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1992 Fiscal Year Final Research Report Summary

Fundamental Research on Ionized Cluster Beam Processes

Research Project

Project/Area Number 03044082
Research Category

Grant-in-Aid for international Scientific Research

Allocation TypeSingle-year Grants
SectionJoint Research
Research InstitutionKyoto University

Principal Investigator

YAMADA Isao  Ion beam Engineering Experimental Laboratory, Kyoto University, Professor, 工学部, 教授 (00026048)

Co-Investigator(Kenkyū-buntansha) J. Nothby  ロードアイランド大学, 工学部, 教授
Y. Kuk  AT&Tベル研究所, 金属誘電体薄膜研究部, 研究員
MAREK Sosnowski  Department of Electrical Engineering, New Jersey Institute of Technology, Profes, 電気工学科, 教授
W.L. Brown  AT&Tベル研究所, 金属誘電体薄膜研究部, 部長
TAKAOKA Gikan  Ion Beam Engineering Experimental Laboratory, Kyoto University, Associate Profes, 工学部, 助教授 (90135525)
WALTER L. Brown  This Film Metal and Dielectric Research Department, AT & T Bell Laboratories, De
USUI Hiroaki  Faculty of Engineering, Tokyo University of Agr. and Tech., Associate Professor
YOUNG Kuk  Department of Physics, Seoul National University, Professor
JAN Northby  Department of Physics, Univ. of Rhode Island, Professor
Project Period (FY) 1991 – 1992
KeywordsInternational Exchange / Joint Research / Ionized Cluster Beam / Gas Cluster / Film Formation / Shallow Implantation / Clean Surface Formation / Atomically Flat Surface
Research Abstract

We have been doing Joint Research with AT & T Bell Laboratories, New Jersey Institute of Technology, and University of Ryode Island for Fundamental Research on Ionized Cluster Beam (ICB) Processes by Grant under The Monbusho International Scientific Research Program. The investigations of ICB processes by these groups could provide important and useful results to each group.
The experimental results obtained during the research term;namely (1) atomic-scale observations by Scanning Tunneling Microscopy (STM) of the early stages of film growth, and (2) recent studies of the detailed composition of beams from ICB sources, have led to a new understanding of the origins of the extraordinary properties of thin films deposited by ICB methods. The presence of a small fraction of atoms is the form large clusters initiates a novel sequence of film growth steps staring with the immediate formation of stable islands for film growth.
In addition, a gas cluster ion source was newly developed and clusters with the size range of several hundreds to thousands of molecules were generated with this apparatus. For impacts with large clusters, We observed unique properties of the materials modified by the implantation, sputtering, and cleaning processes. These results can be applied to the development of new technologies for surface treatment.

  • Research Products

    (43 results)

All Other

All Publications (43 results)

