2009 Fiscal Year Final Research Report
In-situ real-space observation in next-generation nano-processes by using hyper-thermal molecular beams
| Project/Area Number |
19360336
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Material processing/treatments
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| Research Institution | Japan Atomic Energy Agency |
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Principal Investigator |
YOSHIGOE Akitaka Japan Atomic Energy Agency, 量子ビーム応用研究部門, 研究副主幹 (00283490)
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| Co-Investigator(Kenkyū-buntansha) |
TERAOKA Yuden 独立行政法人日本原子力研究開発機構, 量子ビーム応用研究部門, 研究主幹 (10343922)
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| Project Period (FY) |
2007 – 2009
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| Keywords | 超熱分子ビーム / ナノプロセス / 実空間"その場"観察 / 吸着 / 反応選択性 / プローブ顕微鏡 / 表面反応ダイナミクス |
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| Research Abstract |
We developed in-situ real-space observation method by using scanning tunneling microscope for applying next-generation nano-processes. With the complementary use of synchrotron radiation photoelectron spectroscopy, we have tried to confirm the spatial selectivity in the surface reactions induced by hyper-thermal molecular beam. We succeeded to obtain the atomic resolved-images of Si atoms of the surface such as Si(111)-7×7. It was also found that surface topography and morphology depending on translational kinetic energy of O_2 in the oxidation of Si(111)-7×7 surface at room temperature.
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