  • Research Products

    (4 results)

All 2016 2015

All Presentation (4 results) (of which Int'l Joint Research: 2 results,  Invited: 1 results)

  • [Presentation] Ionic polishing and nano structure observation of Pb(Zr,Ti)O3 thin film by cross sectional atomic force microscopy2016

    • Author(s)
      N. Sakamoto, S. Miyazaki, N. Wakiya, H. Suzuki.
    • Organizer
      Electroceramic XV
    • Place of Presentation
      European Center of Ceramics, Limoges, France
    • Year and Date
      2016-06-27
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Arイオンミリングを用いたPb(Zr,Ti)03薄膜断面の形成とAFMによる圧電応答評価2016

    • Author(s)
      宮崎智史、坂元尚紀、川口昂彦、脇谷尚樹、鈴木久男
    • Organizer
      日本顕微鏡学会 第72回学術講演会
    • Place of Presentation
      仙台国際センター、宮城県仙台市
    • Year and Date
      2016-06-15
    • Related Report
      2015 Annual Research Report
  • [Presentation] Cross sectional ionic polishing for nano structure observation of Pb(Zr,Ti)O3 thin film by cross sectional atomic force microscope2015

    • Author(s)
      Satoshi Miyazaki,Naonori Sakamoto,Naoki Wakiya,Hisao Suzuki
    • Organizer
      STAC-9
    • Place of Presentation
      つくば国際会議場、茨城県つくば市
    • Year and Date
      2015-10-19
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] ナノ材料の顕微鏡観察による局所構造の解析2015

    • Author(s)
      坂元尚紀、宮崎智史、山本祥太、 脇谷尚樹、鈴木久男
    • Organizer
      第28回日本セラミックス協会秋季シンポジウム
    • Place of Presentation
      富山大学、富山県富山市
    • Year and Date
      2015-09-16
    • Related Report
      2015 Annual Research Report
    • Invited

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Published: 2014-04-04   Modified: 2017-05-10  

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