1998 Fiscal Year Annual Research Report

高分解能電子顕微鏡像コントラストと回折強度の精密測定による不規則系物質の解析

Research Project

Project/Area Number	08404019
Research Institution	Kyoto Institute of Technology
Principal Investigator	塩尻詢京都工芸繊維大学, 工芸学部, 教授 (10027774)
Co-Investigator(Kenkyū-buntansha)	西尾弘司京都工芸繊維大学, 工芸学部, 助手 (10252545) 一色俊之京都工芸繊維大学, 工芸学部, 助教授 (90193458) 西城浩志京都工芸繊維大学, 工芸学部, 助教授 (80111996) 遠藤久満京都工芸繊維大学, 工芸学部, 助教授 (20027907) 熊尾章宏京都工芸繊維大学, 工芸学部, 教授 (00027806)
Keywords	高分解能電子顕微鏡法 / 電子線回折 / 不規則系 / アモルファス膜 / 半導体多層膜 / セラミックス / 感光色素 / Fe-Al合金
Research Abstract	アモルファスとよばれる構造不規則系,あるいは合金,金属酸化物等に見られる置換不規則系は,その構造に起因する特異な物性を示し,機能デバイス設計開発の新しい源泉となる.結晶構造や欠陥構造の解析が結晶物性の理解に不可欠であるように,不規則系構造の解析がその物性解明の基礎となる.また,結晶中に生じる不規則系がその材料の特性に大きな影響を与える.本研究の目的は高分解能電子顕微鏡(HRTEM)像のコントラスト及び電子回折像(ED)の強度を精密測定し,不規則系物質の結晶学的構造を探求することである.以下に本年度までの主たる成果を示す. 1. BaSn_<2-x>Ti_xFe_4O_<11>フエライト,BiFeO_3,CaMn_7O_<12>,Ba_3Ca_<1+x>Nb_<2-x>O_<9-δ>ペロブスカイト不規則系の精密結晶構造解析を中性子線回折,シンクロトロン放射X線回折で行い,結果をHRTEMと対比して考察した. 2. Fe_<1-x>Al_x(x=0.35-0.42)合金粉末微粒子のHRTEM断面観察を行い,逆位相境界をもつナノスケールのモザイク構造を発見し,粒子の冷間加工による磁化と焼鈍による消磁の機構を明らかにした. 3. SrTiO_3系半導体セラミックス中の酸素空孔と添加物原子の分布,DRAM中のO,N,P原子の分布,GaAs/AlGaAs多層膜の構造と析出相,AgBr表面上の感光色素凝集分子の分布態様など,不規則系に関係した構造を蛍光走査電子顕微鏡観察,エネルギー分散型X線分光,エネルギー損失電子分光を補完的に使用してHRTEM,EDおよび高分解能高散乱角電子暗視野像で明らかにした. 4. Se,Sb,Cなどの非晶質膜について,エネルギーフィルターED強度の精密測定を行い構造を解析した.また,MgO楔型結晶の等厚干渉縞から電子線回折強度の精密測定を行った.

Research Products

(45 results)

All Other

All Publications (45 results)

