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2010 Fiscal Year Final Research Report

Development of Nano-phase Tomographic STEM

Research Project

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Project/Area Number 18GS0211
Research Category

Grant-in-Aid for Creative Scientific Research

Allocation TypeSingle-year Grants
Research InstitutionOsaka Electro-Communication University

Principal Investigator

IKUTA Takashi  Osaka Electro-Communication University, 工学部, 教授 (20103343)

Co-Investigator(Kenkyū-buntansha) HISAKA Masaki  大阪電気通信大学, 医療福祉工学部, 准教授 (40340640)
ICHIHASHI Mikio  名古屋大学, エコトピア科学研究所, 客員教授 (90345869)
USUKURA Jiro  名古屋大学, エコトピア科学研究所, 教授 (30143415)
KAWASAKI Tadahiro  名古屋大学, 工学研究科, 助教 (10372533)
KIMURA Yoshihide  大阪大学, 工学研究科, 准教授 (70221215)
OYE Toshjimi  名城大学, 理工学部, 教授 (30076632)
KODAMA Tetsuji  名城大学, 理工学部, 教授 (50262861)
MATSUTANI Takaomi  近畿大学, 理工学部, 講師 (00411413)
YASUE Tuneo  大阪電気通信大学, 情報通信工学部, 教授 (00212275)
Project Period (FY) 2006 – 2010
Keywords走査型透過電子顕微鏡 / 位相コントラスト / FE電子銃 / Csコレクター
Research Abstract

To realize nano-phase tomographic STEM, a novel amplitude/phase separation imaging technique with very long field of depth has been proposed. Four significant technical components, the magnetic field immersion type FE-electron gun, the compact aberration corrector, the annular objective stop and the annular detector array were studied and developed in the present study. We evaluated this new imaging technique by using a proto-type STEM newly developed in this project.

  • Research Products

    (54 results)

All 2011 2010 2009 2008 2007 2006 Other

All Journal Article (30 results) (of which Peer Reviewed: 18 results) Presentation (21 results) Remarks (1 results) Patent(Industrial Property Rights) (2 results)

  • [Journal Article] Characteristics of an optical fiber array detector for phase shift measurement in the STEM,2011

    • Author(s)
      T.Ishida, T.Kodama, K.Ogai, T.Ikuta
    • Journal Title

      Proceedings of the 8th International Symposium on Atomic Level Characterizations for New Materials and Devices '11 (ALC'11), held in Seoul, Korea

      Pages: 221-222

  • [Journal Article] 走査型透過電子顕微鏡への輪帯瞳を用いた電子光学システムの開発2010

    • Author(s)
      松谷貴臣,田中武雄,川崎忠寛,田屋昌樹,生田孝
    • Journal Title

      平成22年電気学会基礎・材料・共通部門大会論文集

      Pages: 482-485

  • [Journal Article] Simulation Study of a Hollow Cone-Shaped Probe in Aberration-Corrected STEM for High-resolution Tomography2010

    • Author(s)
      T.Kawasaki, T.Matsutani, T.Ikuta, M.Ichihashi, T.Tanji
    • Journal Title

      Ultramicroscopy Vol.110

      Pages: 1332-1337

    • Peer Reviewed
  • [Journal Article] Development of Parallel Image Detection System Using Annular Pupils for Scanning Transmission Electron Microscope2010

    • Author(s)
      Takaomi Matsutani, Masaki Taya, Takeo Tanaka, Yoshihide Kimura, Yoshizo Takai, Tadahiro Kawasaki, Mikio Ichihashi, Takashi Ikuta
    • Journal Title

      AIP Conference Proceedings Vol.1282

      Pages: 111-114

    • Peer Reviewed
  • [Journal Article] Development of Parallel Detection and Processing System using Multidetector Array in Scanning Transmission Electron Microscope with Annular Pupil2010

    • Author(s)
      T.Matsutani, M.Taya, T.Fujimura, H.Inui, T.Tanaka, Y.Kimura, Y.Takai, Kawasaki, M.Ichihashi, T.Ikuta
    • Journal Title

      Plasma Application and Hybrid Functionally Materials Vol.19

      Pages: 87-88

  • [Journal Article] Transmission and Scanning-transmission Microscopy using Annular Objective Pupil (Invited)2009

