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2000 Fiscal Year Final Research Report Summary

STUDY OF RENEUTRALIZATION PROBABILITY OF DESORBED ION

Research Project

Project/Area Number 11450020
Research Category

Grant-in-Aid for Scientific Research (B).

Allocation TypeSingle-year Grants
Section一般
Research Field 表面界面物性
Research InstitutionTOYOTA TECHNOLOGICAL INSTITUTE

Principal Investigator

UEDA Kazuyuki  TOYOTA TECHNOLOGICAL INSTITUTE, GRADUATE COURSE, PROFESSOR, 大学院・工学研究科, 教授 (60029212)

Co-Investigator(Kenkyū-buntansha) OJIMA Kaoru  TOYOTA TECHNOLOGICAL INSTITUTE, POST DOCTRAL FELLOW, 大学院・工学研究科, ポストドクトラル研究員 (30312119)
KIMURA Keiko (OGAI Keiko)  TOYOTA TECHNOLOGICAL INSTITUTE, POST DOCTRAL FELLOW, 大学院・工学研究科, ポストドクトラル研究員 (60262862)
YOSHIMURA Masamichi  TOYOTA TECHNOLOGICAL INSTITUTE, ASOCIATE PROFESSOR, 大学院・工学研究科, 助教授 (40220743)
Project Period (FY) 1999 – 2000
KeywordsNEUTRALIZATION / TOF-ESD / ELECTRON-STIMULATED DESORPTION / TOW-DIMENSIONAL DISTRIBUTION / PROTIUM / 低速イオン散乱 / シリコン
Research Abstract

Recently study of hydrogen behaviors on the solid surfaces has been important subject. We have developed a scanning electron-stimulated desorption ion microscopy (SESDIM) that measures hydrogen and oxygen maps on the solid surfaces. Main subject of this project was study of reneutralization probability of desorbed ions using ion beam. The intensive study resulted in following. 1) Improvement of a spatial resolution is achieved in 700 nm. 2) A chemical state analysis of hydrogen has been developed by kinetic energy-peak separation of desorbed ion. The chemical state analysis of hydrogen and oxygen on the line and space consisting of silicon and silicon oxides has been succeeded in the same resolution. 3) High speed measurement has been achieved, because of 30 times speed-up measurement, imaging of five elemental maps takes 90 min with 128×128 pixcels. 5) Reneutralization probability of desorbed proton stimulated by electron has been estimated by in-situ measurements of TOF-type elastic recoil direct detection (ERDA). This is effective to estimate amounts of adsorbed hydrogen. This is based on that the ERDA measures total amounts of hydrogen.

  • Research Products

    (34 results)

All Other

All Publications (34 results)

  • [Publications] 上田一之,小粥啓子: "走査型電子励起脱離顕微鏡による水素の2次元化学状態分析"真空. 44・3(in press). (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 阪巻なみ,安東秀,上田一之: "低速イオン散乱法によるSi(100)表面へのヘテロエピタキシー"真空. 44・3(in press). (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 小嶋薫,吉村雅満,上田一之: "STMによるBa/Si(100)の成長過程の観察"真空. 44・3(in press). (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Keiko Ogai and Kazuyuki Ueda: "Nondestructive depth profiling by specimen tilting using scanning electron microscope-energy dispersive X-ray spectrometer."Jpn.J.Appl.Phys.. 40・2A. 910-913 (2001)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Kazuyuki Ueda and Keiko Ogai,: "Two-dimensional hydrogen chemical state analysis by a scanning electron-stimulated desorption ion microscope."Surf.Sci.. 462. 1-5 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] K.Ueda,K.Ogai,K.Ishikawa,M.Yoshimura: "Two-dimensional hydrogen analysis on solid surfaces by TOF-ESD."Jpn.J.Appl.Phys.. 39・4A. L315-317 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] K.Ueda,K.Ishikawa,M.Yoshimura: "A New System of Two-Dimensonal Hydrogen Analysis and Application to Metal Surfaces."J.Alloys and Camp,. 293/295. 361-363 (1999)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] K.Ishikawa,K.Ueda and Y.Yoshimura: "New development of scanning-type microscope for 2-dimensional hydrogen distribution using electron-stimulated desorption method."Surface Science. 433/435. 244-248 (1999)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 上田一之,石川憲一,吉村雅満,境悠治: "走査型水素検出顕微鏡の開発とその応用"真空. 42・3. 353-356 (1999)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 上田一之: "電子励起脱離法による表面上の水素と酸素の挙動"触媒. 41・7. 537-541 (1999)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 上田一之: "電子励起イオン脱離法による水素分析"真空. 42・10. 892-896 (1999)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] K.Ueda,K.Ogai,K.Ishikawa: "Two-dimensional hydrogen chemical state analysis by a scanning electron-stimulated desorption ion microscope."Surf.Sci.. (in press).

