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1998 Fiscal Year Final Research Report Summary

Development of Low-Fregnency Induction Thermal Plasma for Cluster Synthesis

Research Project

Project/Area Number 08555067
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section展開研究
Research Field 電力工学・電気機器工学
Research InstitutionKanazawa University

Principal Investigator

SAKUTA Tadahiro  KANAZAWA UNIVERSITY DEPARTMENT OF ELECTRICAL AND COMPUTER ENGINEERING PROFESSOR, 工学部, 教授 (80135318)

Co-Investigator(Kenkyū-buntansha) MIYAMOTO Masahiro  FUJI ELECTRIC CORPORATE RESEARCH AND DEVELOPMENT,LTD POWER ENGINEERING DEVELOPME, 課長
TAKIKAWA Horoshi  TOYOHASHI UNIVERSITY OF TECHNOLOGY DEPARTMENT OF ELECTRICAL AND ELECTRONIC ENGIN, 工学部, 助教授 (90226952)
TANAKA Yasunori  KANAZAWA UNIVERSITY DEPARTMENT OF ELECTRICAL AND COMPUTER ENGINEERING RESEARCH A, 工学部, 助手 (90303263)
Project Period (FY) 1996 – 1998
KeywordsWide Area Plasma / Plasma Processing / Induction Plasma / High Rate Processing / Inverter / Cluster / Fullerene
Research Abstract

In the third and final year of the project, 1998, a wide area induction plasma was successively generated by using MOSFET inverter power supply with a low frequency of 450 kHz and a power of 50 kW.The reaction area of the plasma is as wide as 150-mm diameter and 150-mm length, which enable us the high speed processing or synthesis of materials. C_<60> fullurene synthesis was carried out by using Ar, He and CO_2 induction thermal plasmas. Remarkable results are as follows.
1) The transistor inverter supply was found to be useful to establish the inductively coupled plasma with a frequency of 450 kHz. At a power level of 30kW, several kinds of plasma can be generated in Ar, He and CO2 gas circumstance. The CO2 plasma was found to have relatively high temperature around 10,000 K compared to Ar and He plasma.
2) These induction thermal plasmas were sufficiently stable for the injection of cold carbon powders up to a rate of 10 g/min, which is high enough quantity to produce the C_<60> cluster with a high rate.
3) Among the experiments carried out under several conditions with respects to the gas sort, pressure and the power of plasma, Ar/He noble gas plasma showed the most highest C_<60> synthesis rate, while the dissociative CO_2 gas plasma showed no synthesis of C_<60>. The results indicate that a strong quenching effect of the radical C atom and C_2 molecule is essential for the synthesis of such high order fullurene materials.

  • Research Products

    (10 results)

All Other

All Publications (10 results)

  • [Publications] 作田,田中,香月,石垣: "パルス変調された高周波誘導熱プラズマの発生" 日本金属学会誌. 63-1. 2-8 (1999)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.T〓ika,M.Takahashi,K.C.Paul,T.Sakuta: "Transport Thermariynamic Properties of N_2/O_2 Matures it Different Admixture Ratio" International Workshop on High Voltage Engineering IWHV99. I. 103-108 (1999)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Sakata,K.C.Paul,S.Hata〓a,M.Takahashi,Y.Tanaka: "Spectroscopic.Meascuremants of SF_6 and N_2 Induction Plasmas at Atmospheric Pressure" International Workshop on High Voltage Engineering IWHV99. I. 109-114 (1999)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 田中,作田: "化学非平衡モデルによる誘導SF_6熱プラズマの過波解約" 電気学会放電研究会 資料. 1. 29-34 (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] K.C.Paul,T.Takoshima,T.Sakuta: "Coppey Vapor Effect on RF Inductively Coupled SF_6 Plasmas" IEEE Trans, on Plasma Sci. 26-3. 1000-1009 (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Sakuta, Y.tanaka, M.Katsuki, T.Ishigaki: "Generation of inductively coupled thermal plasma with pulse modulated mode." J.Japan Inst.Metals.Vol.63, No.1. 2-8 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.Tanaka, M.Takahashi, K.C.Paul: "T,Sakuta, Transport and Thermodynamic Properties of N2/O2 Mixtures at Different Admixture Ratio" International Workshop on High Voltage Engineering IWHV99. Vol.I. 103-108 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Sakuta, K.C.Paul, S.Hatazawa, M.Takahashi, Y.Tanaka: "Spectroscopic Measurements of SF6 and N2 Induction Plasmas at Atmospheric Pressure" International Workshop on High Voltage Engineering IWHV99. Vol.I. 103-108 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.Tanaka and T.Sakuta: "Numerical Analysis on Transient Behavior of Induction SF6 Thermal Plasma by Non-Chemical Equilibrium Model" IEEJ Workshop. ED-98-232. 29-34 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K.C.Paul, T.Takashima, T.Sakuta: "Copper Vapor Effect on RF Inductively Coulped SF6 Plasmas" IEEE Trans. On Plasma Sci.Vol.26, No.3. 1000-1009 (1998)

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 1999-12-08  

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