Development of silicon and nitrogen co-doped diamond-like carbon with high functionality

2020 Fiscal Year Final Research Report

• Project/Area Number: 18K04688
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Multi-year Fund
• Section: 一般
• Review Section: Basic Section 26020:Inorganic materials and properties-related
• Research Institution: Hirosaki University
• Principal Investigator: Nakazawa Hideki 弘前大学, 理工学研究科, 准教授 (90344613)
• Project Period (FY): 2018-04-01 – 2021-03-31
• Keywords: カーボン材料 / プラズマ化学気相成長法 / 電子・電気材料 / コーティング材料

Outline of Final Research Achievements

Diamond-like carbon (DLC) has a high mechanical hardness, high wear resistance, and low friction coefficient. Therefore, DLC films have industrial applications as protective hard coatings. In addition, DLC is of significant interest as a semiconductor material for soar cells. In this study, we have prepared silicon (Si) and nitrogen (N) doped DLC films and investigated correlations between the properties and the structure and chemical bonding. It was found that the addition of Si and N was very effective in improving the mechanical and tribological properties of the DLC films and developing their novel functions.

Free Research Field

薄膜工学、半導体工学

Academic Significance and Societal Importance of the Research Achievements

SiとNを添加したDLCはC原子とN原子の結合形態が3種類存在し、C、Si、N間の結合が多様であることから、化学結合状態を制御することでDLCの特性を幅広く変化させることができる。原子間結合制御によって、SiとNを添加したDLCの特性を向上させ、更には新たな機能を付与することで、高温環境下などの過酷な条件で用いられるコーティング材料や高機能電子材料などとして新たな応用展開が可能になると考えられる。