    • Author(s)
      生田孝
    • Journal Title

      Proceedings of the 7th International Symposium on Atomic Level Characterization for New Materials and Devices '09 (ALC'09), held in Maui, Hawaii, USA, 10AM02 (2009年12月10日発表)

      Pages: 395-399

  • [Journal Article] Development of Electron Optical System Using Annular Pupils for Scanning Transmission Electron Microscope2009

    • Author(s)
      T.Matsutani, M.Taya, T.Tanaka, Y.Kimura, Y.Takai, T.Kawasaki, M.Ichihashi, T.Ikuta
    • Journal Title

      Proceedings of the 7th International Symposium on Atomic Level Characterizations for New Materials and Devices '09 (ALC'09), held in Maui, Hawaii, USA, 08P37 (2009年12月8日発表)

      Pages: 245-248

  • [Journal Article] Focal Depth Extension by Hollow-cone Illumination with Annular Pupils for 200kV-Scanning Transmission Electron Microscope Tomography2009

    • Author(s)
      T.Kawasaki, T.Matsutani, M.Taya, Y.Kimura, M.Ichihashi, T.Ikuta
    • Journal Title

      Advances in Applied Plasma Science

      Pages: 261-262

    • Peer Reviewed
  • [Journal Article] Annular Pupils for Electron Optics Able to Suppress High-Energy Electron Scattering Formed by Focused Ion Beam Technique2009

    • Author(s)
      T.Matsutani, M.Taya, T.Fujimura, H.Inui, T.Tanaka, Y.Kimura, Y.Takai, T.Kawasaki, M.Ichihashi, T.Ikuta
    • Journal Title

      Advances in Applied Plasma Science Vol.7

      Pages: 259-260

    • Peer Reviewed
  • [Journal Article] (講座)結像光学系の3次元結像特性(Three-dimensional Imaging Characteristics in Imaging Optical Systems)2009

    • Author(s)
      生田孝
    • Journal Title

      顕微鏡 Vol.44

      Pages: 121-129

    • Peer Reviewed
  • [Journal Article] Evaluation of annular pupil for scanning transmission electron microscope formed by focused ion beam technique2009

    • Author(s)
      Takaomi Matsutani, Masaki Taya, Takashi Ikuta, Tetsuya Fujimura, Hirohiko Inui, Takeo Tanaka, Ippei Shimizu, Yoshihide Kimura, Yoshizo Takai, Tadahiro Kawasaki, Mikio Ichihashi
    • Journal Title

      Vacuum Vol.83

      Pages: 201-204

    • Peer Reviewed
  • [Journal Article] Wave Field Restoration using Focal-depth Extension Techniques under dynamic hollow-cone illumination2008

    • Author(s)
      Masaki Taya, Takashi Ikuta, Yoshizo Takai
    • Journal Title

      Optik Vol.119

      Pages: 153-160

    • Peer Reviewed
  • [Journal Article] Aberration Analysis of Cs-corrector System with Twin Hexapoles and Transfer Lens Doublet in Scanning Transmission Electron Microscope by Simple Ray Tracing Based on Geometrical Optics2008

    • Author(s)
      川崎忠寛, 市橋幹雄, 松谷貴臣, 木村吉秀, 生田孝
    • Journal Title

      Surf.Interface Analysis Vol.40

      Pages: 1732-1735

    • Peer Reviewed
  • [Journal Article] 走査電子顕微鏡のための新しい収差補正法2008

    • Author(s)
      小粥啓子,田屋昌樹,松谷貴臣,生田孝,田中武雄,高井義造
    • Journal Title

      金属 Vol.78

      Pages: 1075-1078

    • Peer Reviewed
  • [Journal Article] Effects of Coulomb Interaction between Photoelectrons on XPEEM2007

    • Author(s)
      Tuneo Yasue, A.Nakaguchi, M.Hashimoto, T.O.Mentes, A.Locatelli, E.Bauer, Takanori Koshikawa
    • Journal Title

      Proceedings of the 6th International Symposium on Atomic Level Characterizations for New Materials and Devices '07 (ALC'07), held in Kanazawa, Japan, TuP-33 (2007年10月30日発表)

