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2003 Fiscal Year Final Research Report Summary

MATERIAL SCIENCE AND APPLICATION OF ALLOY NITRIC SEMICONDUCTORS

Research Project

Project/Area Number 11102005
Research Category

Grant-in-Aid for Specially Promoted Research

Allocation TypeSingle-year Grants
Review Section Physics
Research InstitutionTOKUSHIMA UNIVERSITY

Principal Investigator

SAKAI Shiro  TOKUSHIMA UNIVERSITY, FACULTY OF ENGINEERING, PROFESSOR, 工学部, 教授 (20135411)

Co-Investigator(Kenkyū-buntansha) NISHINO Katsushi  TOKUSHIMA UNIVERSITY, FACULTY OF ENGINEERING, LECTURER, 工学部, 講師 (70284312)
NAOI Yoshiki  TOKUSHIMA UNIVERSITY, FACULTY OF ENGINEERING, ASSOCIATE PROFESSOR, 工学部, 助教授 (90253228)
Project Period (FY) 1999 – 2003
KeywordsInNAs / Nitride / Narrow gap semiconductor / MOCVD / Plasma / Wide gap semiconductor / GaN / Material properties
Research Abstract

Among III-V group, Nitrogen that is included in the second rank in the periodic table and the rest of the group V elements can produce special features. Purposes of this research are the growth of III-V-nitride and the method of utilizing this structure.
A GaNP grown on sapphire is a good example, and it is the method that utilizes this porosity. The dislocation dies when they meet the other one and the total dislocation is the sum of the alive. The dislocation in the grown films can be minimized and can be as low as 10^8 cm^2. Using this approach, AlGaInN LEDs with 3 % and 6 % external efficacy are obtained for 365 nm and 370 nm wavelengths, respectively.
If we consider the same approach to AlN, a bad thing can happen. The AlN is three dimensional growth modes and it cannot ridge grow. AlN can be grown under AlN/Al. By doing this, the 340 nm LEDs is developed.
As long wavelength application, we considered In(As, Sb)N. A temperature used for the growth is not so good for NH_3, we used di-methly-hydrazine. As a precaution, we grow cubic GaN and InN on GaAs. InNAs was found to shrinks with its bang gap energy with the N elements by FTIR. InNSb is more difficult due to the difference in Sb and N.

  • Research Products

    (42 results)

All Other

All Publications (42 results)

