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2004 Fiscal Year Final Research Report Summary

Development of in-vivo pH Measurement Chip in Digestive System

Research Project

Project/Area Number 14208101
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field Biomedical engineering/Biological material science
Research InstitutionNational Institute for Materials Science (2003-2004)
The University of Tokyo (2002)

Principal Investigator

HORIIKE Yasuhiro  National Institute for Materials Science, Biomaterials Center, Fellow, 生体材料研究センター, フェロー (20209274)

Co-Investigator(Kenkyū-buntansha) KUZUYA Masayuki  Gifu Pharmaceutical University, Department of Pharmacy, Professor, 薬学部, 教授 (10082984)
MASU Kazuya  Tokyo Institution of Technology, Precision and Intelligence Laboratory, Professor, 精密工学研究所, 教授 (20157192)
TAKAMURA Yuzuru  Japan Advanced Institute for Science and Technology, Associate professor, 材料科学研究科, 助教授 (20290877)
NAKASE Hiroyuki  Tohoku University, Research Institute of Electrical Communication, Assistant professor, 電気通信研究所, 助手 (60312675)
Project Period (FY) 2002 – 2004
Keywordsin-vivo diagnostics / Drug delivery system / Taylor made treatment / Communication chip / Micro high power supply / pH sensing / Micro total analytical system / Micro high sensitive transmitting and receiving antenna
Research Abstract

Much attention is paid for the development of "drinking" or "in-vivo" biochips for medical diagnostics and treatments. To create a drug delivery system (DDS) releasing a medicine by sensing the pH of the target in the digestive system, we also plan to develop an "in-vivo" pH sensing chip. To realize the chip, an antenna, a low voltage driven pump, a capacitor type battery and their three-dimensional integration has to be developed. To improve the S/N ratio of transmitting the data from the external coil to the internal coil, a tablet structure and a capsule structure were investigated as the internal coil. The size of the investigated tablet structure is 4.5mm in diameter and 4 mm in height. The size of the capsule structure is 2.5mm in diameter and 15mm in length. From calculating the coupling factor in both structures, it is found that a tablet structure is suitable better than a capsule structure. The transmission signal is carried by electric and magnetic fluxes because the transmission distance is shorter than the signal wavelength. With regard to permeation characteristics, we adopted the electromagnetic coupling transmission rather than the electromagnetic wave transmission. The pulse interval modulation is superior to amplitude shift keying, frequency shift keying and phase shift keying. A small communication chip with an active area of 150 x 150 μm^2 allowing kbps/Mbps has been developed using 0.18mm Si CMOS(complementary metal-oxide semiconductor) process. The communication chip showed consumption power of 0.6 mW at 108.48MHz. We developed DDS enabling to control the time of releasing a medicine. And we also studied the system a medicine floats and remains in stomach. The time lag and the speed of releasing a medicine can be controlled employing surface treatment by plasma dry process.

  • Research Products

    (77 results)

All 2005 2004 2003 2002

All Journal Article (72 results) Book (5 results)

  • [Journal Article] Wide Tuning Range LC-VCO Using Variable Inductor for Reconfigurable RF Circuit2005

    • Author(s)
      Y.Yoshihara, et al.
    • Journal Title

      IEIECE Transactions on Fundamentals of Electronics, Communications and Computer Sciences E-88A(2)

      Pages: 517-512

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] NANO-BAIO JITEN2005

    • Author(s)
      A.Oki, et al.
    • Journal Title

      Techno-system Corp. (in press)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Coming of Highly Aged Society and Creation of Healthcare chip2005

    • Author(s)
      Y.Horiike, et al.
    • Journal Title

      HYOUMENGIJYUTSU 55(6)

      Pages: 385-390

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] High Density Differential Transmission Line Structure on Si ULSI2004

    • Author(s)
      H.Ito, et al.
    • Journal Title

      IEICE Transactions on Electronics E87-C(6)

      Pages: 942-948

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Variable RF Inductor on Si CMOS Chip2004

    • Author(s)
      H.Sugawara, et al.
    • Journal Title

      Jpn. J. Appl. Phys. 43(4B)

      Pages: 2293-2296

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] The dynamic observation of the field emission site on electrons on a carbon nanotube tip2004