      Pages: 207-211

  • [Journal Article] Development of Annular Pupil for Electron Optics by Focused Ion Beam Technique2007

    • Author(s)
      Takaomi Matsutani, Masaki Taya, Takashi Ikuta, Tetsuya Fujimura, Hrihiko Inui, Takeo Tanaka, Yoshihide Kimura, Yoshizo Takai, Tadahiro Kawasaki, Mikio Ichihashi
    • Journal Title

      Proceedings of the 6th International Symposium on Atomic Level Characterizations for New Materials and Devices '07 (ALC'07), held in Kanazawa, Japan, TuP-13 (2007年10月30日発表)

      Pages: 147-150

  • [Journal Article] Development of an Aberration-free Phase Imaging System using a Detector Array and an Annular Pupil in Scanning Transmission Electron Microscopy2007

    • Author(s)
      Masaki Taya, Takashi Ikuta, Takaomi Matsutani, Makoto Fujiwara, Takeo Tanaka, Keiko Ogai, Yoshihito Harada, Hidekazu Saito, Yoshizo Takai
    • Journal Title

      Proceedings of the 6th International Symposium on Atomic Level Characterizations for New Materials and Devices '07 (ALC'07), held in Kanazawa, Japan, TuP-7 (2007年10月30日発表)

      Pages: 132-135

  • [Journal Article] Interpretation of Cs-corrector System with Twin Hexapoles and Transfer Doublet based on Geometrical Optics Theory2007

    • Author(s)
      Tadahiro Kawasaki, Mikio Ichihashi, Taisuke Nakamura, Takeshi Kawasaki, Takaomi Matsutani, Yoshihide Kimura, Takashi Ikuta
    • Journal Title

      Proceedings of the 6th International Symposium on Atomic Level Characterizations for New Materials and Devices '07 (ALC'07), held in Kanazawa, Japan, TuP-2 (2007年10月30日発表)

      Pages: 119-122

  • [Journal Article] Phase Imaging Microscopy with Increased Depth of Focus by TEM and STEM (Invited)2007

    • Author(s)
      生田孝, 市橋幹雄
    • Journal Title

      Proceedings of the 6th International Symposium on Atomic Level Characterizations for New Materials and Devices '07 (ALC'07), held in Kanazawa, Japan, MoA-2 (2007年10月29日発表)

      Pages: 56-60

  • [Journal Article] Development of a Parallel Detection and Processing System using a Multidetector Array for Wave Restoration in Scanning Transmission Electron Microscopy2007

    • Author(s)
      Masaki Taya, Takaomi Matsutani, Takashi Ikuta, Hidekazu Saito, Keiko Ogai, Yoshihito Harada, Takeo Tanaka, Yoshizo Takai
    • Journal Title

      Rev.Sci.Instrum. Vol.78

      Pages: 083705-1-083705-5

    • Peer Reviewed
  • [Journal Article] Aberration Analysis of Cs-corrector System with Twin Hexapoles and Transfer Lens Doublet in Scanning Transmission Electron Microscope by Simple Ray Tracing Based on Geometrical Optics2007

    • Author(s)
      川崎忠寛, 市橋幹雄, 松谷貴臣, 木村吉秀, 生田孝
    • Journal Title

      Proceedings of the International Symposium on EcoTopia Science Vol.1

      Pages: 1245-1247

  • [Journal Article] 集束イオンビームを用いた電子光学系輪帯瞳用アパーチャの作製2007

    • Author(s)
      藤原誠,田中武雄,志水一平,松谷貴臣,日坂真樹,安江常夫,生田孝,田屋昌樹,木村吉秀,高井義造,川崎忠寛,市橋幹雄
    • Journal Title

      真空(J.Vac.Soc.Jpn) Vol.50

      Pages: 639-643

    • Peer Reviewed
  • [Journal Article] Development of Annular Pupil for Scanning Transmission Electron Microscope by Focused Ion Beam Technique2007

    • Author(s)
      Takaomi Matsutani, Masaki Taya, Takashi Ikuta, Tetsuya Fujimura, Hrihiko Inui, Takeo Tanaka, Yoshihide Kimura, Yoshizo Takai, Tadahiro Kawasaki, Mikio Ichihashi
    • Journal Title

