Growth of dislocation-free GaN on Si substrates for long-life optical devices in opto-electronic integrated circuits

2008 Fiscal Year Self-evaluation Report

• Project/Area Number: 18360155
• Research Category: Grant-in-Aid for Scientific Research (B)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Electronic materials/Electric materials
• Research Institution: Meijo University
• Principal Investigator: NARITSUKA Shigeya Meijo University, 理工学部, 教授 (80282680)
• Project Period (FY): 2006 – 2009
• Keywords: 電気・電子材料 / 光・電子集積回路

Research Abstract

良好な光素子の実現が可能な無転位ナイトライド系材料をSi基板上に成長すること、成長した無転位領域を利用して、ナイトライド系材料による光素子を作製することを目的とする。
そのため、(1) 有機金属原料を使用できるよう分子線結晶成長装置を改造し、(2) 低温での選択成長条件を導出し、(3) 低角入射マイクロチャンネルエピタキシー(LAIMCE)をおこなう。

Research Products

• [Journal Article] Effect of crystallographic orientation of microchannel on low-angle incidence microchannel epitaxy on(001)GaAs substrate (2008)
  • Author(s): S. Naritsuka, S. Matsuoka, Y. Ishida, T. Maruyama
  • Journal Title: Journal of Crystal Growth 311 Pages: 1778-1782
  • Peer Reviewed
• [Journal Article] Optimization of initial growth in low-angle incidence microchannel epitaxy of GaAs on(001)GaAs substrates (2008)
  • Author(s): S. Naritsuka, S. Matsuoka, Y. Yamashita, T. Maruyama
  • Journal Title: Journal of Crystal Growth 310 Pages: 1571-1575
  • Peer Reviewed
• [Journal Article] GaAs/c-GaN/GaAs Multi-Layered Structure Fabricated by Using RF-Plasma Source Nitridation Technique (2007)
  • Author(s): Y. Yamamoto, M. Mori, H. Otsubo, T. Maruyama and S. Naritsuka
  • Journal Title: Phys.Stat.sol. No.7 Pages: 2326-2329
  • Peer Reviewed
• [Presentation] Effect of crystal orientation of microchannel on low-angle incidence microchannel epitaxy on(001)GaAs substrate (2008)
  • Author(s): Shigeya Naritsuka, Shuji Matsuoka, Yuji Ishida and Takahiro Maruyama
  • Organizer: International Conference on Molecular Beam Epitaxy(MBE2008)
  • Place of Presentation: Vancouver,Canada
  • Year and Date: 20080000
• [Presentation] Growth Optimization of Low Angle Incidence Microchannel Epitaxy of GaAs layer on(001)GaAs substrates (2007)
  • Author(s): S. Naritsuka, S. Matsuoka, Y. Yamashita, Y. Yamamoto and T. Maruyama
  • Organizer: The 15th International Conference on Crystal Growth
  • Place of Presentation: Salt Lake City,Utah,USA
  • Year and Date: 20070000