1993 Fiscal Year Annual Research Report

量子細線レーザの試作に関する研究

Research Project

Project/Area Number	04555083
Research Institution	University of Tokyo
Principal Investigator	荒川泰彦東京大学, 生産技術研究所, 教授 (30134638)
Co-Investigator(Kenkyū-buntansha)	今井元富士通研究所, 部長藤井陽一東京大学, 生産技術研究所, 教授 (00013110) 榊裕之東京大学, 先端科学技術研究センター, 教授 (90013226)
Keywords	半導体レーザ / 量子細線 / MOCVD / 微小共振器
Research Abstract	21世紀の超高速大容量光情報伝送や光情報処理の実現のためには、時間軸と空間軸の両方において高密度化が可能な光源の開発が不可欠である。これまで、空間軸上では、面発光レーザを用いた2次元集積アレイ化が試みられている。しかし、消費電力を抑えるためにしきい値電流を下げるという課題が残っている。一方、時間軸上では100GHz以上の変調が必要であるが実現の道はそれほど近くはない。本研究では、本研究代表者のこれまでの研究実績に基づき、量子細線レーザの実現のための作製技術の確立をはかり、このレーザが超高密度(時間的・空間的)集積光システムの中心になり得ることを実証することをめざしてきている。本研究により、次世代の集積超レーザのあり方が浮き彫りになるとともに、ナノ構造デバイスの実用化の道を切り開くことができる。本年度は、MOCVD選択成長によりファブリペロー共振器を有する歪量子細線レーザを作製し、光励起実験を低温で行った。さらに、これらの技術を踏まえて、垂直微小共振器構造を有する歪量子細線レーザを試作することに成功した。微小共振器効果が存在することを、フォトルミネッセンス測定を通じて確認するとともに、77Kにおいて光励起実験を行った。これらの結果は、電子と光子を3次元的に閉じ込めた究極のレーザである「微小量子レーザ」の実現への第一歩として位置付けることができ、また、実用化への道を開くものである。当初の目的は十分達成されたと考えられる。

Research Products

(33 results)

All Other

All Publications (33 results)

