1994 Fiscal Year Annual Research Report

量子トンネル過程と新手法

Research Project

Project/Area Number	05245104
Research Institution	Hiroshima University
Principal Investigator	森田清三広島大学, 理学部, 教授 (50091757)
Co-Investigator(Kenkyū-buntansha)	大津元一東京工業大学, 総合理工学研究科, 教授 (70114858) 魚住清彦青山学院大学, 理工学部, 教授 (20011124) 潮田資勝東北大学, 電気通信研究所, 教授 (90176652) 高柳邦夫東京工業大学, 総合理工学研究科, 教授 (80016162) 市ノ川竹男早稲田大学, 理工学部, 教授 (70063310)
Keywords	走査型原子間力 / トンネル顕微鏡 / 絶縁体のトンネル過程 / 電子顕微鏡(SEM) / 原子間隙相互作用 / トンネル発光 / 負性微分抵抗 / フォトンSTM / 電気化学STM
Research Abstract	森田グループは、絶縁体のトンネル過程の研究のために、超高真空・高温走査型原子間力/トンネル顕微鏡(AFM/STM)と関連技術の開発を行った。また、シリコン酸化膜への空気中の高密度接触帯電で、負電荷の相転移現象を見いだした。市ノ川グループは、STMと走査型オージェ電子顕微鏡を複合化してmmからÅの領域の画像を同一視野で観測することに成功した。また、STMを使って、Si(100)とSi(111)上での金属エピタキシャル成長を調べた。高柳グループは、電子顕微鏡とSTMを複合化して、探針と試料表面を近づけたときの探針表面の原子の振る舞いを電子顕微鏡で高分解能観察することに成功した。また、W探針に電界をかけて、探針先端の形状変化の観察にも成功した。潮田グループは、STM発光の高感度受光システムにより、薄い酸化膜上の金蒸着膜の発光スペクトルを調べた結果、発光のカットオフエネルギーが、金微粒子の単電子チャージアップ効果により、低エネルギー側にシフトする現象を見いだした。魚住グループは、微粒子を経た電気伝導を調べて、電子のトンネル電極間に電界に逆行した経路がある時、負性微分抵抗が観察される事を示した。また、高磁場測定可能な超高真空低温STMを用いて、A1微粒子の酸化過程の観察を試みた。大津グループは、フォトンSTMの性能向上のために、ファイバープローブの先鋭化、微小開口作成を行った。また、改良した装置を用いて、バクテリア鞭毛、ニュウロン中の微小細管を観測し、10nm以内の分解能を得た。板谷グループは、電解質水溶液中での電極表面とSTM探針間のトンネル過程の解明のため、吸着種も含めた電極表面の状態を調べた。その結果、ヨウ素が前吸着したPt(111)電極に銀が吸着した共吸着表面で原子レベルの観察に成功した。

Research Products
(37 results)

All Other

All Publications (37 results)

