2003 Fiscal Year Final Research Report Summary
Study on evaluation method of uncertainty in coordinate metrology
| Project/Area Number |
13450099
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Intelligent mechanics/Mechanical systems
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| Research Institution | The University of Tokyo |
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Principal Investigator |
TAKAMASU Kiyoshi The University of Tokyo, School of Engineering, Professor, 大学院・工学系研究科, 教授 (70154896)
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| Co-Investigator(Kenkyū-buntansha) |
FURUTANI Ryoshu Tokyo Denki University, Faculty of Engineering, Professor, 工学部, 教授 (50219119)
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| Project Period (FY) |
2001 – 2003
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| Keywords | uncertainty of measurement / coordinate measuring machine / virtual CMM / evaluation of accuracy |
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| Research Abstract |
The total theoretical methods for evaluation of uncertainty in coordinate metrology were established. Specially, the uncertainty from the strategy of measurement and the form deviation of a measured workpiece was evaluated using simulations and statistical experiments.
(1)Uncertainty from the form deviation
The specified autocorrelation functions were obtained to circle features. We made several simulations to measure the circle features using the specified measuring strategies. From the results of the simulations, the uncertainties can be calculated in the strategies of measurements such as number of measuring points and positions.
(2)Theoretical examinations on influences of form deviation
The uncertainties can theoretically calculated using variance and covariance of the error matrix on the least squares method. These uncertainties were compared with the results of simulations.
(3)Measuring experiments using Coordinate Measuring Machine
Several circle features were measured using CMM. The results of measurements were compared with the results of simulations. It is
From these experiments and simulations, we confirmed our proposed methods can be applicable to coordinate metrology.
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[Publications] I.Misumi, S.Gonda, T.Kurosawa, Y.Tanimura, N.Ochiai, J.Kitta, F.Kubota, M.Yamada, Y.Fujiwara, Y.Nakayama, K.Takamasu: "Submicrometre-pitch intercomparison between optical diffraction, scanning electron microscope and atomic force microscope"Meas.Sci.Technol.. 14・12. 2065-2074 (2003)
Description
「研究成果報告書概要(和文)」より
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[Publications] I.Misumi, S.Gonda, T.Kurosawa, Y.Tanimura, N.Ochiai, J.Kitta, F.Kubota, M.Yamada, Y.Fujiwara, Y.Nakayama, K.Takamasu: "Submicrometre-pitch intercomparison between optical diffraction, scanning electron microscope and atomic force microscope"Meas.Sci.Technol.. 14-12. 2065-2074 (2003)
Description
「研究成果報告書概要(欧文)」より
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