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2006 Fiscal Year Final Research Report Summary

Development of a surface encoder for next generation three-axis precision stages

Research Project

Project/Area Number 14102017
Research Category

Grant-in-Aid for Scientific Research (S)

Allocation TypeSingle-year Grants
Research Field Intelligent mechanics/Mechanical systems
Research InstitutionTohoku University

Principal Investigator

KIYONO Satoshi  Tohoku University, Graduate School of Engineering, Professor, 大学院工学研究科, 教授 (40005468)

Co-Investigator(Kenkyū-buntansha) GAO Wei  Tohoku University, Graduate School of Engineering, Associate Professor, 大学院工学研究科, 助教授 (70270816)
YAMANAKA Masashi  Tohoku University, Graduate School of Engineering, Associate Professor, 大学院工学研究科, 助教授 (20292229)
JU Bingfeng  Tohoku University, Graduate School of Engineering, Research Associate, 大学院工学研究科, 助手 (10431529)
SHIMIZU Hiroki  Kyushu Institute of Technology, Faculty of Engineering, Associate Professor, 工学部, 助教授 (50323043)
Project Period (FY) 2002 – 2006
Keywordsposition measurement / surface motor / multi-degee-of-freedom / slope / angle grid / closed-loop control / sensor / accuracy
Research Abstract

This research has developed a surface encoder consisting of a sinusoidal angle grid and a two-dimensional slope sensor for multi-degree-of-freedom planar motion measurement. The angle grid has a three dimensional micro-structured surface, which is a superposition of periodic sinusoidal waves in the X-and Y-directions. The laser-based slope sensor is used to read local slope profiles of the grid surface. The X-and Y-positions together with tilt motions about the X-, Y-and Z-axes can be detected by using multiple sensors with a maximum speed of 550mm/s. a double pass surface encoder for nanometer position measurement in the XY plane. By using a double pass optical layout, the sensitivity of the sensor becomes twice as much as that of the single pass surface encoder. A resolution of 2 nm has been realized.
Diamond turning with a fast tool servo has been chosen as the fabrication method for the angle grid. The constructed fast tool servo, which employs a piezoelectric tube actuator to actua … More te the diamond tool and a capacitance probe as the feedback sensor, was confirmed to have a bandwidth of approximately 4 kHz and a tool displacement accuracy of several nanometers in the closed-loop mode. An evaluation technique based on the two-dimensional discrete Fourier transform (DFT) of interference microscope images has been developed to evaluate the fabricated grid surface effectively. The fabrication result of a grid surface over an area of φ150 mm has indicated the effectiveness of the fabrication system. The fabricated minimum pitch of the angle grid is 10 μm. A UV roller replication technique has also been developed to fabricate the angle grid on large area films.
The surface encoder has been applied for surface motor-driven stages for five degree-of-freedom precision positioning. The surface motor consists of pairs of linear motors placed on the same surface. The magnetic array and the stator winding of the linear motor are mounted on the platen (the moving element) and the stage base, respectively. The angle grid of the surface encoder is mounted on the platen of the stage which is levitated by air-bearings. The slope sensors and the air-bearing pads are fixed on the stage base so that the motion of the platen is not affected by the electronic cables and air hoses. The surface encoder has also been applied to Sawyer motor driven stages. Less

  • Research Products

    (40 results)

All 2007 2006 2005 2004 2003

All Journal Article (36 results) Patent(Industrial Property Rights) (4 results)

  • [Journal Article] A double pass surface encoder for measurement of planar motion2007

    • Author(s)
      Yoji Watanabe, et al.
    • Journal Title

      International Journal of Surface Science and Engineering (印刷中)

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] A double pass surface encoder for measurement of planar motion2007

    • Author(s)
      Yoji Watanabe, et al.
    • Journal Title

      International Journal of Surface Science and Engineering (in press)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Design and Construction of a Surface Encoder with Dual Sine-Grids2006

    • Author(s)
      Akihide Kimura, et al.
    • Journal Title

      International Journal of Precision Engineering and Manufacturing 8・2

      Pages: 20-25

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Precision measurement and decoupled control of a planar motion stage2006

    • Author(s)
      Song Yi Dian, et al.
    • Journal Title

      Journal of CSME 27・5

      Pages: 567-574

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Improvement in a surface motor-driven planar motion stage2006