[Publications] Takayuki Uchihashi: "Contact Electrification on Thin SrTiO_3 Film by Atomic Force Microscope" Jpn.J.Appl.Phys.33. L374-L376 (1994)
[Publications] Yoshinobu Fukano: "Time Dependent Dielectric Breakdown of Thin Silicon Oxide Using Dense Contact Electrification" Jpn.J.Appl.Phys.33. 3756-3760 (1994)
[Publications] Takeshi Tsuyuguchi: "Contact Electrification on Thin Silicon Oxide in Vacuum" Jpn.J.Appl.Phys.33. L1046-L1048 (1994)
[Publications] Takahiro Okusako: "Dissipation of Contact Electrified Electrons on Dielectric Thin Films with Silicon Substrate" Jpn.J.Appl.Phys.33. L959-L961 (1994)
[Publications] Takayuki Uchihashi: "Heat Treatment and Steaming Effects of Silicon Oxide upon Electron Dissipation on Silicon Oxide Surface" Jpn.J.Appl.Phys.33. L1128-L1130 (1994)
[Publications] Yasuhiro Sugawara: "Atomic force microscopy studies of contact-electrified charges on silicon oxide film" J.Vac.Sci.Technol.B. 12. 1627-1630 (1994)
[Publications] Takayuki Uchihashi: "Charge Storage on Thin SrTiO_3 Film by Contact Electrification" Jpn.J.Appl.Phys.33. 5573-5576 (1994)
[Publications] Yoshinobu Fukano: "Parameter Dependence of Stable State of Densely Contact-Electrified Electrons on Thin Silicon Oxide" Jpn.J.Appl.Phys.33. 6739-6745 (1994)
[Publications] Yoshinobu Fukano: "Investigation of Trapped Charges in Silicon Oxide Layer with an Atomic Force Microscope" Proc.of Int.Conf.on Advanced Microelectronic Devices and Processing(AMDP),Sendai. 365-370 (1994)
[Publications] Yoshinobu Fukano: "Observation of Positively charged Trap Site in Silicon Oxide Layer with an Atomic Force Microscope" Extended Abstracts of the 1994 International Conference on Solid State Devices and Materials,Yokohama. 37-39 (1994)
[Publications] Yoshinobu Fukano: "Local Dielectric Breakdown of Thin Silicon Oxide by Dense Contact Electrification" Extended Abstracts of the 1994 International Conference on Solid State Devices and Materials,Yokohama. 553-555 (1994)
[Publications] Takayuki Uchihashi: "Charge Storage by Contact Electrification on Thin SrTiO_3 Film" Extended Abstracts of the 1994 International Conference on Solid State Devices and Materials,Yokohama. 778-780 (1994)
[Publications] 深野善信: "静電気力顕微鏡による絶縁体表面へのナノスケールの接触帯電" 1994年度第2回薄膜・表面物理分科会研究会『エレクトロニクス材料の薄膜化と表面評価』. 27-31 (1994)
[Publications] 森田清三: "半導体表面のAFM/STM観察" ウルトラクリーンテクノロジー[半導体基盤技術研究会]『プロセス評価分析技術の基礎研究開発』特集号. 6. 203-206 (1994)
[Publications] 森田清三: "走査プローブ顕微鏡(STM/AFM)" 第18回表面科学基礎講座『表面・界面分析の基礎と応用』講演資料. 71-86 (1994)
[Publications] 森田清三: "走査型プローブ顕微鏡の最新成果" (株)工業調査会『電子材料』[特設記事]走査型プローブ顕微鏡の最新技術動向. 34. 95-99 (1995)
[Publications] H.Itoh: "Temperature depending growth and surface structure of low coverage Al phases on Si(100) observed by STM" Surface Science. 302. 295-302 (1994)
[Publications] D.Winau: "Reconstructions and growth of Ag on Si(100)2×1" Surface Science. 303. 139-145 (1994)
[Publications] T.Ichinokawa: "Scanning tunneling microscopic studies of surface reconstructed structures for metal on Si(100) systems" Ultramicroscopy. 54. 116-124 (1994)
[Publications] T.Ichinokawa: "Epitaxial growth and reconstruction for metal/Si(100) system observed by scanning tunneling microscopy" J.Vac.Sci.Technol.B12. 2070-2073 (1994)
[Publications] D.Winau: "Ag on Si(100):Formation of a 2×3 superstructure" J.Vac.Sci.Technol.B12. 2082-2085 (1994)
[Publications] H.Itoh: "Growth mode and surface structures of the Pb/Si(100) system observed by scanning tunneling microscopy" J.Vac.Sci.Technol.B12. 2086-2089 (1994)
[Publications] M.Fukuoka: "A micro canning electron microscope in ultrahigh vacuum for surface microanalysis" Rev.Sci.Instr.65. 2844-2848 (1994)
[Publications] Y.Kawashima: "Surface structures of the Mg/Si(100) system studied by low energy electron diffraction" Surface Science. 319. 165-171 (1994)
[Publications] D.Inoue: "Scanning electron microscope study in UHV for single crystal Al wire formation in grooves on the amorphous SiO_2 surface" Microbeam Analysis. 3. 305-310 (1994)
[Publications] Y.Harada: "Surface spectroscopy with high spatial resolution using metastable atoms" Nature. 372. 657-659 (1994)
[Publications] T.Ikeda: "Surface structures and growth mode of the Cu/Si(100)2×1 surface depending on heat treatment" Surface Science. 320. to be published (1995)
[Publications] Y.Sakai: "Changes of step and domain structures on the Si(111) surface with treatment observed by LEEM" Surface Science. 320(to be published). (1995)
[Publications] Y.Uehara: "Light Emission Mechanism of Si-NOS Tunnel Junctions" Phys.Rev.B. (in press). (1995)
[Publications] K.Ito: "STM light emission spectroscopy of surface microstructures on granular Au films" Surface Science. (in press). (1995)
[Publications] 上原洋一: "表面微細構造からのSTM発光スペクトル" 表面科学. (印刷中). (1995)
[Publications] T.Pangaribuan: "Highly Controllable Fabrication of Fiber Probe for Photon Scanning Tunneling Microscope" Scanning. 16. 362-367 (1994)
[Publications] W.Jhe: "Atomic Waveguide Using Evanescent Waves near Optical Fibers" Jpn.J.Appl.Phys.33. L1680-L1682 (1994)
[Publications] 大津元一: "フォトン走査トンネル顕微鏡" 光学. 12. 733-739 (1994)
[Publications] N.Shinotsuka: "In situ scanning tunneling microscopy of underpotential deposition of Ag on Pt(111)(√7×√7)R19.1°-I" Surface Science. (in press). (1995)
[Publications] N.Shinotsuka: "Atomic Structure of Adsorbed Sulfate on Rh(111) in Sulfuric Acid Solution" Journal of Physical Chemistry. (in press). (1995)
[Publications] 森田清三(分担執筆): "走査型トンネル顕微鏡/原子間力顕微鏡利用技術集成" (株)ティー・アイ・シィー、編者:ナノ表面研究会, 11 (1994)