    • Author(s)
      H.Yoshiki, et al.
    • Journal Title

      DIAMOND AND RELATED MATERIALS 13

      Pages: 1209-1213

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] 同時多項目測定ヘルスケアチップ用マイクログルコースセンサーの創製2004

    • Author(s)
      高井まどか, et al.
    • Journal Title

      KOBUNSHI RONBUNSHU 61(1)

      Pages: 555-560

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] 無痛針採血による在宅健康診断チップ2004

    • Author(s)
      堀池靖浩
    • Journal Title

      自動車技術 58(7)

      Pages: 116-117

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] 高齢化社会の到来とヘルスケアチップの創製-ドライエッチング技術の展開-2004

    • Author(s)
      堀池靖浩, et al.
    • Journal Title

      表面技術 55(6)

      Pages: 385-390

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Development of healthcare chips checking life-style-related disease2004

    • Author(s)
      A.Oki, et al.
    • Journal Title

      Materials Science and Engineering C 24(6-8)

      Pages: 837-843

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] 医療用バイオチップの現状と将来希望2004

    • Author(s)
      沖 明男, et al.
    • Journal Title

      電気学会誌 124(4)

      Pages: 219-222

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] ヘルスケアチップの開発2004

    • Author(s)
      小川洋輝, et al.
    • Journal Title

      化学装置 9

      Pages: 81-85

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Fast Separation of Long DNA Molecules by Nanopillar Chips under a Direct Current Electric Field2004

    • Author(s)
      N.Kaji, et al.
    • Journal Title

      Anal. Chem. 76(1)

      Pages: 15-22

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Curvature entropy trapping of long DNA under hydrodynamic flows in microfluidic devices2004

    • Author(s)
      m.Ueda, et al.
    • Journal Title

      Jpn. J. Appl. Phys. 43(4A)

      Pages: 1649-1650

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Sodium Carboxylate Effect of Non-Crosslinked Hydrogel on Plasma-Induced Radical Formation as Studied by Electron Spin Resonance2004

    • Author(s)
      M.Kuzuya, et al.
    • Journal Title

      Thin Solid Films 457

      Pages: 12-19

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Preparation of Floating Drug Delivery System by Pulsed-Plasma Techniques2004

    • Author(s)
      S.Kondo, et al.
    • Journal Title

      J. Photopolym. Sci. Technol. 17(2)

      Pages: 149-152

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Development of Patient-Tailored Drug Delivery System by Plasma Techniques2004

    • Author(s)
      Y.Sasaki, et al.
    • Journal Title

      J. Photopolym 17(2)

      Pages: 185-188

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Nature of Mechanoradical Formation of Substituted Celluloses as Studied by Electron Spin Resonance2004

    • Author(s)
      Y.Sasai, et al.
    • Journal Title

      Chem.Pharm.Bull. 52(3)

      Pages: 339-344

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] ステンレス製容器を用いたメカノケミカル個相反応によるリボフラビンラジカルの生成2004

    • Author(s)
      近藤伸一, et al.
    • Journal Title

      YAKUGAKU ZASSHI 124(3)

      Pages: 141-148

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Novel and Simple Preparation Method of Matrix-Type Composite Particles for Controlled Drug Release by Mechanical Action2004

    • Author(s)
      S.Kondo, et a.
    • Journal Title

      Chem. Pharm. Bull. 52(4)

      Pages: 488-489

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Mechanism of cloudy surface generation on Si wafer employing numerically controlled local dry etching (NC-LDE)2004

    • Author(s)
      M.Yanagisawa, et al.
    • Journal Title

      Jpn. J App. Phys. 43(1)

      Pages: 19-22

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Localized and ultrahigh-rate etching of silicon wafers using atmospheric-pressure microplasma jets2004

    • Author(s)
      T.Ishiki, et al.
    • Journal Title

      Jpn. J. Appl. Phys. 95(1)

      Pages: 35-39

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Electrophoresis of long dexyribonucleic acid in curved channels : The effect of channel width on migration dynamics2004

    • Author(s)
      M.Ueda, et al.
    • Journal Title

      Journal of Applied Physics 96(5)

      Pages: 2973-2944

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Curbature EntropyTrapping of Long DNA under Hydrodynamic Flows in Microfluidic Devices2004