[Publications] J.Katcki: "Transmission Electron Microscopy Investigations of FeAs Precipitates in GaAs/AlGaAs Heterostructures" Institute of Physics Conference Series,Microscopy of Semiconducting Materials,Oxford,1997. ・157. 295-298 (1998)
[Publications] W.F.Zhao: "The Influence of Structures of the Sensitizing Dyes on Their Adsorption and Size Distribution of J-Aggregate on AgBr Grain by ACFEM" J.Imaging Science and Technology. 42・. 144-147 (1998)
[Publications] H.Saijo: "Uneven Distribution of Cyanine Dye J-Aggregate Quantitative Adsorbed on AgBr Microcrystals Grown in Gelatin" J.Imaging Science and Technology. 42・. 197-201 (1998)
[Publications] M.Shiojiri: "Investigations of Materials in Random-System by Quantitative High-Resolution Transmission Electron Microscopy and Electron Diffraction" Electron Technology. 31・. 189-192 (1998)
[Publications] Y.Kobayashi: "Cathodoluminescence Scanning Electron Microscopy Observations of(SrBaCa)TiO_3 Ceramic Varistors" J.Electron Microscopy. 47・. 29-37 (1998)
[Publications] R.Przenioslo: "Investigation of the Crystal and Magnetic Structures of Polycrystalline Materials by Neutron and Synchrotron Radiation Diffraction" Electron Technology.31・. 147-151 (1998)
[Publications] M.Shiojiri: "High-Resolution Transmission Electron Microscopy and Cathodoluminescence Scanning Electron Microscopy Observations of SrTiO3-Based Varistors" Electron Technology. 31・. 170-175 (1998)
[Publications] H.Saijo: "An Application of Cathodoluminescence Microscopy on Morphology of Photosensitive Dyes on AgBr Crystals" Electron Technology. 31・. 176-182 (1998)
[Publications] K.Kawasaki: "New Specimen Preparation Methods for Materials Transmission Electron Microscopy,Using Ion-Milling" Electron Technology. 31・. 183-188 (1998)
[Publications] T.Isshiki: "In-situ Observations of Solid-Solid Reaction -Decomposition of Barium Titanyl Oxylate and Formation of Barium Titanate-" Electron Technology. 31・. 202-207 (1998)
[Publications] K.Tanabe: "Epitaxial Growth of Merocyanine Dye Molecules on AgBr Surfaces" J.Imaging Science and Technology. 42・. 434-439 (1998)
[Publications] H.Saijo: "Morphology and Structure of Photosensitive Dye J-Aggregates Adsorbed on AgBr Microscrystals Grown in Gelatin" Microscopy Research and Technology. 42・. 123-138 (1998)
[Publications] M.Kawasaki: "EDS Elemental Mapping of a DRAM with an FE-TEM" J.Electron Microscopy. 47・. 335-343 (1998)
[Publications] M.Shiojiri: "High-Resolution Electron Microscopy and Cathodoluminescence Scanning Electron Microscopy of SrTiO3-Based Ceramics,Elucidating Their Varistor Property" Proceedings of 15th Physical Metallurgy and Materials Science Conference,Krakow-Krynica. 779-784 (1998)
[Publications] M.Fujii: "Magnetization and Structure of Fe-Al Powders" Proceedings of 15th Physical Metallurgy and Materials Science Conference,Krakow-Krynica. 860-863 (1998)
[Publications] J.Katcki: "Investigation of III-V semiconductor Heterostructures" Proceedings of 15th Physical Metallurgy and Materials Science Conference,Krakow-Krynica. 791-796 (1998)
[Publications] J.Katcki: "Transmission Electron Microscopy Analysis of FeAs Precipitates Formed in GaAs/AlGaAs Heterostructure" J.Electron Microscopy. 47・. 575-580 (1998)
[Publications] M.Shiojiri: "Microscopy of SrTiO_3-based Ceramics Varistors and Capacitors" Electron Microscopy 1998,[Proceedings of the 14th International Congress on Electron Microscopy,Cancun(Mexico). 2・. 683-684 (1998)
[Publications] M.Fujii: "Structure Change of Fe-Al Powders by Cold-milling" Electron Microscopy 1998,[Proceedings of the 14th International Congress on Electron Microscopy,Cancun(Mexico). 2・. 149-150 (1998)
[Publications] H.Saijo: "Low Energy High-Resolution Scanning Electron Microscopy and Cathodoluminescence Microscopy on the Morphology of Organic Dye-J-Aggregates Grown on AgBr Microcrystals" Electron Microscopy 1998,[Proceedings of the 14th International Congress on Electron Microscopy,Cancun(Mexico). 1・. 485-486 (1998)
[Publications] H.Saijo: "Cathodoluminescence Microscopy for Materials Science" Electron Microscopy 1998,[Proceedings of the 14th International Congress on Electron Microscopy,Cancun(Mexico). 1・. 433-436 (1998)
[Publications] T.Isshiki: "Oxidation of Magnesium Fine Particles Studied by In-situ High-Resolution Transmission Electron Microscopy" Electron Microscopy 1998,[Proceedings of the 14th International Congress on Electron Microscopy,Cancun(Mexico). 2・. 323-324 (1998)
[Publications] M.Kawasaki: "Compositional Characterization of an O-N-O Layer in a DRAM using EELS and HAADF STEM" Electron Microscopy 1998,[Proceedings of the 14th International Congress on Electron Microscopy,Cancun(Mexico). 3・. 645-646 (1998)
