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1991 Fiscal Year Final Research Report Summary

Study on Heat and Mass Transfer in the Magnetic Fields Applied Czochralski Method

Research Project

Project/Area Number 02452143
Research Category

Grant-in-Aid for General Scientific Research (B)

Allocation TypeSingle-year Grants
Research Field 電子材料工学
Research InstitutionTohoku University

Principal Investigator

FUKUDA Tsuguo  Tohoku University, Institute for Materials Research, Professor, 金属材料研究所, 教授 (30199236)

Co-Investigator(Kenkyū-buntansha) TSUKADA Takao  Tohoku University, Institute for Chemical Reaction Research, Associate Professor, 反応化学研究所, 助教授 (10171969)
HOZAWA Mitsunori  Tohoku University, Institute for Chemical Reaction Research, Professor, 反応化学研究所, 教授 (70005338)
OKANO Yasunori  Tohoku University, Institute for Materials Research, Research Associate, 金属材料研究所, 助手 (90204007)
HOSHIKAWA Keigo  Tohoku University, Institute for Materials Research, Associate Professor, 金属材料研究所, 助教授 (10231573)
Project Period (FY) 1990 – 1991
KeywordsSingle Crystal / Czochralski Method / Applied Magnetic Field / Convective Phenomena / Heat Transfer
Research Abstract

1. Effects of applied magnetic field on convection in melt :
Temperature distributions on the melt surface under the conditions with or without magnetic fields were observed by the thermoviewer system. As increasing strength of the applied magnetic field, dominant heat transfer in the melt changed from convective transfer to conductive one. A remote sensing system for convective phenomena under the applied magnetic field conditions was developed. We successfully estimated very weak convection, which could not be observed on the melt surface, by using this method.
2. Control of mass transfer by applied magnetic field :
A mechanism of oxygen transfer during silicon crystal growth by Czochralski method was clarified. A new magnetic field applied system, Cusp magnetic field, was developed and applied to silicon crystal growth by Czochralski method. We could control the oxygen concentration in the grown crystal with uniform distribution of oxygen along the growth direction and in the wafer.
3. Development of strong magnetic field applied system :
A vertical Bridgeman with strong magnetic field up to 80, 000 Gauss available was developed.

  • Research Products

    (6 results)

All Other

All Publications (6 results)

  • [Publications] H.Hirata and K.Hoshikawa: "Three-Dimensional Numerical Analysis of the Effect of a Cusp Magnetic Field on the Flow,Oxygen Transport and Heat Transfer in a Czochralski Silicon Melt" J.Crystal Growth.

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Kan,M.Sakamoto,Y.Okano T.Fukuda,J Sato,T.Tsukada H.Hozawa and N.Imaishi: "Characteristics of Thermal Field in LiNbO_3 Single Crystal Grown by the Czochralski Method" J.Crystal Growth.

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Amano,K.Kumoyama,M.Kasuga,Y.Okano,H.Hoshikawa and T.Fukuda: "Remote Sensing of Induced Current in Conductor Moving in Magnetic Field" J.Crystal Growth.

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H. Hirata and K. Hoshikawa: "Three-Dimensional Numerical Analysis of the Effect of a Cusp Magnetic Field on the Flow, Oxygen Transport and Heat Transfer in a Czochralski Silicon Melt" J. Crystal Growth.

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S. Kan, M. Sakamoto, Y. Okano, T. Fukuda, J. Sato, T. Tsukada, M. Hozawa and N. Imaishi: "Characteristics of Thermal Field in LinbO_3 Single Crystal Grown by the Czochralski Method" J. Crystal Growth.

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M. Amano, K. Kumoyama, M. Kasuga, Y. Okano, K. Hoshikawa and T. Fukuda: "Remote Sensing of Induced Current in Conductor Moving in Magnetic Field" J. Crystal Growth.

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 1993-03-16  

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