      Advances in Applied Plasma Science Vol.6

      Pages: 209-212

    • Peer Reviewed
  • [Journal Article] New Computer Simulation Software of Electron Trajectories for Evaluation of Magnetic Field Immersion-Type Field Emission Gun2007

    • Author(s)
      K.Tamura, T.Ikuta, R.Shimizu, M.Ichihashi
    • Journal Title

      Japanese J.of Appl.Phys. Vol.46

      Pages: 834-837

    • Peer Reviewed
  • [Journal Article] 反射型超音波変調スペックル光計測2007

    • Author(s)
      笹倉祐,日坂真樹
    • Journal Title

      生体医工学 Vol.45

      Pages: 235-241

    • Peer Reviewed
  • [Journal Article] Effective Resolution of Phase-contrast Images in X-ray Microscopy2006

    • Author(s)
      Y.Yamaguchi, R.Shimizu, T.Ikuta, T.Kikuchi, S.Takahashi
    • Journal Title

      Journal of Surface Analysis Vol.13

      Pages: 223-233

    • Peer Reviewed
  • [Journal Article] Anomalous Step Contrast in LEEM during Growth of Pb on W(110)2006

    • Author(s)
      T.Yasue, R.Amakawa, H.Shimizu, A.Nakaguchi, T.Koshikawa, E.Bauer
    • Journal Title

      Proceedings of the 5th International Symposium on Atomic Level Characterizations for New Materials and Devices ALC'05

      Pages: 680-683

  • [Journal Article] Ultrasound-modulated optical parallel speckle measurement with stroboscopic illumination in a coaxial reflection system2006

    • Author(s)
      M.Hisaka
    • Journal Title

      Applied Physics Letters Vol.88

      Pages: 033901-1-033901-3

    • Peer Reviewed
  • [Journal Article] Atomic Level Characterization Based on Defocus Modulation Electron Microscopy2006

    • Author(s)
      Y.Takai, M.Taya H.Chikada, Y.Kimura
    • Journal Title

      Microchimica Acta Vol.155

      Pages: 11-17

    • Peer Reviewed
  • [Journal Article] Cross-sectional image obtained from spherical aberration-free three-dimensional image intensity distribution in transmission electron microscopy2006

    • Author(s)
      M.Taya, T.Kawasaki, Y.Takai
    • Journal Title

      Journal of Electron Microscopy Vol.55

      Pages: 27-30

    • Peer Reviewed
  • [Presentation] S(T)EMアレイ検出器の試作2010

    • Author(s)
      小粥啓子,児玉哲司,生田孝
    • Organizer
      真空表面科学合同講演会予稿集(4P-097)
    • Place of Presentation
      大阪大学コンベンションセンター(2010年11月4日発表)
    • Year and Date
      20101100
  • [Presentation] 走査型透過電子顕微鏡への輪帯瞳を用いた電子光学システムの開発2010

    • Author(s)
      松谷貴臣,田中武雄,川崎忠寛,田屋昌樹,生田孝
    • Organizer
      平成22年電気学会基礎・材料・共通部門大会
    • Place of Presentation
      沖縄
    • Year and Date
      20100900
  • [Presentation] Development of Electron Optical System Using Annular Pupils for Scanning Transmission Electron Microscope by Focused Ion Beam2010

    • Author(s)
      Takaomi Matsutani, Tsuchika Yasumoto, Takeo Tanaka, Tadahiro Kawasaki, Mikio Ichihashi, Takashi Ikuta
    • Organizer
      17th International Conference on Ion Beam Modification of Materials
    • Place of Presentation
      Montreal, Canada
    • Year and Date
      20100822-20100827
  • [Presentation] 収差補正STEMにおける輪帯絞りを用いたプローブ形成-シミュレーション解析-2010

    • Author(s)
      川崎忠寛,松谷貴臣,生田孝,市橋幹雄,丹司敬義
    • Organizer
      日本物理学会第65回年次大会
    • Place of Presentation
      岡山大学(2010年3月21日発表)
    • Year and Date
      20100320-20100323
  • [Presentation] Development of Parallel Detection and Processing System using Multidetector Array in Scanning Transmission Electron Microscope with Annular Pupil2010