    • Author(s)
      M.Ueda, et al.
    • Journal Title

      Journal of Applied Physics 43(4)

      Pages: 1649-1650

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Mechanochemical Solid-State Polymerization (XI) : Effect of Water-Insoluble Pharmaceutical Aids on Drug Release from Mechanically Synthesized Polymeric Prodrugs2004

    • Author(s)
      S.Kondo, et al.
    • Journal Title

      Chem. Pharm. Bull. 52(11)

      Pages: 1302-1306

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Variable RF Inductor on Si CMOS Chip2004

    • Author(s)
      H.Sugawara, et al.
    • Journal Title

      Jpn.J.Appl.Phys. 43(4B)

      Pages: 2293-2296

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Creation of Micro glucose sensor for Healthcarechip2004

    • Author(s)
      M.Takai, et al.
    • Journal Title

      KOBUNSHI RONBUNSHU 61(1)

      Pages: 555-560

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Home Diagnostic Chip employing Painless Needle2004

    • Author(s)
      Y.Horiike
    • Journal Title

      JIDOUSHA GIJYUTSU 58(7)

      Pages: 116-117

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Current Situation and Future view of Biochip for Medical Treatment2004

    • Author(s)
      A.Oki, et al.
    • Journal Title

      DENKI GAKKAI-SI 124(4)

      Pages: 219-222

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Development of Healthcare Chip2004

    • Author(s)
      H.Ogawa, et al.
    • Journal Title

      KAGAKUSOUCHI 9

      Pages: 81-85

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Fast Separation of Long DNA Molecules by Nanopillar Chips under a Direct Current Electric Field2004

    • Author(s)
      N.Kaji, et al.
    • Journal Title

      Anal.Chem. 76(1)

      Pages: 15-22

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Localized and ultrahigh-rate etching of silicon wafers using atmospheric-pressure microplasma jets2004

    • Author(s)
      T.Ichiki, et al.
    • Journal Title

      Jpn.J.Appl.Phys. 95(1)

      Pages: 35-39

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Sodium Carboxyl ate Effect of Non-Crosslinked Hydrogel on Plasma-Induced Radical Formation as Studied by Electron Spin Resonance2004

    • Author(s)
      M.Kuzuya, et al.
    • Journal Title

      Thin Solid Films 457

      Pages: 12-19

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Preparation of Floating Drug Delivery System by Pulsed-Plasma Techniques2004

    • Author(s)
      S.Kondo, et al.
    • Journal Title

      J.Photopolym.Sci.Technol. 17(2)

      Pages: 149-152

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Development of Patient-Tailored Drug Delivery System by Plasma Techniques2004

    • Author(s)
      Y.Sasai, et al.
    • Journal Title

      J.Photopolym.Sci.Technol. 17(2)

      Pages: 185-188

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Generation of riboflavin radical by solid phase reaction of Mechano-chemical using stainless-steel vessel2004

    • Author(s)
      S Kondo, et al.
    • Journal Title

      DENKI GAKKAI-SI 124(4)

      Pages: 219-222

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Novel and Simple Preparation Method of Matrix-Type Composite Particles for Controlled Drug Release by Mechanical Action2004

    • Author(s)
      S.Kondo, et al.
    • Journal Title

      Chem.Pharm.Bull. 52(4)

      Pages: 488-489

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Mechanism of cloudy surface generation on Si wafer employing numerically controlled local dry etching (NC-LDE)2004

    • Author(s)
      M.Yanagisawa, et al.
    • Journal Title

      Jpn.J App.Phys. 43(1)

      Pages: 19-22

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Electrophoresis of long deoxyribonucleic acid in curved channels : The effect of channel width on migration dynamics2004

    • Author(s)
      M.Ueda, et al.
    • Journal Title

      Journal of Applied Physics 96(5)

      Pages: 2973-2944

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Curbature Entropy Trapping of Long DNA under Hydrodynamic Flows in Microfluidic Devices2004

    • Author(s)
      M.Ueda, et al.
    • Journal Title

      Journal of Applied Physics 43(4)

      Pages: 1649-1650

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Mechanochemical Solid-State Polymerization (XI) : Effect of Water-Insoluble Pharmaceutical Aids on Drug Release from Mechanically Synthesized Polymeric Prodrugs2004

