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2003 Fiscal Year Final Research Report Summary

Measurement of sheath electric field in electronegative plasm as by laser-induced fluorescence-dip spectroscopy

Research Project

Project/Area Number 13480124
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field プラズマ理工学
Research InstitutionNagoya University

Principal Investigator

SASAKI Koichi  Nagoya University, School of Engineering, Associate Prof., 工学研究科, 助教授 (50235248)

Co-Investigator(Kenkyū-buntansha) ARAMAKI Mitsutoshi  Nagoya University, School of Engineering, Research Associate, 工学研究科, 助手 (50335072)
Project Period (FY) 2001 – 2003
KeywordsLaser-induecd fluoresoence-dip Spectroscopy / Structure of sheath electric field / Electronegative plasmas / Stark effect / High Rydberg states / Argon / Sensitive measurement / Microfield
Research Abstract

The purpose of this project is the development of a sensitive diagnostic technique for measuring electric fields in plasmas. The method is a kind of laser Stark spectroscopy. We adopted laser-induced fluorescence-dip spectroscopy to argon, in order to carry out the electric field measurement in various plasmas including electronegative plasmas. We measured Stark spectra of argon high Rydberg states in well-defined electric fields, and the electric fields in plasmas were determined by comparing the spectra observed in plasmas with the reference spectra observed in well-defined electric fields. We achieved sensitive detection limit of 3 V/cm, which is the champion sensitivity in the world. We carried out the electric field measurement in an inductively-coupled plasma source. We measured the distribution of electric field in the sheath region in front of a metal electrode inserted in the plasma. Owing to the sensitive detection limit, we succeeded in measuring the electric field in the presheath region, where we observed uniform electric field due to the inicrofield. We repeated the electric field measurement in Ar/SF_6 electronegative plasmas. We have found for the first time that the sheath electric field of electronegative plasmas has multistage structure.

  • Research Products

    (10 results)

All Other

All Publications (10 results)

  • [Publications] K.Takizawa, K.Sasaki, K.Kadota: "Observation, of Stark spectra of argon high Rydberg states in well-defined electric fields by laser-induced fluorescence-dip spectroscopy"Jpn.J.Appl.Phys.. 41. L1285-L1287 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] K.Takizawa, K.Sasaki, A.Kono: "Sensitive measurement of electric field distributions in low-pressure Ar plasmas by laser-induced fluorescence-dip spectroscopy"Appl.Phys.Lett.. 84. 185-187 (2004)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] K.Takizawa, K.Sasaki: "Observation of the electric field structure in the sheath of electronegative plasmas by laser-induced fluorescence-dip spectroscopy"J.Plasma Fusion Res.. 80. 3-4 (2004)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] K.Takizawa, K.Sasaki, K.Kadota: "Stark spectroscopy of Ar Rydberg states for sheath electric field measurements in processing plasmas"Proc.Joint Conf.ESCAMPIG and ICRP (Grenoble, France). 2. 33-34 (2002)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] K.Sasaki, K.Takizawa, A.Kono, V.P.Gavrilenko: "Sensitive measurement of electric field distribution in an ICP Arplamsa by laser-induced fluorescence-dip spectroscopy"Abstracts of 11th International Symposium on Laser-Aided Plasma Diagnostics (Les Houches, France). 7 (2003)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] K.Takizawa, K.Sasaki, K.Kadota: "Observation of Stark spectra of argon high Rydberg states in well-defined electric fields by laser-induced fluorescence-dip spectroscopy"Jpn.J.Appl.Phys.. 41. L1285-L1287 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K.Takizawa, K.Sasaki, A.Kono: "Sensitive measurement of electric field distributions in low-pressure Ar plasmas by laser-induced fluorescence-dip spectroscopy"Appl.Phys.Lett.. 84. 185-187 (2004)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K.Takizawa, K.Sasaki: "Observation of the electric field structure in the sheath of electronegative plasmas by laser-induced fluorescence-dip spectroscopy"J.Plasma Fusion Res.. 80. 3-4 (2004)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K.Takizawa, K.Sasaki, K.Kadota: "Stark spectroscopy of Ar Rydberg states for sheath electric field measurements in processing plasmas"Proc.Joint Conf.ESCAMPIG and ICRP(Grenoble, France). 2. 33-34 (2002)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K.Sasaki, K.Takizawa, A.Kono, V.P.Gavrilenko: "Sensitive measurement of electric field distribution in an ICP Arplamsa by laser-induced fluorescence-dip spectroscopy"Abstracts of 11^<th> International Symposium on Laser-Aided Plasma Diagnostics(Les Houches, France). 7.

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 2005-04-19  

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