    • Author(s)
      Takaomi Matsutani, Masaki Taya, Takeo Tanaka, Yoshihide Kimura, Yoshizo Takai, Tadahiro Kawasaki, Mikio Ichihashi, Takashi Ikuta
    • Organizer
      The 17th Annual Meeting of IAPS International Workshop 2010 in Busan
    • Place of Presentation
      Busan, Korea
    • Year and Date
      2010-02-26
  • [Presentation] 集束イオンビームによる走査型透過電子顕微鏡用輪帯アパーチャの開発2009

    • Author(s)
      松谷貴臣,田中武雄,木村吉秀,高井義造,川崎忠寛,市橋幹雄,生田孝
    • Organizer
      第50回真空に関する連合講演会
    • Place of Presentation
      学習院大学,東京(2009年11月5日発表)
    • Year and Date
      20091104-20091106
  • [Presentation] 磁場界浸型C-FE電子銃の開発(2)理論解析2009

    • Author(s)
      田村圭司,大西崇,渡辺 俊一,市橋幹雄
    • Organizer
      日本顕微鏡学会第65回学術講演会
    • Place of Presentation
      仙台国際センター(2009年5月27日発表)
    • Year and Date
      20090526-20090529
  • [Presentation] 磁場界浸型C-FE電子銃の開発(1)機構設計2009

    • Author(s)
      大西崇,田村圭司,渡辺俊一,大江俊美,市橋幹雄
    • Organizer
      日本顕微鏡学会第65回学術講演会
    • Place of Presentation
      仙台国際センター(2009年5月27日発表)
    • Year and Date
      20090526-20090529
  • [Presentation] 集束イオンビームによるテーパを有した電子光学系輪帯瞳の開発2009

    • Author(s)
      松谷貴臣,田中武雄,木村吉秀,高井義造,川崎忠寛,市橋幹雄,生田孝
    • Organizer
      平成21年電気学会全国大会
    • Place of Presentation
      北海道
    • Year and Date
      20090300
  • [Presentation] Formation of High-energy Electron Scattering Suppressible Annular Pupils for Electron Optics by Focused Ion Beam Technique2008

    • Author(s)
      Takaomi Matsutani, Masaki Taya, Takashi Ikuta, Tetsuya Fujimura, Hirohiko Inui, Takeo Tanaka, Yoshihide Kimura, Yoshizo Takai, Tadahiro Kawasaki, Mikio Ichihashi, Toshimi Ohye
    • Organizer
      The 15th Annual Meeting of Institute of Applied Plasma Science
    • Place of Presentation
      held in Tairen, China
    • Year and Date
      20080514-20080516
  • [Presentation] 走査型透過電子顕微鏡における輪帯照明システムの開発2008

    • Author(s)
      松谷貴臣,田屋昌樹,生田孝,田中武雄,木村吉秀,高井義造,川崎忠寛,市橋幹雄
    • Organizer
      日本顕微鏡学会第64回学術講演会
    • Place of Presentation
      京都
    • Year and Date
      20080500
  • [Presentation] Aberration-Free Imaging by Dynamic Hollow-cone Illumination in Transmission Electron Microscopy2008

    • Author(s)
      K.Kitade, H.Yoshimori, T.Ikuta, Y.Kimura, Y.Takai
    • Organizer
      Proc.of the 9th Asia-Pacific Microscopy Conference (APMC9)(2-7 Nov.)
    • Place of Presentation
      held in Jeju island, Korea
    • Year and Date
      20080000
  • [Presentation] Focal Depth Extension by Hollow-cone Illumination with Annular Pupil for STEM Tomography2008

    • Author(s)
      T.Kawasaki, T Matsutani, M.Taya, T.Ikuta
    • Organizer
      Proc.of the 9th Asia-Pacific Microscopy Conference (APMC9)(2-7 Nov.)
    • Place of Presentation
      held in Jeju island, Korea
    • Year and Date
      20080000
  • [Presentation] 3次元フーリエフィルタリング法と動的ホローコーン照明法の原理と応用2008