    • Author(s)
      Wei Gao, et al.
    • Journal Title

      Journal of Robotics and Mechatronics 18・6

      Pages: 808-815

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Construction of a measurement and control system for a Sawyer motor-driven planar stage2006

    • Author(s)
      M.Tano, et al.
    • Journal Title

      Journal of Nanotechnology and Precision Engineering 4・3

      Pages: 182-189

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Design and Construction of a Surface Encoder with Dual Sine-Grids2006

    • Author(s)
      Akihide Kimura, et al.
    • Journal Title

      International Journal of Precision Engineering and Manufacturing Vol.8, No.2

      Pages: 20-25

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Precision measurement and decoupled control of a planar motion stage2006

    • Author(s)
      Song Yi Dian, Wei Gao, Katsutoshi Horie, Satoshi Kiyono
    • Journal Title

      Journal of CSME Vol.27, No.5

      Pages: 567-574

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Improvement in a surface motor-driven planar motion stage2006

    • Author(s)
      Wei Gao, et al.
    • Journal Title

      Journal of Robotics and Mechatronics Vol.18, No.6

      Pages: 808-815

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Construction of a measurement and control system for a Sawyer motor-driven planar stage2006

    • Author(s)
      M.Tano, et al.
    • Journal Title

      Journal of Nanotechnology and Precision Engineering Vol.4, No.3

      Pages: 182-189

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Dual正弦波格子型サーフェスエンコーダに関する研究2005

    • Author(s)
      高偉, 他.
    • Journal Title

      精密工学会誌 72・3

      Pages: 382-386

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] 高速工具サーボによる大面積正弦波微細格子基準面の高精度創成2005

    • Author(s)
      田野 誠, 他.
    • Journal Title

      日本機械学会論文集(C) 71・712

      Pages: 3602-3607

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] 光干渉型サーフェスエンコーダに関する研究2005

    • Author(s)
      渡辺陽司, 他.
    • Journal Title

      精密工学会誌 71・8

      Pages: 1051-1055

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Dynamic modeling, controller design and experimental validation of a planar motion stage for precision positioning2005

    • Author(s)
      Shuichi DEJIMA, et al.
    • Journal Title

      Precision Engineering 29・3

      Pages: 263-271

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Sawyer型平面モータの精密位置決めに関する研究-位置決やシステムの提案と微小位置決め実験-2005

    • Author(s)
      高偉, 他.
    • Journal Title

      精密工学会誌 74・1

      Pages: 523-527

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Precision Positioning of a Five Degree-of-Freedom Planar Motion Stage2005

    • Author(s)
      Shuichi Dejima, et al.
    • Journal Title

      Mechatronics 15

      Pages: 969-987

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] A Dual-Mode Surface Encoder for Position Measurement2005

    • Author(s)
      W.Gao, et al.
    • Journal Title

      Sensors and Actuators A 117・1

      Pages: 95-102

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] A surface encoder with dual sine-grids2005

    • Author(s)
      Wei Gao, et al.
    • Journal Title

      Journal of JSPE Vol.72, No.3

      Pages: 382-386

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] High-accuracy fabrication of a simusoidal grid surface over a large area by fast tool servo2005

    • Author(s)
      Makoto Tano, et al.
    • Journal Title

      Transactions of JSME C Vol.71, No.712

      Pages: 3602-3607

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] A surface encoder based on wave optics2005

    • Author(s)
      Yoji Watanabe, et al.
    • Journal Title

      Journal of JSPE Vol.71, No.8

      Pages: 1051-1055

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Dynamic modeling, controller design and experimental validation of a planar motion stage for precision positioning2005

    • Author(s)
      S.Dejima, et al.
    • Journal Title

      Precision Engineering Vol.29, No.3

      Pages: 263-271

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Precision Positioning of a Sawyer motor-driven stage2005

    • Author(s)
      Wei Gao, et al.
    • Journal Title

      Journal of JSPE Vol.74, No.1

      Pages: 523-527

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Precision Positioning of a Five Degree-of-Freedom Planar Motion Stage2005

    • Author(s)
      Shuichi Dejima, et al.
    • Journal Title

      Mechatronics Vol.15

      Pages: 969-987

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] A Dual-Mode Surface Encoder for Position Measurement,2005

    • Author(s)
      W.Gao, et al.
    • Journal Title

      Sensors and Actuators A Vol.117, No.1

      Pages: 95-102

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] A Surface Motor-Driven Planar Motion Stage Integrated with an XYO_z Surface Encoder for Precision Positioning2004

