2010 Fiscal Year Final Research Report
Intrinsic Hetero-interface Structures and Their Formation
| Project/Area Number |
18106001
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| Research Category |
Grant-in-Aid for Scientific Research (S)
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| Allocation Type | Single-year Grants |
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| Research Field |
Thin film/Surface and interfacial physical properties
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| Research Institution | Nagoya University |
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Principal Investigator |
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| Co-Investigator(Kenkyū-buntansha) |
TABUCHI Masao 名古屋大学, シンクロトロン光研究センター, 特任教授 (90222124)
UJIHARA Toru 名古屋大学, 工学研究科, 教授 (60312641)
FUCHI Shingo 名古屋大学, 工学研究科, 助教 (60432241)
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| Project Period (FY) |
2006 – 2010
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| Keywords | ヘテロ界面 / 結晶成長 / CTR散乱法 / X線構造解析 |
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| Research Abstract |
1) The X-ray CTR scattering measurement system that uses laboratory X-ray sources and that can investigate the buried interfaces was fabricated.
2) The hetero-structure formation was observed in situ by X-ray diffraction, X-ray CTR scattering, and X-ray reflectivity.
3) The hetero-structure and device structure properties were correlated.
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Research Products
(26 results)