    • Author(s)
      生田孝
    • Organizer
      日本顕微鏡学会関西支部特別企画講演会-電子顕微鏡イメージング法の展開
    • Place of Presentation
      岡崎カンファレンスセンター
    • Year and Date
      2008-12-21
  • [Presentation] Restoration of Phase and Amplitude Components using Dynamic Follow-cone Illumination in Transmission Electron Microscopy2007

    • Author(s)
      H.Yoshimori, Masaki Taya, Takashi Ikuta, Yoshizo Takai
    • Organizer
      Proceedings of the 6th International Symposium on Atomic Level Characterizations for New Materials and Devices '07 (ALC'07)(TuP-8)
    • Place of Presentation
      held in Kanazawa, Japan(2007年10月30日発表)
    • Year and Date
      20071028-20071102
  • [Presentation] A Process for Exit Wave Restoration Using Through-focus Series2007

    • Author(s)
      N.Nomaguchi, Yoshihide Kimura, Yoshizo Takai
    • Organizer
      Proceedings of the 6th International Symposium on Atomic Level Characterizations for New Materials and Devices '07 (ALC'07)(TuP-9)
    • Place of Presentation
      held in Kanazawa, Japan(2007年10月30日発表)
    • Year and Date
      20071018-20071102
  • [Presentation] Development of Annular Pupil for Scanning Transmission Electron Microscope by Focused Ion Beam Technique2007

    • Author(s)
      Takaomi Matsutani, Masaki Taya, Takashi Ikuta, Makoto Fujiwara, Takeo Tanaka, Yoshihide Kimura, Yoshizo Takai, Tadahiro Kawasaki, Mikio Ichihashi
    • Organizer
      The 6th International Symposium on Applied Plasma Science
    • Place of Presentation
      held in Nikko, Japan(2007年9月27日発表)
    • Year and Date
      20070900
  • [Presentation] Observation of surface dynamic processes by LEEM/PEEM2007

    • Author(s)
      安江常夫
    • Organizer
      19th Int.Cong.On X-ray Optics and Microanalysis
    • Place of Presentation
      held in Kyoto, Japan(2007年9月19日発表)
    • Year and Date
      20070900
  • [Presentation] 集束イオンビームを用いた電子光学系輪帯照明用アパーチャの開発2007

    • Author(s)
      松谷貴臣,生田孝,田屋昌樹,高井義造,川崎忠寛,市橋幹雄,志水一平,藤原誠,田中武雄
    • Organizer
      2007年度春季第54回応用物理学関係連合講演会
    • Place of Presentation
      神奈川
    • Year and Date
      20070300
  • [Presentation] LEEM/PEEMにおける離散的クーロン効果2007

    • Author(s)
      安江常夫
    • Organizer
      放射光と表面電子顕微鏡-顕微ナノ材料科学の新しい進展-(分子研研究会)
    • Place of Presentation
      岡崎カンファレンスセンター
    • Year and Date
      2007-09-10
  • [Presentation] LEEM/PEEMにおけるMCPでの分解能劣化2007

    • Author(s)
      安江常夫
    • Organizer
      第68回応用物理学会学術講演会
    • Place of Presentation
      北海道工業大学
    • Year and Date
      2007-09-04
  • [Remarks] 日経産業新聞2007年4月6日p.8「微小構造3次元で観察、大阪電通大電子顕微鏡実用化へ」

  • [Patent(Industrial Property Rights)] 磁場界浸型電子銃及び電子線装置2010

    • Inventor(s)
      市橋幹雄,大西崇,渡辺俊一,田村圭司
    • Industrial Property Rights Holder
      株式会社日立ハイテクノロジーズ
    • Industrial Property Number
      特願2010-056095号
    • Filing Date
      2010-03-12
  • [Patent(Industrial Property Rights)] 電子銃2009

    • Inventor(s)
      市橋幹雄,大西崇,渡辺俊一,田村圭司
    • Industrial Property Rights Holder
      株式会社日立ハイテクノロジーズ
    • Industrial Property Number
      特願2009-123684号
    • Filing Date
      2009-05-22

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Published: 2012-01-26   Modified: 2016-04-21  

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