2010 Fiscal Year Final Research Report
Development of laser-assisted wide angle three-dimensional atom probe and its application to atomic level characterization of true electronic devices
| Project/Area Number |
18GS0204
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| Research Category |
Grant-in-Aid for Creative Scientific Research
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| Allocation Type | Single-year Grants |
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| Research Institution | The University of Tokyo |
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Principal Investigator |
OWARI Masanori The University of Tokyo, 環境安全研究センター, 教授 (70160950)
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| Co-Investigator(Kenkyū-buntansha) |
TANIGUCHI Masahiro 金沢工業大学, バイオ・化学部応用化学科, 教授 (30250418)
NOJIMA Masashi 東京理科大学, 総合研究機構, 講師 (50366449)
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| Co-Investigator(Renkei-kenkyūsha) |
MAYAMA Norihito 東京工業大学, 資源化学研究所, 産学官連携研究員 (40508131)
IWATA Tatsuo 三重大学, 極限ナノエレクトロニクスセンター, 特定事業研究員 (20119647)
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| Project Period (FY) |
2006 – 2010
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| Keywords | ナノ構造化学 / 表面・界面ナノ構造 |
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| Research Abstract |
We developed three-dimensional atom probe(3DAP)that could visualize three-dimensionally the elemental identity and position of atoms in hundreds of cube nanometer in a material. Metals and carbonaceous materials were analyzed by using this method, and a new knowledge about laser ionization was obtained. Basic techniques for the three-dimensional analysis of real electronic devices were also established.
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Research Products
(10 results)
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[Journal Article]2010
Author(s)
N.Mayama, T.Iwata, M.Nojima, M.Taniguchi, M.Owari, 他10名
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Journal Title
Surf.Interface Anal. 42
Pages: 1616-1621
Peer Reviewed
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[Journal Article]2010
Author(s)
N.Mayama, H.Yoshida, T.Iwata, K.Sasakawa, A.Suzuki, Y.Hanaoka, Y.Morita, A.Kuroda, M.Owari
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Journal Title
Diam.Relat.Mater. 19
Pages: 946-949
Peer Reviewed
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[Journal Article]2009
Author(s)
N.Mayama, Y.Kajiwara, S.Mikami, S.Ito, T.Kaneko, T.Iwata, M.Owari
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Journal Title
Peer Reviewed
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