Development of an high-performance acoustic comb type digital AE sensor using LiNbO3

2017 Fiscal Year Final Research Report

• Project/Area Number: 15K05767
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Research Field: Design engineering/Machine functional elements/Tribology
• Research Institution: Hachinohe Institute of Technology
• Principal Investigator: Muto Kazuo 八戸工業大学, 大学院工学研究科, 准教授 (90530874)
• Project Period (FY): 2015-04-01 – 2018-03-31
• Keywords: 安全・安心設計 / 非破壊検査 / アコースティック・エミッション / センサ / ニオブ酸リチウム / カンチレバー / デジタル式 / 振動・変位検出

Outline of Final Research Achievements

In this research, we firstly touched upon the research and development process of the AE sensor so far (development of broadband type AE sensor with fast response over DC -10 MHz and development of digital AE sensor with small cantilever by MEMS technology) The outline, design and its simulation method of high performance developed acoustic comb type AE sensor using LiNbO 3 (lithium niobate) material were studied.
Next. We studied the fabrication process of LiNbO 3 integral type cantilever array of the AE sensor and made it prototype.
Finally, we compare the designed calculation value of the prototype acoustic comb (comb) type digital type digital AE sensor with the basic characteristics and verified the evaluation method such as its electrical characteristics and put it into practical use.

Free Research Field

設計工学・機械要素・トライボロジー