[Publications] T.Kono: ""Exciton Radiative Lifetime in GaAs Quantum Wires grown by Metal Organic Chemical Vapor Selective growth"" Applied Physics Letters. (1994)
[Publications] T.Yamauchi: ""Theoretical Analysis of Band Structures and Lasing Characteristics in Strained Quantum Wire Lasers"" IEEE J.of Quantum Electronics. 29. 2109-2166 (1993)
[Publications] S.Tsukamoto: ""Fabrication of GaAs Quantum Wires(10〜)by metalorganic chemical Vapor Selective Deposition Growth"" Applied Physics Letters. 63. 355-357 (1993)
[Publications] Y.Arakawa: ""Fabrication and Optical Properties of GaAs Quantum Wires and Dots by MOCVD Selective Growth"(Invited)" Semiconductor Science and Technology. 8. 1082-1088 (1993)
[Publications] T.Arakawa: ""Fabrication of InGaAs strained quantum wire structures using selective-area metal-organic chemical vapor deposition growth"" Japan J.of Applied Physics. 32. L1377-L1379 (1993)
[Publications] Z.L.Zhang: ""Demonstration of Confined Optical Field Effect in a Vertical Microcavity by Examining the Low Temperature Photon-Exciton Interaction in Two Kinds of Quantum Wells"" Applied Physics Letters. (1994)
[Publications] T.Tanaka: ""Cross Sectional Shape Dependence of Quantum Wire Band Structures and Optical Matrix Elements"" Jpn.J.Applied Physics. 32. (1993)
[Publications] Y.Arakawa: ""Fabrication of Quantum Wires and Dots for Quantum Optoelectronic Devices"(Invited)" Optoelectronics-Devices and Technologies. 8. 499-508 (1993)
[Publications] S.Wakabayashi: ""Fabrication of AlGaAs/GaAs Multi-QWRS with 15nm Wire Width Using Two-step Etching and MBE Regrowth"" JRDC International Symposium on Nanostructures & Quantum Effects,Tsukuba,Japan,Nov.17-18(1993). (1993)
[Publications] Y.Arakawa: ""Quantum Wires and Dots for Quantum Nano-structure Laser with Microcavity"" JRDC International Symposium on Nanostructures & Quantum Effects,Tsukuba,Japan,Nov.17-18(1993). (1993)
[Publications] T.Kono: ""Excutive Radiative Lifetime in GaAs Quantum Wires:Wire Width Dependence"" JRDC International Symposium on Nanostructures & Quantum Effects,Tsukuba,Japan,Nov.17-18(1993). (1993)
[Publications] Y.Nagamune: ""Magneto-optical effect in GaAs quantum wires:wire width dependence"" JRDC International Symposium on Nanostructures & Quantum Effects,Tsukuba,Japan,Nov.17-18(1993). (1993)
[Publications] T.Norris: ""Photon-exciton interaction in vertical microcavity"" Quantum Laser Science QPD19(1993). (1993)
[Publications] Y.Arakawa: ""Growth,characterization and application of low-dimensional structures"(Invited)" European Workshop on Metal-Organic Vapour Phase Epitaxy and Related Growth Techniques(EW-MOVPE V),Sweden,June 2-4. (1993)
[Publications] Y.Arakawa: ""Fabrication and Optical Properties of Quantum Wires and Dots"(Invited)" Modulated Semiconductor Structures 6(MSS-6),Germany,August 23-27(1993). (1993)
[Publications] Y.Arakawa: ""Fabrication and optical properties of quantum wires and dots:toward fully quantized microlasers"(Invited)" Quantum Electronics and Laser Science '93,May 2-7,Baltimore.
[Publications] Y.Arakawa: ""Fabrication and Optical Properties of Quantum Wires and Dots"(Invited)" Solid State Devices and Materials(SSDM)'93. (1993)
[Publications] Y.Arakawa: ""Fabrication and Optical Properties of Quantum Wires and Dots"" Japan-U.K.Workshop on Semiconductor Quantum Structure,April. (1993)
[Publications] Y.Arakawa: ""Confined Electronics and Photons:new Physics and Devices,"(Invited)" 28th International School of Materials Science and Technology. (1993)
[Publications] T.Arakawa: ""Fabrication of InGaAs Strained Quantum Wire Structures Using MOCVD Selective Area Growth"" 12th Record of Alloy Semiconductor Physics and Electronics Symposium,July 14-16,Izunagaoka,Japan,(1993). (1993)
[Publications] T.Arakawa: ""Fabrication of Strained Quantum Wire Laser Structure with Vertical Microcavity"" The Microoptics Conference and The Topical Meeting on Gradient-Index Optical Systems(MOC/GRIN'93),Kawasaki. (1993)
[Publications] T.Arakawa: ""Fabrication of InGaAs Strained Quantum Wire Structures Using Selective Area MOCVD Growth"" Solid State Devices and Materials(SSDM)'93,pp.359-361,Aug.29-Sep.2,Chiba(1993). (1993)
[Publications] T.Arakawa: ""Fabrication of Strained Quantum Wire Laser"" 1993 International Semiconductor Device Research Symposium,Charlittesville,U.S.A.,Dec.1-3(1993). (1993)
[Publications] Y.Arakawa: ""Fabrication and Optical Properties of Quantum Wire and Dots for Microcavity Quantum Nano-structure Lasers"(Invited)" 1st International Workshop of the European Research Network on Physics and Technology of Mesoscopic Systems(PHANTOM). (1993)
[Publications] Y.Arakawa: ""Nanostructure and Microcavity for Ultrafast Optoelectronics"" International Workshop on Femtosecond Technology(FST'94)Tsukuba,Japan,Feb.17-18(1994). (1994)
[Publications] 荒川泰彦: "″MOCVD選択成長を用いた量子細線・量子ドットの作製とその光物性″" 日本学術振興会光電相互変換第125委員会第144回研究会. 15-20 (1993)
[Publications] 荒川泰彦: "″有機金属気相選択成長による半導体量子極微構造の作製とその光物性″" 東京工業大学精密工学研究所新研究組織発足記念シンポジウム論文. 112-115 (1993)
[Publications] 荒川泰彦: "″電子と光子を閉じ込め制御する-量子力学の応用から生まれる次世代デバイス″" ゑれきてる. 50. 22-25 (1993)
[Publications] T.Tanaka: "“Analytical study of one dimensional electron gas confined by a harmonic potential in a magnetic field"" 生産研究. 46. 43-46 (1994)
[Publications] 荒川泰彦: "″先端デバイス材料ハンドブック″(電子情報通信学会編)" オーム社, 40 (1993)
[Publications] 荒川泰彦: "″光制御デバイス″" オプトロニクス社, 10 (1993)
[Publications] 神谷武志: "″超高速光スイッチング技術″" 培風館, (1993)
[Publications] 荒川泰彦: "″日本の頭脳100人-先端科学技術をリードする研究者たち-″" 三田出版会, 2 (1993)

