1993 Fiscal Year Annual Research Report

レーザー誘起表面反応による機能性半導体超薄膜の作製と応用

Research Project

Project/Area Number	04555192
Research Institution	The University of Tokyo
Principal Investigator	橋本和仁東京大学, 工学部, 教授 (00172859)
Co-Investigator(Kenkyū-buntansha)	山本京之介三菱製紙(株), 筑波研究所, 主任研究員兵頭建二三菱製紙(株), 筑波研究所, 主任研究員馬場凉東京大学, 工学部, 助手 (70198951)
Keywords	光CVD / II-VI族半導体超薄膜 / 固体表面反応 / レーザー光 / 超微細構造 / 超格子膜
Research Abstract	レーザー光を利用した固体表面反応の制御は半導体生成、超格子作製など人工的に新しい物質を作る手段として有効なことがわかってきた。本研究ではレーザー誘起固体表面反応を利用して、 1.一層ずつ反応を制御しながら(原子層エピタキシー法、ALE)、微細構造を持つ酸化物、酸化物のII-VI半導体の超格子膜を作製する技術を確立した。 2.さらに、成膜中に第2のレーザー光を導入することにより、膜物性のin〜situコントロールを行い、 3.その反応の分子論的機構をin〜situな表面解析法と高速分光法により解析を行った。 4.現有する熱CVDの装置に光源を2つ導入できる形に改良を行い、光CVDチャンバーを作製した。さらに、これらの研究成果を基に、 1)安価で簡便なALE用パルスビーム装置を開発した。 2)短波長発光素子の開発を行った。 3)表面解析装置(リードオージェ)を作製した。 4)成膜装置の改良による高真空化(表面の電子分光法による解析を可能とする)を行った。 5)高速分光法と表面解析法による成膜機構の解明と成膜条件の最適化を行った。 6)マスクと通した光照射により、微細構造を持つ超格子膜の作製を行った。

Research Products

(12 results)

All Other

All Publications (12 results)

[Publications] T.Ameniya: "Faradic Charge Transter with Double-Layer Charging and /or Adsorption-Related Charging at Polymer-Modified Electrodes As Observed by Colar Impedance Spectroscopy" J.Phys.Chem.97. 9736-9740 (1993)
[Publications] K.Morigaki: "In-Site Electrochemical Actinometry Using an Monolayer Film" Ber.Bensengs.Phys.Chem.97. 860-864 (1993)
[Publications] L.A.Nagahara: "Effects of HF Solution in the Electroless Deposition Process on Silicon Surfacs" J.Vac.Sci.Technol,A. 11. 763-767 (1993)
[Publications] R.Baba: "Characterization of the Molecular Orientation in LB Films of Rhodamine B Derivatives by the Optical Second Harmonic Generation Coherent Interferometry" 電気化学. 61. 1030-1031 (1993)
[Publications] L.A.Nagahara: "Scanning Probe and Transmission Electron Microscopy Observations of Cobalt Naphthalocyanine Molecules Deposited onto a NaCl Substrate" J.Vac.Sci.Technol.A. 11. 781-785 (1993)
[Publications] K.Morigaki: "Electrochemical Counting of Photon Number Using the Assembled Monolayer Film of Azo Compound" Sensors and Actuators B. 13-14. 226-229 (1993)
[Publications] O.Sato: "Self-Ordered Film of Hemicyanine Derivative Characterized by Phase-Sensitive Optical Sccond-Harmonic Generation" Jpn.J.Appl.Phys.32. 1201-1203 (1993)
[Publications] K.Ohkawa: "Electrochemical Reduction of Carbon Dioxide on Hydrogen-Storing Materilas.Part II.Copper-Modified Palladium Electrode" J.Electroanal.Chem.348. 459-464 (1993)
[Publications] T.Amemiya: "Dynamics of Faradic Procssed in Polypyrrole/Polystyrenesulfonate Composite Films in the Presence and Absence of Redox Species in Aqueou Solutions" J.Phys.Chem.97. 4192-4195 (1993)
[Publications] Z.F.Liu.: "Direct Observation of the Secondary Structure of Unfolded Pseudomonas-Cytochrome C_<551> by Scanning Tunneling Microscopy" Surface Sci.Lett.284. L411-L415 (1993)
[Publications] T.Amemiya: "Frequency-Resolved Faradaic Processes in Polypyrrole Films Observed by Electromodulation Techniques:Electrochemical Impedance and Color Impedance Spectroscopies" J.Phys.Chem.97. 4187-4191 (1993)
[Publications] K.Ohkawa: "Electrochemical Reduction of Carbon Dioxide on Hydrogen-Storing Materials Part I.The Effect of Hydrogen Absorption on the Electrochemical Behavior on Palladium Electrodes" J.Electroanal.Chem.345. 445-456 (1993)

