| Co-Investigator(Kenkyū-buntansha) |
FUJIMOTO Takashi Kyoto Univ.Fac.of Engineering, Professor, 工学部, 教授 (90026203)
TACHIBANA Kunihide Kyoto Inst.of Technoligy, Fac.of Eng.and Design, Professor, 工芸学部, 教授 (40027925)
HATANO Yoshihiko Tokyo Inst.Technology, Fac.of Science, Professor, 理学部, 教授 (90016121)
TAKEBE Masahiro Tohoku Univ., Fac.of Engineering, Professor, 工学部, 教授 (30005392)
MAKABE Toshiaki Keio Univ., Fac.of Science and Engineering, Professor, 理工学部, 教授 (60095651)
|
|---|
| Research Abstract |
The objective of the pesent research is to clarify the properties of electron and ion swarms in gases under electric and magnetic fields and to apply the properties to industrial development. Difficulties which the investigators faced were brought together and discussed at the scientific meetings held by the project team.
The main achievements are as follows.
As to collison cross sections which are the fundamental data for investigation of properties of the swarms, the magnitude of the ionization cross section of helium, the decay of super-excited hydrogen molecules through dissociation, and the electron density dependence of excitation and ionization in plasma were clarified. Also, from electron swarm data, the electron collision cross sections of the carbon dioxide, ethane and oxygen molecules were deduced.
For clarification of electron swarm properties, the possibility of apperance of two peaks in the electron energy distribution in "Ramsauer gases", treatment of the collision term of Boltzmann equation, development of a numerical matrix analysis of Boltzmann equation and its application to initial relaxation and high frequency problem, swarm analysis by Flight Time Integral menthod, ion species identification by transverse flow drift technique, electronswarm parameter determination by pulsed laser induced photoelectron technique, and ion swarm parameter deduction by a Monte Carlo technique, were done.
Applications of swarm properties were made in determination of spatio-temporal behavior of inductively coupled plasma by a relaxation continuum model, pulsed high frequency discharge observation and analysis, a space-and-time resolved study of a plasma display discharge cell by a microscope-laser spectroscopy, and reaction rate constant determination of radicals for silanes.
|