1993 Fiscal Year Annual Research Report

量子細線レーザの試作に関する研究

Principal Investigator

荒川 泰彦 東京大学, 生産技術研究所, 教授 (30134638)

Research Products

[Publications] T.Kono: ""Exciton Radiative Lifetime in GaAs Quantum Wires grown by Metal Organic Chemical Vapor Selective growth"" Applied Physics Letters. (1994)

[Publications] T.Yamauchi: ""Theoretical Analysis of Band Structures and Lasing Characteristics in Strained Quantum Wire Lasers"" IEEE J.of Quantum Electronics. 29. 2109-2166 (1993)

[Publications] S.Tsukamoto: ""Fabrication of GaAs Quantum Wires(10〜)by metalorganic chemical Vapor Selective Deposition Growth"" Applied Physics Letters. 63. 355-357 (1993)

[Publications] Y.Arakawa: ""Fabrication and Optical Properties of GaAs Quantum Wires and Dots by MOCVD Selective Growth"(Invited)" Semiconductor Science and Technology. 8. 1082-1088 (1993)

[Publications] T.Arakawa: ""Fabrication of InGaAs strained quantum wire structures using selective-area metal-organic chemical vapor deposition growth"" Japan J.of Applied Physics. 32. L1377-L1379 (1993)

[Publications] Z.L.Zhang: ""Demonstration of Confined Optical Field Effect in a Vertical Microcavity by Examining the Low Temperature Photon-Exciton Interaction in Two Kinds of Quantum Wells"" Applied Physics Letters. (1994)

[Publications] T.Tanaka: ""Cross Sectional Shape Dependence of Quantum Wire Band Structures and Optical Matrix Elements"" Jpn.J.Applied Physics. 32. (1993)

[Publications] Y.Arakawa: ""Fabrication of Quantum Wires and Dots for Quantum Optoelectronic Devices"(Invited)" Optoelectronics-Devices and Technologies. 8. 499-508 (1993)

[Publications] S.Wakabayashi: ""Fabrication of AlGaAs/GaAs Multi-QWRS with 15nm Wire Width Using Two-step Etching and MBE Regrowth"" JRDC International Symposium on Nanostructures & Quantum Effects,Tsukuba,Japan,Nov.17-18(1993). (1993)

[Publications] Y.Arakawa: ""Quantum Wires and Dots for Quantum Nano-structure Laser with Microcavity"" JRDC International Symposium on Nanostructures & Quantum Effects,Tsukuba,Japan,Nov.17-18(1993). (1993)

[Publications] T.Kono: ""Excutive Radiative Lifetime in GaAs Quantum Wires:Wire Width Dependence"" JRDC International Symposium on Nanostructures & Quantum Effects,Tsukuba,Japan,Nov.17-18(1993). (1993)

[Publications] Y.Nagamune: ""Magneto-optical effect in GaAs quantum wires:wire width dependence"" JRDC International Symposium on Nanostructures & Quantum Effects,Tsukuba,Japan,Nov.17-18(1993). (1993)

[Publications] T.Norris: ""Photon-exciton interaction in vertical microcavity"" Quantum Laser Science QPD19(1993). (1993)