[Publications] M.Kawasaki: "Compositional Characterization of an O-N-O Layer in a DRAM using FE-TEM and EF-TEM" Electron Microscopy 1998,[Proceedings of the 14th International Congress on Electron Microscopy,Cancun(Mexico). 1・. 237-238 (1998)
[Publications] T.Isshiki: "HRTEM Observation of Ceramics with a New Heating Stage Coupled to Radiation Thermometer" Electron Microscopy 1998,[Proceedings of the 14th International Congress on Electron Microscopy,Cancun(Mexico). 3・. 521-522 (1998)
[Publications] M.Kawasaki: "Compositional Characterization of an O-N-O Layer in a DRAM using FE-TEM and EDS Elemental Mapping" Proceedings of Microscopy and Microanalysis 98,Atlanta. 146-147 (1998)
[Publications] M.Kawasaki: "Compositional Characterization of an O-N-O Layer in a DRAM using FE-TEM and Energy Filtered Elemental Mapping" Proceedings of Microscopy and Microanalysis 98,Atlanta. 148-149 (1998)
[Publications] M.Kawasaki: "Compositional Characterization of an O-N-O Layer in a DRAM using FE-(S)TEM and EELS" Proceedings of Microscopy and Microanalysis 98,Atlanta. 150-151 (1998)
[Publications] M.Kawasaki: "EELS Elemental Mapping of a DRAM with an FE-TEM" J.Electron Microscopy. 47・. 477-488 (1998)
[Publications] A.Hitomi: "Transmission Electron Microscopy Study of Semiconducting SrTiO3 Ceramic Condenser" J.Electron Microscopy. 47・. 603-610 (1998)
[Publications] M.Shiojiri: "Epitaxial Growth of Merocyanine Dye Molecules on Vacuum-deposited AgBr Surfaces" Proceedings of International Congress on Imaging Science(ICPS'98),Antwerp. 1・. 198-201 (1998)
[Publications] H.Saijo: "Morphology of J-Aggregates Grown on AgBr Emulsion Crystals,-Combined Analysis with Cathodoluminescence Microscopy,Low-Energy SEM and AFM-" Notes of International Symposium of Advanced Characterisation Techniques for Nanostructured Materials,International Congress on Imaging Science(ICPS'98),Antwerp. 20-25 (1998)
[Publications] K.Nishio: "Intensity Measurement of Equal Thickness fringes of MgO Crystals with an Imaging Plate" Proceedings of International Symposium on Hybrid Analyses for Functional Nanostructure,Kyoto. 215-216 (1998)
[Publications] K.Nishio: "Investigation of Amorphous Structure of Selenium,Antimony,and Carbon Using an Imaging Plate and an Energy Filtering TEM" Proceedings of International Symposium on Hybrid Analyses for Functional Nanostructure,Kyoto. 217-218 (1998)
[Publications] K.Nishio: "CL and HRTEM Investigation of Zn(Mg)Se Crystals Grown by High-pressure Bridgman Method" Proceedings of International Symposium on Hybrid Analyses for Functional Nanostructure,Kyoto. 219-220 (1998)
[Publications] I.M.Sosnowska: "Exiting Oxides: Neutron and Synchrotron X-ray Diffraction Studies" Proceedings of International Symposium on Hybrid Analyses for Functional Nanostructure,Kyoto. 81-84 (1998)
[Publications] M.Kawasaki: "Electron Microscopy Analysis of SrTiO3-based Ceramics" Proceedings of International Symposium on Hybrid Analyses for Functional Nanostructure,Kyoto. 85-88 (1998)
[Publications] J.Katcki: "TEM Study of the Formation of Defects in III-V Heterostructures" Proceedings of International Symposium on Hybrid Analyses for Functional Nanostructure,Kyoto. 133-136 (1998)
[Publications] T.Oikawa: "Measurement of the Beam-broadening in Thin Specimens for A TEM" Proceedings of International Symposium on Hybrid Analyses for Functional Nanostructure,Kyoto. 225-226 (1998)
[Publications] H.Endoh: "Properties of Autoregressive Spectral Analysis and Wavelet Analysis for Exact Estimation of C.T.F.on High Resolution Electron Microscopy" Proceedings of International Symposium on Hybrid Analyses for Functional Nanostructure,Kyoto. 37-40 (1998)
[Publications] T.Nishioki: "Identification of Atoms Forming Crystal Edges as Revealed by High Resolution Electron Microscopy" Proceedings of International Symposium on Hybrid Analyses for Functional Nanostructure,Kyoto. 229-230 (1998)
[Publications] H.Saijo: "Terrace Formation of Cyanine Dye J-Aggregates on AgBr Microscrystals Grown in Gelatin" J.Imaging Science and Technology. 43・. 89-93 (1999)
[Publications] M.Fujii: "Ferromagnetism and structural distortions induced in atomised Fe-Al(35-42 at.%Al)powder particles by cold milling" Philosophical Magazine. (印刷中). (1999)
[Publications] M.Kawasaki: "A new specimen preparation method for cross-section TEM using diamond powders" J.Electron Microsc. 48(印刷中). (1999)
[Publications] M.Shiojiri: "Studies of Thin Film Physics in the Laboratory of Electron Optics and Electron Microscopy" Memoirs of the Faculty of Engineering and Design,Kyoto Institute of Technology. 47(印刷中). (1999)