    • Author(s)
      Wei Gao, et al.
    • Journal Title

      Precision Engineering 28・3

      Pages: 329-337

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] A Surface Motor-Driven Planar Motion Stage Integrated with an XYθz Surface Encoder for Precision Positioning,2004

    • Author(s)
      Wei Gao, et al.
    • Journal Title

      Precision Engineering Vol.28, No.3

      Pages: 329-337

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Analysis of a Surface Encoder in Wave Optics2003

    • Author(s)
      Yoji Watanabe, et al.
    • Journal Title

      Key Engineering Materials 257・258

      Pages: 219-224

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Precision nanometrology of a large area microstructured metrology surface2003

    • Author(s)
      W.Gao, et al.
    • Journal Title

      Optics and Precision Engineering 11・3

      Pages: 223-226

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Precision Measurement of Two-Axis Positions and Tilt Moticns Using a Surface Encoder2003

    • Author(s)
      Wei Gao, et al.
    • Journal Title

      Annals of CIRP 52・2

      Pages: 435-438

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Precision Nano-fabrication and evaluation of a large area sinusoidal grid surface for a surface encoder2003

    • Author(s)
      Wei Gao, et al.
    • Journal Title

      Precision Engineering 27・3

      Pages: 289-298

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] サーフェスモータ駆動型多自由度ステージの位置決めの研究(第2報)-ステージのダイナミック制御による微小位置決め実験-2003

    • Author(s)
      出島秀一, 他.
    • Journal Title

      精密工学会誌 69・3

      Pages: 433-437

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Analysis of a surface encoder in wave optics2003

    • Author(s)
      Y.Watanabe, et al.
    • Journal Title

      Key Engineering Materials Vol.257-258

      Pages: 219-224

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Precision nanometrology of a large area microstructured metrology surface2003

    • Author(s)
      Wei Gao, et al.
    • Journal Title

      Optics and Precision Engineering Vol.11, No.3

      Pages: 223-226

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Precision Measurement of Two-Axis Positions and Tilt Motions Using a Surface Encoder2003

    • Author(s)
      W.Gao, et al.
    • Journal Title

      Annals of CIRP Vol.52, No.2

      Pages: 435-438

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Precision Nano-fabrication and evaluation of a large area sinusoidal grid surface for a surface encoder2003

    • Author(s)
      Wei Gao, et al.
    • Journal Title

      Precision Engineering Vol.27, No.3

      Pages: 289-298

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Precision positioning of a surface motor-driven multi-axis stage using a surface encoder2003

    • Author(s)
      Shuichi Dejima, et al.
    • Journal Title

      Journal of JSPE Vol.69, No.3

      Pages: 433-437

    • Description
      「研究成果報告書概要(欧文)」より
  • [Patent(Industrial Property Rights)] ステージ装置2004

    • Inventor(s)
      高偉, 清野慧, 富田良幸, 田野誠
    • Industrial Property Rights Holder
      (株)東北テクノアーチ
    • Industrial Property Number
      特許出願2004-080603
    • Filing Date
      2004-03-19
    • Description
      「研究成果報告書概要(和文)」より
  • [Patent(Industrial Property Rights)] 検出装置及びステージ装置2004

    • Inventor(s)
      高偉, 清野慧, 富田良幸, 渡辺陽司
    • Industrial Property Rights Holder
      (株)東北テクノアーチ
    • Industrial Property Number
      特許出願2004-131886
    • Filing Date
      2004-04-27
    • Description
      「研究成果報告書概要(和文)」より
  • [Patent(Industrial Property Rights)] 検出装置2004

    • Inventor(s)
      清野慧, 渡辺陽司, 高偉, 清水浩貴
    • Industrial Property Rights Holder
      (株)東北テクノアーチ
    • Industrial Property Number
      特許出願2004-138062
    • Filing Date
      2004-05-07
    • Description
      「研究成果報告書概要(和文)」より
  • [Patent(Industrial Property Rights)] 検出装置及びステージ装置2004

    • Inventor(s)
      高偉, 清野慧, 渡辺陽司, 富田良幸, 牧野健一, 平田徹
    • Industrial Property Rights Holder
      (株)東北テクノアーチ
    • Industrial Property Number
      特許出願2004-191828
    • Filing Date
      2004-06-29
    • Description
      「研究成果報告書概要(和文)」より

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Published: 2008-05-27  

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