1994 Fiscal Year Annual Research Report

量子トンネル過程と新手法

Principal Investigator

森田 清三 広島大学, 理学部, 教授 (50091757)

Research Products

[Publications] Takayuki Uchihashi: "Contact Electrification on Thin SrTiO_3 Film by Atomic Force Microscope" Jpn.J.Appl.Phys.33. L374-L376 (1994)

[Publications] Yoshinobu Fukano: "Time Dependent Dielectric Breakdown of Thin Silicon Oxide Using Dense Contact Electrification" Jpn.J.Appl.Phys.33. 3756-3760 (1994)

[Publications] Takeshi Tsuyuguchi: "Contact Electrification on Thin Silicon Oxide in Vacuum" Jpn.J.Appl.Phys.33. L1046-L1048 (1994)

[Publications] Takahiro Okusako: "Dissipation of Contact Electrified Electrons on Dielectric Thin Films with Silicon Substrate" Jpn.J.Appl.Phys.33. L959-L961 (1994)

[Publications] Takayuki Uchihashi: "Heat Treatment and Steaming Effects of Silicon Oxide upon Electron Dissipation on Silicon Oxide Surface" Jpn.J.Appl.Phys.33. L1128-L1130 (1994)

[Publications] Yasuhiro Sugawara: "Atomic force microscopy studies of contact-electrified charges on silicon oxide film" J.Vac.Sci.Technol.B. 12. 1627-1630 (1994)

[Publications] Takayuki Uchihashi: "Charge Storage on Thin SrTiO_3 Film by Contact Electrification" Jpn.J.Appl.Phys.33. 5573-5576 (1994)

[Publications] Yoshinobu Fukano: "Parameter Dependence of Stable State of Densely Contact-Electrified Electrons on Thin Silicon Oxide" Jpn.J.Appl.Phys.33. 6739-6745 (1994)

[Publications] Yoshinobu Fukano: "Investigation of Trapped Charges in Silicon Oxide Layer with an Atomic Force Microscope" Proc.of Int.Conf.on Advanced Microelectronic Devices and Processing(AMDP),Sendai. 365-370 (1994)

[Publications] Yoshinobu Fukano: "Observation of Positively charged Trap Site in Silicon Oxide Layer with an Atomic Force Microscope" Extended Abstracts of the 1994 International Conference on Solid State Devices and Materials,Yokohama. 37-39 (1994)

[Publications] Yoshinobu Fukano: "Local Dielectric Breakdown of Thin Silicon Oxide by Dense Contact Electrification" Extended Abstracts of the 1994 International Conference on Solid State Devices and Materials,Yokohama. 553-555 (1994)

[Publications] Takayuki Uchihashi: "Charge Storage by Contact Electrification on Thin SrTiO_3 Film" Extended Abstracts of the 1994 International Conference on Solid State Devices and Materials,Yokohama. 778-780 (1994)

[Publications] 深野善信: "静電気力顕微鏡による絶縁体表面へのナノスケールの接触帯電" 1994年度第2回薄膜・表面物理分科会研究会『エレクトロニクス材料の薄膜化と表面評価』. 27-31 (1994)