1998 Fiscal Year Annual Research Report

高分解能電子顕微鏡像コントラストと回折強度の精密測定による不規則系物質の解析

Principal Investigator

塩尻 詢 京都工芸繊維大学, 工芸学部, 教授 (10027774)

Research Products

[Publications] J.Katcki: "Transmission Electron Microscopy Investigations of FeAs Precipitates in GaAs/AlGaAs Heterostructures" Institute of Physics Conference Series,Microscopy of Semiconducting Materials,Oxford,1997. ・157. 295-298 (1998)

[Publications] W.F.Zhao: "The Influence of Structures of the Sensitizing Dyes on Their Adsorption and Size Distribution of J-Aggregate on AgBr Grain by ACFEM" J.Imaging Science and Technology. 42・. 144-147 (1998)

[Publications] H.Saijo: "Uneven Distribution of Cyanine Dye J-Aggregate Quantitative Adsorbed on AgBr Microcrystals Grown in Gelatin" J.Imaging Science and Technology. 42・. 197-201 (1998)

[Publications] M.Shiojiri: "Investigations of Materials in Random-System by Quantitative High-Resolution Transmission Electron Microscopy and Electron Diffraction" Electron Technology. 31・. 189-192 (1998)

[Publications] Y.Kobayashi: "Cathodoluminescence Scanning Electron Microscopy Observations of(SrBaCa)TiO_3 Ceramic Varistors" J.Electron Microscopy. 47・. 29-37 (1998)

[Publications] R.Przenioslo: "Investigation of the Crystal and Magnetic Structures of Polycrystalline Materials by Neutron and Synchrotron Radiation Diffraction" Electron Technology.31・. 147-151 (1998)

[Publications] M.Shiojiri: "High-Resolution Transmission Electron Microscopy and Cathodoluminescence Scanning Electron Microscopy Observations of SrTiO3-Based Varistors" Electron Technology. 31・. 170-175 (1998)

[Publications] H.Saijo: "An Application of Cathodoluminescence Microscopy on Morphology of Photosensitive Dyes on AgBr Crystals" Electron Technology. 31・. 176-182 (1998)

[Publications] K.Kawasaki: "New Specimen Preparation Methods for Materials Transmission Electron Microscopy,Using Ion-Milling" Electron Technology. 31・. 183-188 (1998)

