1993 Fiscal Year Annual Research Report

量子トンネル過程と新手法

Research Project

Project/Area Number	05245104
Research Institution	Hiroshima University
Principal Investigator	森田清三広島大学, 理学部, 教授 (50091757)
Co-Investigator(Kenkyū-buntansha)	大津元一東京工業大学, 総合理工学研究科, 教授 (70114858) 魚住清彦青山学院大学, 理工学部, 教授 (20011124) 潮田資勝東北大学, 電気通信研究所, 教授 (90176652) 高柳邦夫東京工業大学, 総合理工学研究科, 教授 (80016162) 市ノ川竹男早稲田大学, 理工学部, 教授 (70063310)
Keywords	走査型原子間力 / トンネル顕微鏡 / 絶縁体のトンネル過程 / 金属のエピタキシャル成長 / 原子間隙相互作用 / トンネル発光 / クーロンブロッケード / フォトンSTM / 電解析出
Research Abstract	森田グループは、超高真空・高温走査型原子間力/トンネル顕微鏡(AFM/STM)のシステム設計と関連技術開発を行った。またSi酸化膜の接触帯電の空気中予備実験で、電荷の符号や帯電量の制御に初めて成功した。市ノ川グループは、走査型トンネル顕微鏡(STM)と走査型電子顕微鏡(SEM)を複合化するための超小型電子銃の開発と評価を行った。また、Si(100)2×1上にエピタキシャル成長する金属について、成長機構などを原子の分解能で研究した。高柳グループは、電子顕微鏡用の針-試料表面対置型の特殊ホルダーを用いて、電場をかけたときの探針と試料表面の双方の原子配置変化を高分解能観察する装置を開発して、調整中である。潮田グループは、STMトンネル発光の発光計測時間を短縮するた為に、発光検出系の感度向上をはかった。並行して、Au蒸着膜などを試料としてSTM発光実験とその発光機構の研究を行った。魚住グループは、高滋場測定可能な超高真空低温STMの開発・調整を行った。また、液体窒素温度でのPt島状薄膜の電流-電圧特性の測定などの予備実験を行った。大津グループは、フォトンSTMの性能を評価する為に、AFMと同時動作するシステムを開発した。また、分解能に関する理論的検討を行い、分解能を決める主要因は先端曲率半径であることを見いだし、実験結果と合致する事を確認した。板谷グループは、電極表面構造と反応性の関係を解明するために、ヨウ素原子の吸着したAu(111)上でAgのUPD過程を詳細に検討した。その結果、複数の化学種が共吸着した複雑な糸においても、詳細な構造解析を行い得るに至っている。

Research Products
(27 results)

All Other

All Publications (27 results)