    • Author(s)
      S.Kondo, et al.
    • Journal Title

      Chem.Pharm.Bull. 52(11)

      Pages: 1302-1306

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] 特集:健康を守る21世紀の静電気応用技術 プラズマの医薬品工学への応用2003

    • Author(s)
      葛谷昌之
    • Journal Title

      静電気学会誌 28(2)

      Pages: 101-107

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Generation of Integrated Atomospheric-Pressure Microplasma2003

    • Author(s)
      K.Taniguchi, et al.
    • Journal Title

      Jpn. J. Phys. 42(3B)

      Pages: 6584-6589

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Deep Dry Etching of Quartz Plate Over 100μm in Depth Employing Ultra-Thick Photoresist (SU-8)2003

    • Author(s)
      T.Fukasawa, et al.
    • Journal Title

      Jpn. J. Appl. Phys. 42

      Pages: 3702-3706

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Deep dry etching of borosilicate glass using fluorine-based high-density plasmas for microelectrochemical system fabrication2003

    • Author(s)
      T.Ichiki, et al.
    • Journal Title

      J. Vac. Sci. Tech. B 21(5)

      Pages: 2188-2192

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Numerically Controlled Dry Etching Technology for Flattening of Si Wafer which Employs SF_6/H_2 Downstream Plasma2003

    • Author(s)
      M.Yanagisawa, et al.
    • Journal Title

      Jpn. J. Appl. Phys. 41

      Pages: 2791-2795

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Biochip Which Examines Hepatic Function by Employing Colorimetric Method2003

    • Author(s)
      A.Oki, et al.
    • Journal Title

      Jpn. J. Appl. Phys. 42(3B)

      Pages: L342-L345

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Healthcare Chip Checking Health Condition from Analysis of Trace Blood Collected by Painless Needle2003

    • Author(s)
      A.Pki, et al.
    • Journal Title

      Jpn. Appl. Phys. 42(20)

      Pages: 3722-3727

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Low-voltage electroosmosis pump for stand-alone microfluidics devices2003

    • Author(s)
      Y.Takamura, et al.
    • Journal Title

      Electrophoresis 24

      Pages: 185-192

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Fluorescence Emission Control of Long Molecules Adsorbed on Microelectrode Surface by External Voltage2003

    • Author(s)
      M.Ueda, et al.
    • Journal Title

      Jpn. J. Appl. Phys. 42

      Pages: L788-L790

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] 21th century Applied Technology for the Protection of people's health2003

    • Author(s)
      M.Kuzuya
    • Journal Title

      SEIDENKI GAKKAI-SHI 28(2)

      Pages: 101-107

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Healthcare Chip for Checking Health Condition from Analysis of Trace Blood Collected by Painless Needle2003

    • Author(s)
      A.Oki, et al.
    • Journal Title

      Jpn.J.Appl.Phys. 42

      Pages: 3722-3727

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Biochip Which Examines Hepatic Function by Employing Colorimetric Method2003

    • Author(s)
      A.Oki, et al.
    • Journal Title

      Jpn.J.Appl.Phys. 42(3B)

      Pages: L342-L345

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Generation of Integrated Atomospheric-Pressure Microplasma2003

    • Author(s)
      K.Taniguchi, et al.
    • Journal Title

      Jpn.J.Appl.Phys. 42(3B)

      Pages: 6584-6589

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Deep dry etching of borosilicate glass using fluorine-based high-density plasmas for micro electrochemical system fabrication2003

    • Author(s)
      T.Ichiki, et al.
    • Journal Title

      J.Vac.Sci.Tech.B 21(5)

      Pages: 2188-2192

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Deep Dry Etching of Quartz Plate Over 100 μm in Depth Employing Ultra-Thick Photoresist (SU-8)2003

    • Author(s)
      T.Fukasawa, et al.
    • Journal Title

      Jpn.J.Appl.Phys. 42

      Pages: 3702-3706

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Localized Removal of a Photoresist by Atmospheric Pressure Micro-plasma Jet Using RF Corona Discharge2003

    • Author(s)
      H.Yoshiki, et al.
    • Journal Title

      Jpn.J.Appl.Phys. 41

      Pages: 5797-5798

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Generation of a capacitively coupled microplasma and its application2002