[Publications] T.Isshiki: "In-situ Observations of Solid-Solid Reaction -Decomposition of Barium Titanyl Oxylate and Formation of Barium Titanate-" Electron Technology. 31・. 202-207 (1998)

[Publications] K.Tanabe: "Epitaxial Growth of Merocyanine Dye Molecules on AgBr Surfaces" J.Imaging Science and Technology. 42・. 434-439 (1998)

[Publications] H.Saijo: "Morphology and Structure of Photosensitive Dye J-Aggregates Adsorbed on AgBr Microscrystals Grown in Gelatin" Microscopy Research and Technology. 42・. 123-138 (1998)

[Publications] M.Kawasaki: "EDS Elemental Mapping of a DRAM with an FE-TEM" J.Electron Microscopy. 47・. 335-343 (1998)

[Publications] M.Shiojiri: "High-Resolution Electron Microscopy and Cathodoluminescence Scanning Electron Microscopy of SrTiO3-Based Ceramics,Elucidating Their Varistor Property" Proceedings of 15th Physical Metallurgy and Materials Science Conference,Krakow-Krynica. 779-784 (1998)

[Publications] M.Fujii: "Magnetization and Structure of Fe-Al Powders" Proceedings of 15th Physical Metallurgy and Materials Science Conference,Krakow-Krynica. 860-863 (1998)

[Publications] J.Katcki: "Investigation of III-V semiconductor Heterostructures" Proceedings of 15th Physical Metallurgy and Materials Science Conference,Krakow-Krynica. 791-796 (1998)

[Publications] J.Katcki: "Transmission Electron Microscopy Analysis of FeAs Precipitates Formed in GaAs/AlGaAs Heterostructure" J.Electron Microscopy. 47・. 575-580 (1998)

[Publications] M.Shiojiri: "Microscopy of SrTiO_3-based Ceramics Varistors and Capacitors" Electron Microscopy 1998,[Proceedings of the 14th International Congress on Electron Microscopy,Cancun(Mexico). 2・. 683-684 (1998)

[Publications] M.Fujii: "Structure Change of Fe-Al Powders by Cold-milling" Electron Microscopy 1998,[Proceedings of the 14th International Congress on Electron Microscopy,Cancun(Mexico). 2・. 149-150 (1998)

[Publications] H.Saijo: "Cathodoluminescence Microscopy for Materials Science" Electron Microscopy 1998,[Proceedings of the 14th International Congress on Electron Microscopy,Cancun(Mexico). 1・. 433-436 (1998)

[Publications] T.Isshiki: "Oxidation of Magnesium Fine Particles Studied by In-situ High-Resolution Transmission Electron Microscopy" Electron Microscopy 1998,[Proceedings of the 14th International Congress on Electron Microscopy,Cancun(Mexico). 2・. 323-324 (1998)

[Publications] M.Kawasaki: "Compositional Characterization of an O-N-O Layer in a DRAM using EELS and HAADF STEM" Electron Microscopy 1998,[Proceedings of the 14th International Congress on Electron Microscopy,Cancun(Mexico). 3・. 645-646 (1998)

[Publications] M.Kawasaki: "Compositional Characterization of an O-N-O Layer in a DRAM using FE-TEM and EF-TEM" Electron Microscopy 1998,[Proceedings of the 14th International Congress on Electron Microscopy,Cancun(Mexico). 1・. 237-238 (1998)

[Publications] T.Isshiki: "HRTEM Observation of Ceramics with a New Heating Stage Coupled to Radiation Thermometer" Electron Microscopy 1998,[Proceedings of the 14th International Congress on Electron Microscopy,Cancun(Mexico). 3・. 521-522 (1998)

[Publications] M.Kawasaki: "Compositional Characterization of an O-N-O Layer in a DRAM using FE-TEM and EDS Elemental Mapping" Proceedings of Microscopy and Microanalysis 98,Atlanta. 146-147 (1998)

[Publications] M.Kawasaki: "Compositional Characterization of an O-N-O Layer in a DRAM using FE-TEM and Energy Filtered Elemental Mapping" Proceedings of Microscopy and Microanalysis 98,Atlanta. 148-149 (1998)

