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1993 Fiscal Year Final Research Report Summary

Preparation and Characterization of Ferroelectric Thin Films for Memories by the Chemical Process

Research Project

Project/Area Number 04555188
Research Category

Grant-in-Aid for Developmental Scientific Research (B)

Allocation TypeSingle-year Grants
Research Field 無機工業化学・無機材料工学
Research InstitutionKinki University (1993)
Osaka Prefecture University (1992)

Principal Investigator

TOHGE Noboru  Kinki University, Facul.Sci.Engn., Professor, 理工学部, 教授 (00081315)

Co-Investigator(Kenkyū-buntansha) YOSHIDA Akihiko  Matsushita Elect.Indust.Co., Ltd, Maneger, 電子化学材料研究所, 研究室長
TAKAHASHI Masaya  Osaka Munic.Tech.Res.Inst., Investigator, 研究員
Project Period (FY) 1992 – 1993
KeywordsSol-gel process / Ferroelectrics / PZT / PLZT / Bi_4Ti_3O_<12> / Thin film / Patterning / Chemical modification
Research Abstract

Ferroelectric memories have recently been attracting much attention. The sol-gel process, a typical chemical process, is promising for the preparation of these ferroelectric films. The present study has been done to develop the preparation process and characterize the resultant films, with the following results.
(1) PZT films were prepared from Zr- and Ti-butoxides modified with acetylacetone and trihydrated lead acetate. The solubility of the acetate in ethanol was found to increase in the presence of monoethanolamine. The heat-treatment of the gel films at 700 C produced ferroelectric films of the perovskite single phase.
(2) Based on the results on PZT films, PLZT films were prepared using lanthanum nitrate in a part of lead acetate. Homogeneous thin films with uniform compositional distribution have been formed. Their properties such as ferroelectricity and leak current were studied as a function of film thickness.
(3) Bi-ethoxide stabilized with monoethanolamine and Ti-butoxide modified with acetylacetone were used for the preparation of Bi_4Ti_3O_<12> ferroelectric films and their properties were studied is terms of preparation conditions.
(4) The UV-irradiation of gel films modified with beta-diketones was found to decrease their solubility in acidic solutions or alcohol solutions. This finding was applicable to the fine-patterning of single component such as ZrO_2 and TiO_2 and moreover ferroelectric thin films of multicomponent.
(5) Hydrolysis of a number of trifuctional alkoxysilanes was studied and the properties of sol-gel derived SiO_2 films were examined in an atmosphere of high temperature and humidity.

  • Research Products

    (18 results)

All Other

All Publications (18 results)

  • [Publications] 峠 登: "ゾル-ゲル法によるエレクトロニクス用薄膜の作製と特性" 電気化学. 60. 765-770 (1992)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 峠 登: "ゾル-ゲル法による強誘電体薄膜の作製と特性" 科学と工業. 66. 481-486 (1992)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] N.Tohge: "Formation and Properties of Ferroelectric Bi_4Ti_3O_<12> Films by the Sol-Gel Process" Jpn.J.Appl.Phys.31. 4016-4017 (1992)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] K.Izumi: "Hydrolysis of Trifunctional Alkoxysilanes and Corrosion Resistance of Steel Sheets Coated with Alkoxysilane-Derived Films" J.Mater.Sci.Lett.12. 724-727 (1993)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] A.Matsuda: "Changes in Physical Properties and Structure of Sol-Gel Derived SiO_2 Films in an Environment of High Temperature and High Humidity" J.Ceram.Soc.Jpn.102(印刷中). (1994)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] N.Tohge: "Ferroelectric Properties of PLZT Films Prepared by the Sol-Gel Process Using Chemically Modified Metal-Alkoxides" J.Mater.Sci.;Mater.Electron.(印刷中). (1994)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] K.Shinnmou: "Fine-Patterning of ZrO_2 Thin films by the Photolysis of Chemically Modified Gel Films" Jpn.J.Appl.Phys.(投稿中).

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] N.Tohge: "Preparation and Characterization of PZT and PLZT Thin Films by the Sol-Gel Process Using Chemically Modified Metal-Alkoxides" J.Mater.Sci.(投稿予定).

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] N.Tohge: "Fine-Patterning of TiO_2 Thin Films by the Photolysis of Chemically Modified Gel Films" J.Mater.Sci.Lett.(投稿予定).

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] N.Tohge: "Preparation and Properties of Thin Films for Electronis by the Sol-Gel Method (in Japanese)" Electrochemistry. 60. 765-770 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] N.Tohge: "Preparation and Properties of Ferroelectric Thin Films by the Sol-Gel Method (in Japanese)" Science and Technology. 66. 481-486 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] N.Tohge, Y.Fukuda and T.Minami: "Formation and Properties of Ferroelectric Bi_4Ti_3O_<12> Films by the Sol-Gel Process" Jpn.J.Appl.Phys.31. 4016-4017 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K.Izumi, H.Tanaka, Y.Uchida, N.Tohge and T.Minami: "Hydrolysis of Trifunctional Alkoxysilanes and Corrosion Resistance of Steel Sheets Coated with Alkoxysilane-Derived Films" J.Mater.Sci.Lett.12. 724-727 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] A.Matsuda, Y.Matsuno, S.Katayama, T.Tsuno, N.Tohge and T.Minami: "Changes in Physical Properties and Structure of Sol-Gel Derived SiO_2 Films in an Environment of High Temperature and High Humidity" J.Ceram.Soc.Jpn.102 (in press). (1994)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] N.Tohge, E.Fujii and T.Minami: "Ferroelectric Properties of PLZT Films Prepared by the Sol-Gel Process Using Chemically Modified Metal-Alkoxides" J.Mater.Sci. : Mater.Electron.(in press). (1994)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K.Shinmou, N.Tohge and T.Minami: "Fine-Patterning of ZrO_2 Thin Films by the Photolysis of Chemically Modified Gel Films" Jpn.J.Appl.Phys.(submitted).

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] N.Tohge, H.Tanaka, K.Tadanaga and T.Minami: "Preparation and Characterization of PZT and PLZT Thin Films by the Sol-Gel Process Using Chemically Modified Metal-Alkoxides" J.Mater.Sci.(to be submitted).

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] N.Tohge, K.Shinmou and T.Minami: "Fine-Patterning of TiO_2 Thin Films by the Photolysis of Chemically Modified Gel Films" J.Mater.Sci.Lett.(to be submitted).

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 1995-03-27  

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