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] K.Ueda,K.Ishikawa K.Ogai and M.Yoshimura: "Two-dimensional analysis of hydrogen on solid surfaces by time-of-flight electron stimulated desorption microscope."Jpn.J.Appl.Phys.. 39・7B. 4363-4365 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Kazuyuki Ueda: "Imaging of hydrogen on solid surfaces by desorption spectroscopy (Invited)"J.Cryst.Growth,. 210. 416-420 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] K.Ueda,K.Ishikawa,M.Yoshimura: "Two-dimensional hydrogen distribution on solid surface studied by electron stimulated desorption microscopy and Ni-silicides on H-terminated Si(100)"Appl.Surf.Sci.,. 159/160. 201-209 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] K.Ojima and K.Ueda: "Influence of sulfur on oxygen adsorption onto a polycrystalline Zr surface"Appl.Surf.Sci.. 165. 141-148 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] K.Ojima and K.Ueda: "Oxygen adsorption induced hydrogen segragation on zirconium surface."Appl.Surface Sci.. 165. 149-153 (2000)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Kazuyuki Ueda: "Two-dimensionnal hydrogen chemical state analysis on silicon and silicon-oxide surfaces"Proc.3rd Internl.Symp.Advanced Sci.& Technol.Si Materials. hawaii, Nov.2000. 535-542

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] K.Ueda, K.Ishikawa and M.Yoshimura: "A New System of Two-Dimensonal Hydrogen Analysis and Application to Metal Surfaces"J.Alloys and Comp.. 293-295. 361-363 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K.Ishikawa, K.Ueda and M.Yoshimura: "New development of scanning-type microscope for two-dimensional hydrogen distribution using electron-stimulated desorption method"Surf.Sci.. 433-435. 244-248 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K.Ueda, T.Ushirosako and M.Yoshimura: "Surfactant effect of atomic hydrogen on silicide-formation of nickel on Si (110) surfaces"Thin Solid Film. 343-344. 612-615 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] I.Ono, M.Yoshimura and K.Ueda: "Atomistic study of nickel silicide structures on Si (100) by tunneling microscopy."J.Vac.Sci.Technol.B. 16-6. 2947-2951 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M.Yoshimura, T.An, I.Ono and K.Ueda: "Nickel-induced surface reconstructions on Si (110) studied by STM"Surf.Sci.. 433-435. 470-474 (1999)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Keiko Ogai and Kazuyuki Ueda: "Nondestructive depth profiling by specimen tilting using scanning electronmicroscope-energy dispersive X-ray spectrometer"Jpn.J.Appl.Phys.. 40. 910-913 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K.Umezawa, S.Nakanishi, M.Yoshimura, K.Ojima, K.Ueda, and W.M.Gibson: "Ag/Cu (111) surface structure and metal epitaxy by impact-collision ion-scattering spectroscopy and scanning tunneling microscopy"Phys.Rev.B. 63. 035402 (2001)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Kazuyuki Ueda and Keiko Ogai: "Two-dimensional hydrogen chemical state analysis by a scanningelectron-stimulated desorption ion microscope"Surf.Sci.. 462. 1-5 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K.Ueda, K.Ogai, K.Ishikawa and M.Yoshimura: "Two-dimensional hydrogen analysis of hydrogen strage allay surface by electronstimulated desorption microscopy"Jpn.J.Appl.Phys.. 39. L315-L317 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K.Ueda, K.Ishikawa, K.Ogai and M.Yoshimura: "Two-dimensional analysis of hydrogen on solid surfaces by time-of-flight electron stimulated desorption microscope"Jpn.J.Appl.Phys.. 39. 4363-4365 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Kazuyuki Ueda: "Imaging of hydrogen on solid surfaces by desorption spectroscopy"J.Cryst.Growth. 210. 416-420 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K.Ueda, K.Ishikawa and M.Yoshimura: "Two-dimensional hydrogen distribution on solid surface studied by electron stimulated desorption microscopy and Ni-silicides on H-terminated Si (100) surfaces"Appl.Surf.Sci.. 159/160. 201-209 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.An, M.Yoshimura and K.Ueda: "Surface Structure of Si (110) "7x2" -Sn Observed by Scanning Tunneling Microscopy"Jpn.J.Appl.Phys.. 39. 4635-4636 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M.Yoshimura, T.An and K.Ueda: "Observation of Si (110) surfaces by high-temperature scanning tunnelingmicroscopy"Jpn.J.Appl.Phys.. 39. 4432-4434 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Kaoru Ojima and Kaoru Ueda: "Influence of sulfur on oxygen adsorption onto a polycrystalline Zr surface"Appl.Surf.Sci.. 165. 141-148 (2000)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Kaoru Ojima and Kazuyuki Ueda: "Oxygen adsorption induced hydrogen segragation on zirconium surface."Appl.Surf.Sci.. 165. 149-153 (2000)

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 2002-03-26  

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