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1995 Fiscal Year Final Research Report Summary

Supwe-flat (411) A hetero.

Research Project

Project/Area Number 06402040
Research Category

Grant-in-Aid for General Scientific Research (A)

Allocation TypeSingle-year Grants
Research Field Electronic materials/Electric materials
Research InstitutionOsaka University

Principal Investigator

HIYAMIZU Satoshi  Osaka Univ., Fac.Engin.Sci., Professor, 基礎工学部, 教授 (50201728)

Co-Investigator(Kenkyū-buntansha) SANO Naokatu  Kwansei Gakuin Univ., School of Sci., Professor, 理学部, 教授 (00029555)
LIU Yi  Osaka Univ., Fac.Engin.Sci., Research Associate, 基礎工学部, 助手 (60240412)
SHIMOMURA Satoshi  Osaka Univ., Fac.Engin.Sci., Associate Professor, 基礎工学部, 助教授 (30201560)
Project Period (FY) 1994 – 1995
Keywords411 (A) / GaAs / AlGaAd quantum wells / GaAs / AlAs resonant tunneling diodes / InGaAs / AlGaAs quantum wells / InGaAs / InAlAs quantum wells / Stokes shift / Full-width at half maximum of excitonic absorption / Negative differential resistance
Research Abstract

We have investigated properties of (411) A super-flat interfaces [atomically flat interfaces over a macroscopic area (1 cm x 1 cm)] not only in GaAs/AlGaAsheterostructures on GaAs substrates but also in other III-V systems such as pseudomorphic InGaAs/AlGaAs heterostructures on GaAs substrates and InGaAs/InAlAs heterostructurs lattice-matched to InP substrates grown by molecular beam epitaxy (MBE).
We achieved the (411) A super-flat interfaces in GaAs/Al_xGa_<1-x>As quantum wells (QWs) with high Al content (x=0.3-1) by optimizing MBE growth conditions. Furthermore, GaAs/AlGaAs double barrier resonant tunneling (DBRT) structures were grown on (411) A GaAs substrate as an application of (411) A super-flat interfaces to quantum effect devices, and we obtained excellent device performance of much improved peak-to-valley current ratio compared with a conventional (100) GaAs/AlGaAs DBRT structure. Next, we realized the (411) A super-flat interfaces in pseudomorphic In_xGa_<1-x>As/Al_<0.3>Ga_<0.7>As QWs with In content of x=0-0.08 grown on (411) GaAs substrates. In the study of (411) A InGaAs/InAlAs QW structures lattice-matched to InP substrates, we obtained high crystal quality of In_<O.53>Ga_<0.47>As films grown on (411) A InP substrates, but we could not observeexcellent optical properties of (411) A In_<0.53>Ga_<0.47>As/In_<0.52>Al_<0.48>As QWs with the super-flat interfaces because of rather low crystal quality of In_<0.52>Al_<0.48>As barriers. By further optimizing MBE growth conditions for (411) A InGaAs/In AlAs QWs, we expect to obtain the (411) A super-flat interfaces in the InGaAs/InAlAs system lattice-matched InP substrates.
In summary, we studied properties of the (411) A super-flat interfaces in III-V semiconductor heterostructures and showed their high potential for applications to quantum effect devices.

  • Research Products

    (12 results)

All Other

All Publications (12 results)

  • [Publications] S.Shimomura: "Extremely flat interfaces in GaAs/AlGaAs quantum wells with high Al content (0.7) grown on (411)A GaAs substrates by molecular beam epitaxy" J.Cryst.Growth. 150. 409-414 (1995)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Tsuda: "Characterization of GaAs/AlAs interfacial atomic step structures on a (411)A-oriented substrate by transmission electron microscope" J.Cryst.Growth. 150. 415-420 (1995)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Kitada: "Preferential migration of in dium atoms on the (411)A plane in In GaAs grown on GaAs channeled substrates by molecular beam epitaxy" J.Cryst.Growth. 150. 487-491 (1995)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] D.Marx: "Low temperature etching of GaAs substrates and improved morphology of GaAs grown by metalorganic molecular beam epitaxy" J.Cryst.Growth. 150. 551-556 (1995)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] D.Marx: "Metalorganic molecular beam epitaxy of GaSb on patterned GaSb substrates using triethylgallium and Sb_4" J.Cryst.Growth. 150. 874-878 (1995)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Shimomura: "Much improved interfaces in GaAs/AlAs quantum wells grown on (411)A GaAs sub-strates by molecular-beam epitaxy" J.Vac.Sci.& Technol.B13. 417-421 (1995)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Shimomura: "Extremely flat interfaces in GaAs/AlGaAs quantum wells with high Al content (0.7) grown on GaAs (411) A substrates by molecular beam epitaxy" J.Cryst.Growth. 150. 409-414 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.Tsuda: "Characterization of GaAs/AlAs interfacial atomic step sturctires on a (411) Aoriented substrate by transimssion electron microscope" J.Cryst.Growth. 150. 415-420 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Kitada: "Preferential migration of indium atoms on the (411) A plane in InGaAs grown on GaAs channeled substrates by molecular beam epitaxy" J.Cryst.Growth. 150. 487-491 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] D.Marx: "Low temperature etching of GaAs substrates and improved morphology of GaAs grown by metalorganic molecular beam epitaxy using trisdimethy laminoarsenic and triethylgallium" J.Cryst.Growth. 150. 551-556 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] D.Marx, Metalorganic molecular beam epitaxy of GaSb on patterned GaSb substrates using triethylgallium and Sb_4: J.Cryst.Growth. 150. 874-878 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S.Shimomura: "GaAs/As_<0.3>Ga_<0.7>As resonant tunneling diodes with atomically flat intefaces grown on (411) A GaAs substrates by MBE" Solid State Electron.40. 417-421 (1996)

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 1999-03-09  

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