[Publications] M.Kawasaki: "Compositional Characterization of an O-N-O Layer in a DRAM using FE-(S)TEM and EELS" Proceedings of Microscopy and Microanalysis 98,Atlanta. 150-151 (1998)

[Publications] M.Kawasaki: "EELS Elemental Mapping of a DRAM with an FE-TEM" J.Electron Microscopy. 47・. 477-488 (1998)

[Publications] A.Hitomi: "Transmission Electron Microscopy Study of Semiconducting SrTiO3 Ceramic Condenser" J.Electron Microscopy. 47・. 603-610 (1998)

[Publications] M.Shiojiri: "Epitaxial Growth of Merocyanine Dye Molecules on Vacuum-deposited AgBr Surfaces" Proceedings of International Congress on Imaging Science(ICPS'98),Antwerp. 1・. 198-201 (1998)

[Publications] K.Nishio: "Intensity Measurement of Equal Thickness fringes of MgO Crystals with an Imaging Plate" Proceedings of International Symposium on Hybrid Analyses for Functional Nanostructure,Kyoto. 215-216 (1998)

[Publications] K.Nishio: "Investigation of Amorphous Structure of Selenium,Antimony,and Carbon Using an Imaging Plate and an Energy Filtering TEM" Proceedings of International Symposium on Hybrid Analyses for Functional Nanostructure,Kyoto. 217-218 (1998)

[Publications] K.Nishio: "CL and HRTEM Investigation of Zn(Mg)Se Crystals Grown by High-pressure Bridgman Method" Proceedings of International Symposium on Hybrid Analyses for Functional Nanostructure,Kyoto. 219-220 (1998)

[Publications] I.M.Sosnowska: "Exiting Oxides: Neutron and Synchrotron X-ray Diffraction Studies" Proceedings of International Symposium on Hybrid Analyses for Functional Nanostructure,Kyoto. 81-84 (1998)

[Publications] M.Kawasaki: "Electron Microscopy Analysis of SrTiO3-based Ceramics" Proceedings of International Symposium on Hybrid Analyses for Functional Nanostructure,Kyoto. 85-88 (1998)

[Publications] J.Katcki: "TEM Study of the Formation of Defects in III-V Heterostructures" Proceedings of International Symposium on Hybrid Analyses for Functional Nanostructure,Kyoto. 133-136 (1998)

[Publications] T.Oikawa: "Measurement of the Beam-broadening in Thin Specimens for A TEM" Proceedings of International Symposium on Hybrid Analyses for Functional Nanostructure,Kyoto. 225-226 (1998)

[Publications] H.Endoh: "Properties of Autoregressive Spectral Analysis and Wavelet Analysis for Exact Estimation of C.T.F.on High Resolution Electron Microscopy" Proceedings of International Symposium on Hybrid Analyses for Functional Nanostructure,Kyoto. 37-40 (1998)

[Publications] T.Nishioki: "Identification of Atoms Forming Crystal Edges as Revealed by High Resolution Electron Microscopy" Proceedings of International Symposium on Hybrid Analyses for Functional Nanostructure,Kyoto. 229-230 (1998)

[Publications] H.Saijo: "Terrace Formation of Cyanine Dye J-Aggregates on AgBr Microscrystals Grown in Gelatin" J.Imaging Science and Technology. 43・. 89-93 (1999)

[Publications] M.Fujii: "Ferromagnetism and structural distortions induced in atomised Fe-Al(35-42 at.%Al)powder particles by cold milling" Philosophical Magazine. (印刷中). (1999)

[Publications] M.Kawasaki: "A new specimen preparation method for cross-section TEM using diamond powders" J.Electron Microsc. 48(印刷中). (1999)

[Publications] M.Shiojiri: "Studies of Thin Film Physics in the Laboratory of Electron Optics and Electron Microscopy" Memoirs of the Faculty of Engineering and Design,Kyoto Institute of Technology. 47(印刷中). (1999)

塩尻詢京都工芸繊維大学, 工芸学部, 教授 (10027774)