  • [Publications] I. YAMADA: "Irradiation Effects of Gas-Cluster Co_2 Ion Beams on Si" To be published in Nuclear Instruments and Methods. (1993)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] J.A. NORTHBY: "A Method and Applicatications for Surface Modification by Gas-Cluster Ion Impact" To be published in Nuclear Instruments Methods. (1993)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] I. YAMADA: "Surface Modification and Other Advanced Ion Beam Processing Projects in Japan" Surface and Coatings Technoloqy. 51. 514-521 (1992)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] I. YAMADA: "Novel Paths Nucleation and Growth of Thin Films by Ionized Cluster Beam (ICB)" Materals Research Society Symposium Proceedings. 235. 597-607 (1992)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S. WADA: "Epitaxial Al(110)Films Grown on Heavily-Doped Si(100)by Cluster Beam Deposition" Materials Resarch Society Symposium Proceedings. 235. 621-626 (1992)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] G.H. TAKAOKA: "Surface Modification of Bio-Active Ceramic (Artificial Bone)by Ion Implantation" Materials Research Society Symposium Proceedings. 252. 23-28 (1992)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] I. YAMADA: "Advanced Ion Beam Material Processing Projects in Japan" Materials Research Symposium Proceedings. 268. 261-272 (1992)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] G.H. TAKAOKA: "Surface and Interface Properties of Copper Phthalocyanine Multilayer Structure Prepared by Method" Proceedings of the First Meeting on the Engineering Society of Japan. 251-254 (1992)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y. YAMASHITA: "Irradiation Effects of a Mass Andlyzed Gas Cluster Ion Beam Silicon Substrates" Proceedings of the First Meeting on the Ion Engieering Society of Japan. 247-250 (1992)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] I. YAMADA: "Ionized Cluster Beam Deposition and Epitaxy of Metal Films on Large Lattice Misfit Substrate" Physica Scripta. T35. 245-250 (1991)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] I. YAMADA: "Recent Progress in Depositing Epitaxial Metal Films by Ionezed Cluster Beam" Nuclear Instruments and Methods in Physics Research. B55. 544-549 (1991)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] I. YAMADA: "Advanced Ion Beam Processing Projects in Japan" Nuclear Instruments and Methods in Physics Research. B59/60. 1467-1475 (1991)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] I. YAMADA: "Investigatin of Ionized Cluster Beam Bombardment and Its Characteristics for Paterials Modification" Radiation Effects and Defects in Solids. 124. 69-80 (1992)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] I. YAMADA: "Preparation pf Atomically Flat Gold Films by Ionized Cluster Beam" Nuclear Instruments and Methods in Physics Research. B55. 876-879 (1991)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] I. YAMADA: "X-ray Characteristics of Atomecally Flat Gold Films Deposited by ICB" Nuclear Instruments and Methods in Physics Research. B59/60. 216-218 (1991)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] I. YAJIMA: "Film Formation of Tetraphenylporphine by Use of the ICB Method" Nuclear Instruments and Methods Physics Research. B59/60. 219-224 (1991)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] I. YAMADA: "Large-Misfit Heteroepitaxy of Aluminum Films by ICB Deposition" Nuclear Instruments Methods in Physics Research. B59/60. 302-307 (1991)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] I. YAMADA: "Thin Film Deposition and Growth Processes by Ionized Cluster Beams" Materials Research Society Symposium Proceedings. 206. 383-390 (1991)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M. ADACHI: "Optical Characteristics of High-Power Excimer Laser Mirrors of Single-Crystal Aluminum Film with High Refectance and Durability" Nuclear Instruments and Methods in Physics Research. B59/60. 940-942 (1991)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] R.L. McEACHERN: "An Investigaion of Cluster Formation in an Ionized Cluster Beam Deposition Source" Journal of Vacuum Science and Technology. A9. 3105-3112 (1991)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] I. YAMADA: "Physics and Chemistry:From Clusters to Crystals" Kluwer Academic Publishers, (1992)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] I. YAMADA: "Low Temperature Epitaxial Growth of Semiconductors" World Scientific, 343 (1991)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] I. Yamada: "Irradiation Effects of Gas-Cluster CO_2 Ion Beams on Si" Nuclear Instruments and Methods. (1993)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] J. A. Northby: "A Method and Applications for Surface Modification by Gas-Cluster Ion Impact" Nuclear Instruments and Methods. (1993)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] I. Yamada: "Surface Modification and Other Advanced Ion Beam Processing Projects in Japan" Surface and Coatings Technology. 51. 514-521 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] I. Yamada: "Novel Paths for Nucleation and Growth of This Films by Ionized Cluster Beam (ICB) Techniques : Atomic-Scale Observation" Materials Research Society Symposium Proceedings. 235. 597-607 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S. Wada: "Epitaxial A1(110) Films Grown on Heavily-Doped Si(100) by Cluster Beam Deposition" Materials Research Society Symposium Proceedings. 235. 621-626 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] I. Yamada: "Advanced Ion Beam Material Processing Projects in Japan" Materials Research Society Symposium Proceedings. 268. 261-272 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] G.H. Takaoka: "Surface and Interface Properties of Copper Phthalocyanine Multilayer Structure Prepared by ICB Method" Proceedings of the First Meeting on the Ion Engineering Society of Japan. 251-254 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y. Yamashita: "Irradiation Effects of a Mass Analyzed Gas Cluster Ion Beam on Silicon Substrates" Proceedings of the First Meeting on the Ion Engineering Society of Japan. 247-250 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] I. Yamada: "Ionized Cluster Beam Deposition and Epitaxy of Metal Films on Large Lattice Misfit Substrate" Physica Scripta. T35. 245-250 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] I. Yamada: "Recent Progress in Depositing Epitaxial Metal Films by an Ionized Cluster Beam" Nuclear Instruments and Methods in Physics Research. B55. 544-549 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] I. Yamada: "Advanced Ion Beam Processing Projects in Japan" Nuclear Instruments and Methods in physics Research. B59/60. 1467-1475 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] I. Yamada: "Investigation of Ionized Cluster Beam Bombardment and Its Characteristics for Materials Modification" Radiation Effects and Defects in Solids. 124. 69-80 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] I. Yamada: "Preparation of Atomically Flat Gold Films by Ionized Cluster Beam" Nuclear Instruments and Methods in Physics Research. B55. 876-879 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] I. Yamada: "X-ray Characteristics of Atomically Flat Gold Films Deposited by ICB" Nuclear Instruments and Methods in Physics Research. B59/60. 216-218 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] I. Yamada: "Film Formation of Tetraphenylporphine by Use of the ICB Method" Nuclear Instruments and Methods in Physics Research. B59/60. 219-224 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] I. Yamada: "Large-Misfit Heteroepitaxy of Aluminum Films ICB Deposition" Nuclear Instruments and Methods in Physics Research. B59/60. 302-307 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] I. Yamada: "Thin Film Deposition and Growth' Processes by Ionized Cluster Beams" Materials Research Society Symposium Proceedings. 206. 383-390 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M. Adachi: "Optical Characteristics of High-Power Excimer Laser Mirrors of Single-Crystal Aluminum Film with High Reflectance and Durability" Nuclear Instruments and Methods in Physics Research. B59/60. 940-942 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] R. L. McEachern: "An Investigation of Cluster Formation in an Ionized Cluster Beam Deposition Source" Journal of Vacuum Science and Technology. A9. 3105-3112 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] I. Yamada: Kluwer Academic Publishers. Physics and Chemistry : From Clusters to Crystals, (1992)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] I. Yamada: World Scientific. Low Temperature Epitaxial Growth of Semiconductors, 1-343 (1991)

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 1994-03-24  

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