[Publications] 森田清三: "半導体表面のAFM/STM観察" ウルトラクリーンテクノロジー[半導体基盤技術研究会]『プロセス評価分析技術の基礎研究開発』特集号. 6. 203-206 (1994)

[Publications] 森田清三: "走査プローブ顕微鏡(STM/AFM)" 第18回表面科学基礎講座『表面・界面分析の基礎と応用』講演資料. 71-86 (1994)

[Publications] 森田清三: "走査型プローブ顕微鏡の最新成果" (株)工業調査会『電子材料』[特設記事]走査型プローブ顕微鏡の最新技術動向. 34. 95-99 (1995)

[Publications] H.Itoh: "Temperature depending growth and surface structure of low coverage Al phases on Si(100) observed by STM" Surface Science. 302. 295-302 (1994)

[Publications] D.Winau: "Reconstructions and growth of Ag on Si(100)2×1" Surface Science. 303. 139-145 (1994)

[Publications] T.Ichinokawa: "Scanning tunneling microscopic studies of surface reconstructed structures for metal on Si(100) systems" Ultramicroscopy. 54. 116-124 (1994)

[Publications] T.Ichinokawa: "Epitaxial growth and reconstruction for metal/Si(100) system observed by scanning tunneling microscopy" J.Vac.Sci.Technol.B12. 2070-2073 (1994)

[Publications] D.Winau: "Ag on Si(100):Formation of a 2×3 superstructure" J.Vac.Sci.Technol.B12. 2082-2085 (1994)

[Publications] H.Itoh: "Growth mode and surface structures of the Pb/Si(100) system observed by scanning tunneling microscopy" J.Vac.Sci.Technol.B12. 2086-2089 (1994)

[Publications] M.Fukuoka: "A micro canning electron microscope in ultrahigh vacuum for surface microanalysis" Rev.Sci.Instr.65. 2844-2848 (1994)

[Publications] Y.Kawashima: "Surface structures of the Mg/Si(100) system studied by low energy electron diffraction" Surface Science. 319. 165-171 (1994)

[Publications] D.Inoue: "Scanning electron microscope study in UHV for single crystal Al wire formation in grooves on the amorphous SiO_2 surface" Microbeam Analysis. 3. 305-310 (1994)

[Publications] Y.Harada: "Surface spectroscopy with high spatial resolution using metastable atoms" Nature. 372. 657-659 (1994)

[Publications] T.Ikeda: "Surface structures and growth mode of the Cu/Si(100)2×1 surface depending on heat treatment" Surface Science. 320. to be published (1995)

[Publications] Y.Sakai: "Changes of step and domain structures on the Si(111) surface with treatment observed by LEEM" Surface Science. 320(to be published). (1995)

[Publications] Y.Uehara: "Light Emission Mechanism of Si-NOS Tunnel Junctions" Phys.Rev.B. (in press). (1995)

[Publications] K.Ito: "STM light emission spectroscopy of surface microstructures on granular Au films" Surface Science. (in press). (1995)

[Publications] 上原洋一: "表面微細構造からのSTM発光スペクトル" 表面科学. (印刷中). (1995)

[Publications] T.Pangaribuan: "Highly Controllable Fabrication of Fiber Probe for Photon Scanning Tunneling Microscope" Scanning. 16. 362-367 (1994)

[Publications] W.Jhe: "Atomic Waveguide Using Evanescent Waves near Optical Fibers" Jpn.J.Appl.Phys.33. L1680-L1682 (1994)

[Publications] 大津元一: "フォトン走査トンネル顕微鏡" 光学. 12. 733-739 (1994)

[Publications] N.Shinotsuka: "In situ scanning tunneling microscopy of underpotential deposition of Ag on Pt(111)(√7×√7)R19.1°-I" Surface Science. (in press). (1995)

[Publications] N.Shinotsuka: "Atomic Structure of Adsorbed Sulfate on Rh(111) in Sulfuric Acid Solution" Journal of Physical Chemistry. (in press). (1995)

[Publications] 森田清三(分担執筆): "走査型トンネル顕微鏡/原子間力顕微鏡利用技術集成" (株)ティー・アイ・シィー、編者:ナノ表面研究会, 11 (1994)

森田清三広島大学, 理学部, 教授 (50091757)