1994 Fiscal Year Annual Research Report

次世代ドライエッチ用、狭ギャップVHFエッチャの物理とプロセス最適制御

Research Project

Project/Area Number	05452106
Research Institution	Keio University
Principal Investigator	真壁利明慶應義塾大学, 理工学部, 教授 (60095651)
Co-Investigator(Kenkyū-buntansha)	山口由岐夫三菱化成総合研究所, 主任研究員神成文彦慶應義塾大学, 理工学部, 助教授 (40204804) 中村義春慶應義塾大学, 理工学部, 教授 (90051763) 小原実慶應義塾大学, 理工学部, 教授 (90101998)
Keywords	ドライエッチング / プラズマプロセス / 狭ギャップ・RIE / VHFプラズマ / 非平衡プラズマ / モデリング / 微粒子成長 / rfプラズマ
Research Abstract	1.VHFプラズマエッチャについて; 高密度プラズマ、強狭シース幅、ビーム状イオン生成、ラジカル分子の大面積一様生成等の諸点からVHFプラズマの優位点を実証した。具体的には、(a).プロセスで多用されるH_2プラズマの時空間分布をSTROESから診断し、慣用的な13.56MHzの結果と定量的な比較考察を上記の諸量について行なった。VHFでは維持電圧の低下と、同一電圧でネット発生レートに1桁以上の増加が期待できることを実証した(詳細は文献Jpn.J.Appl.Phys.33,4335(1994)参照)。(b).さらに、エッチング、アッシング用のRF-,VHF-O_2プラズマについて同様な診断からVHFエッチャーの優位性を議論した。 2.狭ギャップRIEにおける微粒子効果の観測; (a).RIEリアクター内で生成・成長・消滅する微粒子の時空間挙動を、非反応性Arプラズマ中に混入したCF_2分子のその後の発展から判断するために、Ar^+イオンレーザ光のMie散乱強度とSTROESから両像の相関を観測し、粒径,密度分布とプラズマ構造の時空間相関を把握した。微粒子成長と負イオン化がカギとなることを示した(成果は5.1の文献Plasma Sources Sci.Technol.3,310(1994)に詳説)。 (b).緩和連続モデルを発展させ、微粒子RFプラズマをモデル化し、(a)の外部プラズマ条件のもと、微粒子生成と時空間挙動をシミュレーションから実現し、定量的理解を深めた。(成果は投稿中)

Research Products

(18 results)

All Other

All Publications (18 results)

[Publications] Z.Lj.Petrovic,F.Tochikubo,S.Kakuta,T.Makabe: "Spatiotemporal optical emission spectroscopy of rf discharges in SF_6," J.Appl.Phys.73. 2163-2172 (1993)
[Publications] T.Kitamura,N.Nakano,T.Makabe and Y.Yamaguchi: "A computational investigation of the RF plasma structures and their production efficiency in the frequency range from HF to VHF" Plasma Sources Sci.Technol.2.40-45 (1993)
[Publications] S.Kakuta,Z.Lj.Petrovic,F.Tochikubo,T.Makabe: "Influence of frequency,pressure,and mixture ratio of electronegative gas on electrical characteristics of rf discharges in N_2-SF_6 mixtures," J.Appl.Phys.74,. 4923-4931 (1993)
[Publications] S.Kakuta,T.Makabe F.Tochikubo: "Frequency dependence on the structure of radio frequency glow discharges in Ar," J.Appl.Phys.74. 4907-4914. (1993)
[Publications] T.Kamata,S.Kakuta,Y.Yamaguchi,T.Makabe: "A correlation between particle growth and spatiotemporal RF plasma structure," Plasma Source Sci.Technol.3. 310-313. (1994)
[Publications] R.E.Robson and T.Makabe: "Transport coefficients and velocity distribution function of an ion swarm in an A.C.electric field obtained from the BGK kinetic equation," Aust.J.Phys.47. 305-314. (1994)
[Publications] N.Nakano,Z.Lj.Petrovic,T.Makabe: "The radical transport in the narrow-gap-reactive-ion etcher in SF_6 by the relaxation continuum model," Jpn.J.Appl.Phys.33(4B). 2223-2230. (1994)
[Publications] N.Nakano,N.Shimura,Z.Lj.Petrovic,T.Makabe: "Simulation of rf glow discharge in SF_6 by the relaxation continuum Physical structure and function of the narrow-gap reactive-ion etcher," Phys.Rev.E49. 4455-4465. (1994)
[Publications] K.Kondo,H.Kuroda T.Makabe: "Spatiotemporal characteristics determined by a relaxation continuum model of an inductively coupled plasma," Appl.Phys.Lett.65. 31-33. (1994)
[Publications] K.Maeda and T.Makabe;: "Time dependent RF swarm transport by direct numerical procedure of the Boltzmann ewuation," Jpn.J.App.Phys.33(7b). 4173-4176. (1994)
[Publications] K.Kondo,H.Kuroda T.Makabe;: "A study of the sustaining mechanism in an inductively coupled plasma," Jpn.J.Appl.Phys.33(7B). 4254-4257. (1994)
[Publications] F.Tochikubo,Z.Petrovic,S.Kakuta,N.Nakano,T.Makabe: "Influence of Ar metastable on the discharge structure in Ar and N_2 mixture in RF discharges at 13.56 MHz," Jpn.J.Appl.Phys.33(7B). 4271-4275. (1994)
[Publications] S.Kakuta,T.Kitajima,Y.Okabe and T.Makabe;: "Experimental study of very-high-frequency plasma in H_2 by spatiotemporally resolved optical emission spectroscopy" Jpn.J.Appl.Phys.33(7B). 4335-4339. (1994)
[Publications] K.Maeda and T.Makabe;: "Radiofrewuency electron swarm transport in reactive gases and plasmas," Physica.Scripta. 1(T53). 61-69. (1994)
[Publications] T.Makabe and K.Maeda;: "Radiofrequency electron swarm transport in gases," Prog.Astro.& Aeronautics. 160. 333-343. (1994)
[Publications] N.Nakano and T.Makabe;: "Influence of driving frequency on narrow-gap reactive-ion etching in SF_6," J.Phys.D28. 31 39. (1995)
[Publications] S.Kakuta,T.Kamata,T.Makabe,S.Kobayashi: "Study of surface charges on dielectric electrodes in an rf glow discharge," J.Appl.Phys. 77. 985-991. (1995)
[Publications] M.Shibata,N.Nakano T.Makabe;: "O_2 rf discharge structure in parallel plates reactor at 13.56 MHz for material processing," J.Appl.Phys.(accepted for publication).

