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2017 Fiscal Year Final Research Report

Establishment of piezoelectric films with large piezoelectric response using reversible clamp effect from the substrates

Research Project

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Project/Area Number 15H04121
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field Inorganic materials/Physical properties
Research InstitutionTokyo Institute of Technology

Principal Investigator

FUNAKUBO Hiroshi  東京工業大学, 物質理工学院, 教授 (90219080)

Co-Investigator(Kenkyū-buntansha) 清水 荘雄  東京工業大学, 物質理工学院, 助教 (60707587)
Project Period (FY) 2015-04-01 – 2018-03-31
Keywords誘電体膜 / 圧電MEMS
Outline of Final Research Achievements

(100)/(001)-oriented tetragonal Pb(Zr0.5Ti0.5)O3 epitaxial films with 2 micro meter in thickness were grown on Si, SrTiO3 and CaF2 substrates. Volume fraction of (001) orientation, Vc, changed by the thermal strain above Curie temperature. Vc value increased by the pooling process for all films. There two contributions to the piezoelectric response were observed for all films by the XRD observation under applied an electric field.
Orientation change from (001) to (100) orientation plays a main role for the piezoelectric response. In addition, films on Si substrates show the maximum orientation change and macroscopic piezoelectric response.

Free Research Field

工学 酸化物機能材料

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Published: 2019-03-29  

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