1993 Fiscal Year Annual Research Report

レーザー誘起表面反応による機能性半導体超薄膜の作製と応用

Principal Investigator

橋本 和仁 東京大学, 工学部, 教授 (00172859)

Research Products

[Publications] T.Ameniya: "Faradic Charge Transter with Double-Layer Charging and /or Adsorption-Related Charging at Polymer-Modified Electrodes As Observed by Colar Impedance Spectroscopy" J.Phys.Chem.97. 9736-9740 (1993)

[Publications] K.Morigaki: "In-Site Electrochemical Actinometry Using an Monolayer Film" Ber.Bensengs.Phys.Chem.97. 860-864 (1993)

[Publications] L.A.Nagahara: "Effects of HF Solution in the Electroless Deposition Process on Silicon Surfacs" J.Vac.Sci.Technol,A. 11. 763-767 (1993)

[Publications] R.Baba: "Characterization of the Molecular Orientation in LB Films of Rhodamine B Derivatives by the Optical Second Harmonic Generation Coherent Interferometry" 電気化学. 61. 1030-1031 (1993)

[Publications] L.A.Nagahara: "Scanning Probe and Transmission Electron Microscopy Observations of Cobalt Naphthalocyanine Molecules Deposited onto a NaCl Substrate" J.Vac.Sci.Technol.A. 11. 781-785 (1993)

[Publications] K.Morigaki: "Electrochemical Counting of Photon Number Using the Assembled Monolayer Film of Azo Compound" Sensors and Actuators B. 13-14. 226-229 (1993)

[Publications] O.Sato: "Self-Ordered Film of Hemicyanine Derivative Characterized by Phase-Sensitive Optical Sccond-Harmonic Generation" Jpn.J.Appl.Phys.32. 1201-1203 (1993)

[Publications] K.Ohkawa: "Electrochemical Reduction of Carbon Dioxide on Hydrogen-Storing Materilas.Part II.Copper-Modified Palladium Electrode" J.Electroanal.Chem.348. 459-464 (1993)

[Publications] T.Amemiya: "Dynamics of Faradic Procssed in Polypyrrole/Polystyrenesulfonate Composite Films in the Presence and Absence of Redox Species in Aqueou Solutions" J.Phys.Chem.97. 4192-4195 (1993)

[Publications] Z.F.Liu.: "Direct Observation of the Secondary Structure of Unfolded Pseudomonas-Cytochrome C_<551> by Scanning Tunneling Microscopy" Surface Sci.Lett.284. L411-L415 (1993)

[Publications] T.Amemiya: "Frequency-Resolved Faradaic Processes in Polypyrrole Films Observed by Electromodulation Techniques:Electrochemical Impedance and Color Impedance Spectroscopies" J.Phys.Chem.97. 4187-4191 (1993)

[Publications] K.Ohkawa: "Electrochemical Reduction of Carbon Dioxide on Hydrogen-Storing Materials Part I.The Effect of Hydrogen Absorption on the Electrochemical Behavior on Palladium Electrodes" J.Electroanal.Chem.345. 445-456 (1993)

橋本和仁東京大学, 工学部, 教授 (00172859)