1994 Fiscal Year Annual Research Report

次世代ドライエッチ用、狭ギャップVHFエッチャの物理とプロセス最適制御

Principal Investigator

真壁 利明 慶應義塾大学, 理工学部, 教授 (60095651)

Research Products

[Publications] Z.Lj.Petrovic,F.Tochikubo,S.Kakuta,T.Makabe: "Spatiotemporal optical emission spectroscopy of rf discharges in SF_6," J.Appl.Phys.73. 2163-2172 (1993)

[Publications] T.Kitamura,N.Nakano,T.Makabe and Y.Yamaguchi: "A computational investigation of the RF plasma structures and their production efficiency in the frequency range from HF to VHF" Plasma Sources Sci.Technol.2.40-45 (1993)

[Publications] S.Kakuta,Z.Lj.Petrovic,F.Tochikubo,T.Makabe: "Influence of frequency,pressure,and mixture ratio of electronegative gas on electrical characteristics of rf discharges in N_2-SF_6 mixtures," J.Appl.Phys.74,. 4923-4931 (1993)

[Publications] S.Kakuta,T.Makabe F.Tochikubo: "Frequency dependence on the structure of radio frequency glow discharges in Ar," J.Appl.Phys.74. 4907-4914. (1993)

[Publications] T.Kamata,S.Kakuta,Y.Yamaguchi,T.Makabe: "A correlation between particle growth and spatiotemporal RF plasma structure," Plasma Source Sci.Technol.3. 310-313. (1994)

[Publications] R.E.Robson and T.Makabe: "Transport coefficients and velocity distribution function of an ion swarm in an A.C.electric field obtained from the BGK kinetic equation," Aust.J.Phys.47. 305-314. (1994)

[Publications] N.Nakano,Z.Lj.Petrovic,T.Makabe: "The radical transport in the narrow-gap-reactive-ion etcher in SF_6 by the relaxation continuum model," Jpn.J.Appl.Phys.33(4B). 2223-2230. (1994)

[Publications] N.Nakano,N.Shimura,Z.Lj.Petrovic,T.Makabe: "Simulation of rf glow discharge in SF_6 by the relaxation continuum Physical structure and function of the narrow-gap reactive-ion etcher," Phys.Rev.E49. 4455-4465. (1994)

[Publications] K.Kondo,H.Kuroda T.Makabe: "Spatiotemporal characteristics determined by a relaxation continuum model of an inductively coupled plasma," Appl.Phys.Lett.65. 31-33. (1994)

[Publications] K.Maeda and T.Makabe;: "Time dependent RF swarm transport by direct numerical procedure of the Boltzmann ewuation," Jpn.J.App.Phys.33(7b). 4173-4176. (1994)

[Publications] K.Kondo,H.Kuroda T.Makabe;: "A study of the sustaining mechanism in an inductively coupled plasma," Jpn.J.Appl.Phys.33(7B). 4254-4257. (1994)

[Publications] F.Tochikubo,Z.Petrovic,S.Kakuta,N.Nakano,T.Makabe: "Influence of Ar metastable on the discharge structure in Ar and N_2 mixture in RF discharges at 13.56 MHz," Jpn.J.Appl.Phys.33(7B). 4271-4275. (1994)

[Publications] S.Kakuta,T.Kitajima,Y.Okabe and T.Makabe;: "Experimental study of very-high-frequency plasma in H_2 by spatiotemporally resolved optical emission spectroscopy" Jpn.J.Appl.Phys.33(7B). 4335-4339. (1994)

[Publications] K.Maeda and T.Makabe;: "Radiofrewuency electron swarm transport in reactive gases and plasmas," Physica.Scripta. 1(T53). 61-69. (1994)

[Publications] T.Makabe and K.Maeda;: "Radiofrequency electron swarm transport in gases," Prog.Astro.& Aeronautics. 160. 333-343. (1994)

[Publications] N.Nakano and T.Makabe;: "Influence of driving frequency on narrow-gap reactive-ion etching in SF_6," J.Phys.D28. 31 39. (1995)

[Publications] S.Kakuta,T.Kamata,T.Makabe,S.Kobayashi: "Study of surface charges on dielectric electrodes in an rf glow discharge," J.Appl.Phys. 77. 985-991. (1995)

[Publications] M.Shibata,N.Nakano T.Makabe;: "O_2 rf discharge structure in parallel plates reactor at 13.56 MHz for material processing," J.Appl.Phys.(accepted for publication).

真壁利明慶應義塾大学, 理工学部, 教授 (60095651)