    • Author(s)
      H.Yoshiki, et al.
    • Journal Title

      J. Vac. Sci. Technol. A20(1)

      Pages: 24-29

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Inner wall modification of a poly (ethylene terephthalate) (PET) capillary by 13.56 MHz capacitively coupled microplasma2002

    • Author(s)
      H.Yoshiki, et al.
    • Journal Title

      Thin solid films 407

      Pages: 156-162

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Dry Cleaning Technology for Removal of Silicon Native Oxide Employing Hot NH_3/NF_3 Exposure2002

    • Author(s)
      H.Ogawa, et al.
    • Journal Title

      Jpn. J. Appl. Phys. 41

      Pages: 5349-5358

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Localized Removal of a Photoresist by Atmospheric Pressure Micro-plasma Jet Using RF Corona Discharge2002

    • Author(s)
      H.Yoshiki, et al.
    • Journal Title

      Jpn. J. Appl. Phys. 41

      Pages: 5797-5798

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Immunoelectrophoresis of red bllod cells performed on microcapillary chips2002

    • Author(s)
      T.Ichiki, et al.
    • Journal Title

      Electrophoresis 23

      Pages: 2029-2034

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Microchip Technologies for the Analysis of Biological Cells2002

    • Author(s)
      T.Ichiki, et al.
    • Journal Title

      J. Photopolymer Sci. Technol 15

      Pages: 487-492

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Miniaturied Capillary Electrophoresis fabricated on Pyrex Glass Chips Using Deep Dry Etching and Anodic Bonding2002

    • Author(s)
      T.Ishiki, et al.
    • Journal Title

      J. Photopolymer Sci. Technol. 15

      Pages: 311-316

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] pH Change of buffer solution in a microcapillary chip and its suppression2002

    • Author(s)
      A.oki, et al.
    • Journal Title

      Electrophoresis 23

      Pages: 2860-2864

    • Description
      「研究成果報告書概要(和文)」より
  • [Journal Article] Dry Cleaning Technology for Removal of Silicon Native Oxide Employing Hot NH_3/NF_3 Exposure2002

    • Author(s)
      H.Ogawa, et al.
    • Journal Title

      Jpn.J.Appl.Phys. 41

      Pages: 5349-5358

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] pH Change of buffer solution in a microcapillary chip and its suppression2002

    • Author(s)
      A.Oki, et al.
    • Journal Title

      Electrophoresis 23

      Pages: 2860-2864

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Numerically Controlled Dry Etching Technology for Flattening of Si Wafer which Employs SF_6/H_2 Downstream Plasma2002

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      M.Yanagisawa, et al.
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      Jpn.J.Appl.Phys. 41

      Pages: 2791-2795

    • Description
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  • [Journal Article] Generation of a capacitively coupled microplasma and its application2002

    • Author(s)
      H.Yoshiki, et al.
    • Journal Title

      J.Vac.Sci.Technol. A20(1)

      Pages: 24-29

    • Description
      「研究成果報告書概要(欧文)」より
  • [Journal Article] Inner wall modification of a poly(ethylene terephthalate) (PET) capillary by 13.56 MHz capacitively coupled microplasma2002

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    • Journal Title

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      Pages: 156-162

    • Description
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  • [Journal Article] Microchip Technologies for the Analysis of Biological Cells2002

    • Author(s)
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    • Journal Title

      J.Photopolymer Sci.Technol. 15

      Pages: 487-492

    • Description
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  • [Journal Article] Miniaturized Capillary Electrophoresis Fabricated on Pyrex Glass Chips Using Deep Dry Etching and Anodic Bonding2002

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    • Journal Title

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      Pages: 311-316

    • Description
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    • Description
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  • [Book] バイオナノテクノロジー2004

    • Author(s)
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    • Total Pages
      224
    • Publisher
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    • Description
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  • [Book] Bio-nano Technology2004

    • Author(s)
      Y.Horiike, K.Kataoka, et al.
    • Publisher
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    • Description
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  • [Book] はじめての半導体洗浄技術2002

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    • Total Pages
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    • Publisher
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    • Description
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    • Author(s)
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    • Description
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Published: 2006-07-11  

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