[Publications] Y.Arakawa: ""Growth,characterization and application of low-dimensional structures"(Invited)" European Workshop on Metal-Organic Vapour Phase Epitaxy and Related Growth Techniques(EW-MOVPE V),Sweden,June 2-4. (1993)

[Publications] Y.Arakawa: ""Fabrication and Optical Properties of Quantum Wires and Dots"(Invited)" Modulated Semiconductor Structures 6(MSS-6),Germany,August 23-27(1993). (1993)

[Publications] Y.Arakawa: ""Fabrication and optical properties of quantum wires and dots:toward fully quantized microlasers"(Invited)" Quantum Electronics and Laser Science '93,May 2-7,Baltimore.

[Publications] Y.Arakawa: ""Fabrication and Optical Properties of Quantum Wires and Dots"(Invited)" Solid State Devices and Materials(SSDM)'93. (1993)

[Publications] Y.Arakawa: ""Fabrication and Optical Properties of Quantum Wires and Dots"" Japan-U.K.Workshop on Semiconductor Quantum Structure,April. (1993)

[Publications] Y.Arakawa: ""Confined Electronics and Photons:new Physics and Devices,"(Invited)" 28th International School of Materials Science and Technology. (1993)

[Publications] T.Arakawa: ""Fabrication of InGaAs Strained Quantum Wire Structures Using MOCVD Selective Area Growth"" 12th Record of Alloy Semiconductor Physics and Electronics Symposium,July 14-16,Izunagaoka,Japan,(1993). (1993)

[Publications] T.Arakawa: ""Fabrication of Strained Quantum Wire Laser Structure with Vertical Microcavity"" The Microoptics Conference and The Topical Meeting on Gradient-Index Optical Systems(MOC/GRIN'93),Kawasaki. (1993)

[Publications] T.Arakawa: ""Fabrication of InGaAs Strained Quantum Wire Structures Using Selective Area MOCVD Growth"" Solid State Devices and Materials(SSDM)'93,pp.359-361,Aug.29-Sep.2,Chiba(1993). (1993)

[Publications] T.Arakawa: ""Fabrication of Strained Quantum Wire Laser"" 1993 International Semiconductor Device Research Symposium,Charlittesville,U.S.A.,Dec.1-3(1993). (1993)

[Publications] Y.Arakawa: ""Fabrication and Optical Properties of Quantum Wire and Dots for Microcavity Quantum Nano-structure Lasers"(Invited)" 1st International Workshop of the European Research Network on Physics and Technology of Mesoscopic Systems(PHANTOM). (1993)

[Publications] Y.Arakawa: ""Nanostructure and Microcavity for Ultrafast Optoelectronics"" International Workshop on Femtosecond Technology(FST'94)Tsukuba,Japan,Feb.17-18(1994). (1994)

[Publications] 荒川泰彦: "″MOCVD選択成長を用いた量子細線・量子ドットの作製とその光物性″" 日本学術振興会光電相互変換第125委員会第144回研究会. 15-20 (1993)

[Publications] 荒川泰彦: "″有機金属気相選択成長による半導体量子極微構造の作製とその光物性″" 東京工業大学精密工学研究所新研究組織発足記念シンポジウム論文. 112-115 (1993)

[Publications] 荒川泰彦: "″電子と光子を閉じ込め制御する-量子力学の応用から生まれる次世代デバイス″" ゑれきてる. 50. 22-25 (1993)

[Publications] T.Tanaka: "“Analytical study of one dimensional electron gas confined by a harmonic potential in a magnetic field"" 生産研究. 46. 43-46 (1994)

[Publications] 荒川泰彦: "″先端デバイス材料ハンドブック″(電子情報通信学会編)" オーム社, 40 (1993)

[Publications] 荒川泰彦: "″光制御デバイス″" オプトロニクス社, 10 (1993)

[Publications] 神谷武志: "″超高速光スイッチング技術″" 培風館, (1993)

[Publications] 荒川泰彦: "″日本の頭脳100人-先端科学技術をリードする研究者たち-″" 三田出版会, 2 (1993)

荒川泰彦東京大学, 生産技術研究所, 教授 (30134638)