1991 Fiscal Year Final Research Report Summary
"Research on Numerical Reaction Vessel for Rarefied Gas Flow"
| Project/Area Number |
02452115
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| Research Category |
Grant-in-Aid for General Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Research Field |
Fluid engineering
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| Research Institution | Institute of Industrial Science, University of Tokyo |
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Principal Investigator |
KOBAYASHI Toshio University of Tokyo, Institute of Industrial Science, Professor, 生産技術研究所, 教授 (50013206)
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| Co-Investigator(Kenkyū-buntansha) |
SAGA Tetsuo University of Tokyo, Institute of Industrial Science, Research Associate, 生産技術研究所, 助手 (30013220)
TANIGUCHI Nobuyuki University of Tokyo, Institute of Industrial Science, Associate Professor, 生産技術研究所, 助教授 (10217135)
MATSUMOTO Yoichiro University of Tokyo, Faculty of Engineering, Associate Professor, 工学部, 助教授 (60111473)
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| Project Period (FY) |
1990 – 1991
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| Keywords | Computational fluid dynamics / Chemical vapor deposition / Rarefied gas flow / Molecular dynamics / Monte-Carlo method / Numerical (chemical) reaction vessel / Computer graphics |
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| Research Abstract |
This report validates the numerical simulation methods for the rarefied gas flow in the reaction vessels for a low-pressure chemical vapor deposition (LPCVD) which is a technique in the production of semi-conductors. The objects of this research were (i) a validation of a direct simulation by Monte-Carlo method (DSMC) for the prediction of rarefied gas flows in the LPCVD, (ii) an analysis of the processes in the chemical reaction and the vapor deposition, (iii) an application of the computer graphics to the analyses of the flows or the depositing process, and (iv) a trial construction of a numerical reaction vessel for the LPCVD.
In the first problem, a prototype of the numerical reaction vessel was constructed in the computer system. A new mathematical model of. the molecular interaction in the mixing and chemical reaction processes, was offered and examined by the numerical flow simulations in the LPCVD vessels in some conditions. The validity of this prediction method was certified by the macroscopic comparison of the calculation results and the experimental data.
The second object was investigated by the numerical method based on a molecular dynamics(MD). It indicated that the effects of mathematical models in the solid boundary condition are comparably small in the prediction of the LPCVD flows.
For the third problem, examples of the animation graphics were produced for the analyses of unsteady phenomena on the fluid and molecular dynamics. The grid-generation techniques for the complex figures were also researched.
The above examinations certified the validity of the numerical reaction vessel based on the present researches.
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