  • [Publications] Kazunori Aoyama: "A Novel Method of Building Compositional Non-Uniformity in an InGaN Layer Grown on Sapphire Substrate by Metalorganic Chemical Vapor Deposition"Jpn.J.Appl.Phys. Part2. 42・3B. L270-L272 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Hiroyuki Naoi: "Growth of InAs on GaAs(100) by low-pressure metalorganic chemical vapor deposition employing in situ generated arsine radicals"Journal of Crystal Growth. 250. 290-297 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Jin-Ping AO: "AlGaN/GaN High Electron Mobility Transistor with Thin Buffer Layers"Jpn.J.Appl.Phys. Part1. 42・4A. 1588-1589 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.D.Li: "Interactions between inversion domains and InGaN/GaN multiple quantum wells investigated by transmission electron microscopy"Journal of Crystal Growth. 247. 28-34 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Tsukihara: "GaN growth using a low-temperature GaNP buffer on sapphire by metalorganic chemical vapor deposition"Applied Physics Letter. 82・6. 919-921 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Tsukihara: "Dislocation reduction in GaN layer by introducing GaN-rich GaNP intermediate layers"Jpn.J.Appl.Phys.. 42・4A. 1514-1516 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] K.Nishino: "Effects of Surface Nitridation of Sapphire on MOCVD-AIN"First Asia-Pacific Workshop on Widegap Semiconductors. P104. 248 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Jin-Ping Ao: "Investigation of Copper Schottky Contact on n-GaN Grown on Sapphire Substrate"First Asia-Pacific Workshop on Widegap Semiconductors. P108. 258 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.X.Wang: "Effect of barrier composition symmetrization on emission mechanism of light emitting diode with single quantum well active layer"First Asia-Pacific Workshop on Widegap Semiconductors. Tdv03. 199 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Hisao Sato: "High efficiency AlGaInN-based light-emitting diode in 360-380nm wavelength"phys.stat.sol.(a). 200,No.1. 102-105 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Young-Bae Lee: "High efficiency GaN light-emitting diode with high resistance p-pad region using plasma su treatment"phys.stat.sol.(a). 200,No.1. 87-90 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] I.L.Maksimov: "Cracks and dislocation structures in AlGaN systems"phys.stat.sol.(c). 0 No.7. 2432-2435 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Naoi: "Growth and evaluation of GaN with SiN interlayer by MOCVD"The Fifth International Conference on Nitride Semiconductors. 2077-2081 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Kazunori Aoyama: "MOCVD growth of InGaN with an artificial compositional distribution"The Fifth International Conference on Nitride Semiconductors. 223 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Tsukihara: "The influence of a low temperature GaNP buffer on GaN growth by metalorganic chemical vapor deposotion"phys.stat.sol.(c). 0 No.7. 2757-2760 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Tsukihara: "XPS MEASUREMENT OF InNAs"The Fifth International Conference on Nitride Semiconductors. 487 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] R.Aleksiejunas: "Determination of free carrier bipolar diffusion coefficient and surface recombination velocity of undoped GaN epilayer"APPLIEDPHYSICSLETTERS. 83,6. 1159-1159 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] J.Vaitkus: "Semi-insulating GaN and its evaluation for particle detection"Nuclear Instruments and Methods in Physics Research Section A. 509,1. 60-64 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] J.Vaitkus: "Space charge effects, carrier capture transient behaviour and particle detection in semi-insulating GaN"Nuclear Instruments and Methods in Physics Research Section A. 514,1. 141-145 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] J.P.Ao: "Copper gate AlGaN/GaN HEMT with low gate leakage current"IEEE Electron Device Letters. 24,8. 500-502 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] A.Sasakia: "Radiative carrier recombination dependent on temperature and well width of InGaN/GaN single quantum well"Solid State Communications. 129. 31-35 (2004)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Kazunori Aoyama: "A Novel Method of Building Compositional Non-Uniformity in an InGaN Layer Grown on Sapphire Substrate by Metalorganic Chemical Vapor Deposition"Jpn.J.Appl.Phys.. Part2, 423B. L270-L272 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Hiroyuki Naoi: "Growth of InAs on GaAs (100) by low-pressure metalorganic chemical vapor deposition employing in situ generated arsine radicals"Journal of Crystal Growth. 260. 290-297 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Jin-Ping AO: "AlGaN/GaN High Electron Mobility Transistor with Thin Buffer Layers"Jpn.J.Appl.Phys.. Part1, 424A. 1588-1589 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.D.Li: "Interactions between inversion domains and InGaN/GaN multiple quantum wells investigated by transmission electron microscopy"Journal of Crystal Growth. 247. 28-34 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M.Tsukihara: "GaN growth using a low-temperature GaNP buffer on sapphire by metalorganic chemical vapor deposition"Applied Physics Letter. 82・6. 919-921 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M.Tsukihara: "Dislocation reduction in GaN layer by introducing GaN-rich GaNP intermediate layers"Jpn.J.Appl.Phys.. 424A. 1514-1516 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K.Nishino: "Effects of Surface Nitridation of Sapphire on MOCVD-AlN"First Asia-Pacific Workshop on Widegap Semiconductors. P104. 248 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Jin-Ping Ao: "Investigation of Copper Schottky Contact on n-GaN Grown on Sapphire Substrate"First Asia-Pacific Workshop on Widegap Semiconductors. P108. 258 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.X.Wang: "Effect of barrier composition symmetrization on emission mechanism of light emitting diode with single quantum well active layer"First Asia-Pacific Workshop on Widegap Semiconductors. Tdv03. 199 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Hisao Sato: "High efficiency AlGaInN-based light-emitting diode in 360-380 nm wavelength"phys.stat.sol.(a). 200, No.1. 102-105 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Young-Bae Lee: "High efficiency GaN light-emitting diode with high resistance p-pad region using plasma surface treatment"phys.stat.sol.(a). 200, No.1. 87-90 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] I.L.Maksimov: "Cracks and dislocation structures in AlGaN Systems"phys.stat.sol.(c). 0 No.7. 2432-2435 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.Naoi: "Growth and evaluation of GaN with SiN interlayer by MOCVD"The Fifth International Conference on Nitride Semiconductors. 2077-2081 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Kazunori Aoyama: "MOCVD growth of InGaN with an artificial compositional distribution"The Fifth International Conference on Nitride Semiconductors. 223 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M.Tsukihara: "The influence of a low temperature GaNP buffer on GaN growth by metalorganic chemical vapor deposotion"phys.stat.sol.(c). 0 No.7. 2757-2760 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M.Tsukihara: "XPS MEASUREMENT OF InNAs"The Fifth International Conference on Nitride Semiconductors. 487 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] R.Aleksiejunas: "Determination of free carrier bipolar diffusion coefficient and surface recombination velocity of undoped GaN epilayer"APPLIEDPHYSICSLETTERS. 83,6. 1159-1159 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] J.Vaitkus: "Semi-insulating GaN and its evaluation for particle detection"Nuclear Instruments and Methods in Physics Research Section A. 509,1. 60-64 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] J.Vaitkus: "Space charge effects, carrier capture transient behaviour and particle detection in semi-insulating GaN"Nuclear Instruments and Methods in Physics Research Section A. 514,1. 141-145 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] J.P.Ao: "Copper gate AlGaN/GaN HEMT with low gate leakage current"IEEE Electron Device Letters. 24,8. 500-502 (2003)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] A.Sasakia: "Radiative carrier recombination dependent on temperature and well width of InGaN/GaN single quantum well"Solid State Communications. 129. 31-35 (2004)

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 2005-04-19  

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