1994 Fiscal Year Final Research Report Summary
Fundamental Research for Development of CVD Apparatus with Rotating Subatrate
| Project/Area Number |
05453094
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| Research Category |
Grant-in-Aid for General Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Research Field |
化学工学一般
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| Research Institution | KYOTO UNIVERSITY |
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Principal Investigator |
OGINO Fumimaru Kyoto Univ., Chem.Fng., Professor, 工学部, 教授 (50026069)
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| Co-Investigator(Kenkyū-buntansha) |
KAWAI Kazuho Kyoto Univ., Chem.Fng., Instructor, 工学部, 助手 (00231267)
INAMURO Takaji Kyoto Univ., Chem.Fng., Associate Professor, 工学部, 助教授 (20263113)
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| Project Period (FY) |
1993 – 1994
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| Keywords | CVD Apparatus / Stagnation Flow / Rotating Disk Flow / Boundary Layr |
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| Research Abstract |
In conventional CVD systems material gas is usually supplied along a substrate. In this case the boundary layr thickness changes along flow direction and thus it is difficult to make a uniform thin film. On the other hand it has been found that the boundary layr thickness becomes constant on a rotating disk. This fact can be used for the development of a new system in which we can easily control the uniformity of thin films. In order to develop a new CVD apparatus with a rotating substrate, we investigated experimentally flow and heat transfer on a rotating disk in a cylindrical chamber. From experiments we get the following results :
1. The critical Reynolds number at which transition from laminar to turbulent flow occurs on the disk is about 2 ? B3 10^5.
2. Circulation flows are observed between inlet and disk in the case of small inflow rate.
3. At low rotating speeds the heat transfer between fluid and disk depends on inflow rate. On the contrary, at high rotating speesd the heat transfer depends on its speed.
4. The local heat transfer coefficient becomes constant at the rotational Reynolds number less than 2 ? B3 10^5.
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