[Publications] Yoshinobu Fukano: "Scanning Force/Tunneling Microscopy as a Novel Technique for the Study of Nanometer-Scale Dielectric Breakdown of Silicon Oxide Layer" Jpn.J.Appl.Phys.32. 290-293 (1993)
[Publications] Seizo Morita: "Atomic Force Microscope Combined with Scanning Tunneling Microscope[AFM/STM]" Jpn.J.Appl.Phys.32. 2983-2988 (1993)
[Publications] Yoshinobu Fukano: "Time Evolution of Electrostatic Force Induced by Contact-Electrified Charges on Thin Silicon Oxide Surface" Extended Abstracts of the 1993 Int.Conf.on Solid State Devices and Materials(SSDM'93),1993,Makuhari Messe. 609-611 (1993)
[Publications] Seizo Morita: "Reproducible and Controllable Contact Electrification on a Thin Insulator" Jpn.J.Appl.Phys.32. L1701-L1703 (1993)
[Publications] Seizo Morita: "Stable-unstable phase transition of densely contact-electrified electrons on a thin silicon oxide" Jpn.J.Appl.Phys.32. L1852-L1854 (1993)
[Publications] Yasuhiro Sugawara: "Spatial distribution and its phase transition of densely contact-electrified electrons on a thin silicon oxide" Jpn.J.Appl.Phys.33. L70-L73 (1994)
[Publications] Yasuhiro Sugawara: "Spatial distribution of densely contact-electrified charges on a thin silicon oxide" Jpn.J.Appl.Phys.33. L74-L77 (1994)
[Publications] Seizo Morita: "Dissipation of contact-electrified charge on thin Si-oxide studied by atomic force microscope" Applied Surface Science. 75. 151-156 (1994)
[Publications] Yoshinobu Fukano: "Time Evolution of Contact-Electrified Electron Dissipation on Silicon Oxide Surface Investigated Using Noncontact Atomic Force Microscope" Jpn.J.Appl.Phys.33. 379-382 (1994)
[Publications] 森田清三: "AFM/STMによる半導体の複合観察" 日本結晶学会誌. 35. 174-176 (1993)
[Publications] 森田清三: "半導体表面のAFM/STM観察" 日本学術振興会マイクロビームアナリシス第141委員会第75回・極限構造電子物性第151委員会第25回研究会合同研究会資料. 30-35 (1993)
[Publications] 森田清三: "AFM/STM" 「機械の研究」(養賢堂). 46. 150-153 (1994)
[Publications] A.K.Schmid: "Fast interdiffusion in thin films:STM determination of surface diffusion through microscopic pinholes" Phys.Rev.B. 48. 2855-2858 (1993)
[Publications] H.Itoh: "Structures of low coverage phases of Al on the Si(100)surface observed by STM" Phys.Rev.B. 48. 14663-14666 (1993)
[Publications] H.Itoh: "Nucleation and surface reconstruction of Pd on Si(100)observed by STM" Surface Science. 284. 236-246 (1993)
[Publications] A.Nagashima: "Electronic states of monolayer graphite on some transition metal carbide surfaces" Surface Science. 287/288. 609-613 (1993)
[Publications] A.Nagashima: "Electronic states of monolayer graphite formed on TiC(111)surface" Surface Science. 291. 93-98 (1993)
[Publications] H.Itoh: "Temperature-depending growth and surface structures of low-coverage Al phases on Si(100)observed STM" Surface Science. 292 in press. (1993)
[Publications] S.Ushioda: "Light emission spectroscopy of tunneling electrons injected by STM" Proceedings of International Conference on Advanced Microelectronic Devices and Processing. in press. (1994)
[Publications] S.Ushioda: "Light emission from M-I-M tunnel junctions fabricated on 0.1mm lithographically ruled gratings" Proceedings of International Conference on Advanced Microelectronic Devices and Processing. in press. (1994)
[Publications] Y.Uehara: "Light emission from thin oxide Si-MOS tunnel junctions" Proceedings of International Conference on Advanced Microelectronic Devices and Processing. in press. (1994)
[Publications] S.Jiang: "Reflection Resonance-Type Photon Scanning Tunneling Microscope" Jpn.J.Appl.Phys.33. L55-L58 (1994)
[Publications] T.Pangaribuan: "Two-Step Etching Method for Fabrication of Fibre Probe for Photon Scanning" Electronics Letters. 29. 1978-1979 (1993)
[Publications] S.Sugita: "Electrochemical Scanning Tunneling Microscopy of Silver Adlayers on Iodine-Coated Au(111)in Perchloric Acid Solution" The Journal of Physical Chemistry. 97. 8780-8785 (1993)
[Publications] N.Kimizuka: "Slow Surface Diffusion of Pt Atoms on Pt(111)" DENKI KAGAKU. 71. 796-799 (1993)
[Publications] 阿部孝之: "電極界面構造の“その場"測定" 化学. 48. 72-73 (1993)
[Publications] 森田清三(分担執筆): "走査型トンネル顕微鏡" (社)電子情報通信学会編者[取次販売所コロナ社] 66ページ執筆, (1993)

1993 Fiscal Year Annual Research Report

量子トンネル過程と新手法

Principal Investigator

森田 清三 広島大学, 理学部, 教授 (50091757)

Research Products

[Publications] Yoshinobu Fukano: "Scanning Force/Tunneling Microscopy as a Novel Technique for the Study of Nanometer-Scale Dielectric Breakdown of Silicon Oxide Layer" Jpn.J.Appl.Phys.32. 290-293 (1993)

[Publications] Seizo Morita: "Atomic Force Microscope Combined with Scanning Tunneling Microscope[AFM/STM]" Jpn.J.Appl.Phys.32. 2983-2988 (1993)

[Publications] Yoshinobu Fukano: "Time Evolution of Electrostatic Force Induced by Contact-Electrified Charges on Thin Silicon Oxide Surface" Extended Abstracts of the 1993 Int.Conf.on Solid State Devices and Materials(SSDM'93),1993,Makuhari Messe. 609-611 (1993)

[Publications] Seizo Morita: "Reproducible and Controllable Contact Electrification on a Thin Insulator" Jpn.J.Appl.Phys.32. L1701-L1703 (1993)

[Publications] Seizo Morita: "Stable-unstable phase transition of densely contact-electrified electrons on a thin silicon oxide" Jpn.J.Appl.Phys.32. L1852-L1854 (1993)

[Publications] Yasuhiro Sugawara: "Spatial distribution and its phase transition of densely contact-electrified electrons on a thin silicon oxide" Jpn.J.Appl.Phys.33. L70-L73 (1994)

[Publications] Yasuhiro Sugawara: "Spatial distribution of densely contact-electrified charges on a thin silicon oxide" Jpn.J.Appl.Phys.33. L74-L77 (1994)

[Publications] Seizo Morita: "Dissipation of contact-electrified charge on thin Si-oxide studied by atomic force microscope" Applied Surface Science. 75. 151-156 (1994)

[Publications] Yoshinobu Fukano: "Time Evolution of Contact-Electrified Electron Dissipation on Silicon Oxide Surface Investigated Using Noncontact Atomic Force Microscope" Jpn.J.Appl.Phys.33. 379-382 (1994)

[Publications] 森田清三: "AFM/STMによる半導体の複合観察" 日本結晶学会誌. 35. 174-176 (1993)

[Publications] 森田清三: "半導体表面のAFM/STM観察" 日本学術振興会マイクロビームアナリシス第141委員会第75回・極限構造電子物性第151委員会第25回研究会 合同研究会資料. 30-35 (1993)

[Publications] 森田清三: "AFM/STM" 「機械の研究」(養賢堂). 46. 150-153 (1994)

[Publications] A.K.Schmid: "Fast interdiffusion in thin films:STM determination of surface diffusion through microscopic pinholes" Phys.Rev.B. 48. 2855-2858 (1993)

[Publications] H.Itoh: "Structures of low coverage phases of Al on the Si(100)surface observed by STM" Phys.Rev.B. 48. 14663-14666 (1993)

[Publications] H.Itoh: "Nucleation and surface reconstruction of Pd on Si(100)observed by STM" Surface Science. 284. 236-246 (1993)

[Publications] A.Nagashima: "Electronic states of monolayer graphite on some transition metal carbide surfaces" Surface Science. 287/288. 609-613 (1993)

[Publications] A.Nagashima: "Electronic states of monolayer graphite formed on TiC(111)surface" Surface Science. 291. 93-98 (1993)

[Publications] H.Itoh: "Temperature-depending growth and surface structures of low-coverage Al phases on Si(100)observed STM" Surface Science. 292 in press. (1993)

[Publications] S.Ushioda: "Light emission spectroscopy of tunneling electrons injected by STM" Proceedings of International Conference on Advanced Microelectronic Devices and Processing. in press. (1994)

[Publications] S.Ushioda: "Light emission from M-I-M tunnel junctions fabricated on 0.1mm lithographically ruled gratings" Proceedings of International Conference on Advanced Microelectronic Devices and Processing. in press. (1994)

[Publications] Y.Uehara: "Light emission from thin oxide Si-MOS tunnel junctions" Proceedings of International Conference on Advanced Microelectronic Devices and Processing. in press. (1994)

[Publications] S.Jiang: "Reflection Resonance-Type Photon Scanning Tunneling Microscope" Jpn.J.Appl.Phys.33. L55-L58 (1994)

[Publications] T.Pangaribuan: "Two-Step Etching Method for Fabrication of Fibre Probe for Photon Scanning" Electronics Letters. 29. 1978-1979 (1993)

[Publications] S.Sugita: "Electrochemical Scanning Tunneling Microscopy of Silver Adlayers on Iodine-Coated Au(111)in Perchloric Acid Solution" The Journal of Physical Chemistry. 97. 8780-8785 (1993)

[Publications] N.Kimizuka: "Slow Surface Diffusion of Pt Atoms on Pt(111)" DENKI KAGAKU. 71. 796-799 (1993)

[Publications] 阿部孝之: "電極界面構造の“その場"測定" 化学. 48. 72-73 (1993)

[Publications] 森田清三(分担執筆): "走査型トンネル顕微鏡" (社)電子情報通信学会編者[取次販売所コロナ社] 66ページ執筆, (1993)

森田清三広島大学, 理学部, 教授 (50091757)

[Publications] 森田清三: "半導体表面のAFM/STM観察" 日本学術振興会マイクロビームアナリシス第141委員会第75回・極限構造電子物性第151委員会第25回研究会合同研究会資料. 30-35 (1993)