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2009 Fiscal Year Final Research Report

The fabrication of nano-structure by energy-controlled molecular-beam growth

Research Project

  • PDF
Project/Area Number 19560015
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Applied materials science/Crystal engineering
Research InstitutionUniversity of Miyazaki

Principal Investigator

OZEKI Masashi  University of Miyazaki, 工学部, 教授 (70336288)

Co-Investigator(Kenkyū-buntansha) FUKUYAMA Atuhiko  宮崎大学, 工学部, 准教授 (10264368)
MAEDA Koji  宮崎大学, 工学部, 准教授 (50219268)
Project Period (FY) 2007 – 2009
Keywords結晶成長 / ナノ構造 / 超音速分子線 / GaAs
Research Abstract

The new fabrication technique of the GaAs nano-structure was studied by using the energy-controlled source molecules. The best gallium and arsenic sources for this purpose were triisobutylgallium and trisdimethylaminoarsine, respectively. These molecules were injected onto important crystal surfaces and the growth processes were analyzed. The results suggested that the selective growth toward the some crystal axes could be carried out by controlling the incident direction of the source molecules.

  • Research Products

    (5 results)

All 2009 2008 2007

All Journal Article (3 results) (of which Peer Reviewed: 3 results) Presentation (2 results)

  • [Journal Article] Dy n ami c a l b e h a v i o r o f me t h y l-c h l o r i d e o n GaAs ( 0 0 1 )2009

    • Author(s)
      M. Oz e k i, M. Tomi k awa, N. On i t s u k a
    • Journal Title

      Ma t e r i a l s S c i e n c e a n d E n g i n e e r i n g B 165

      Pages: 107-110

    • Peer Reviewed
  • [Journal Article] D i s s o c i a t i v e a d s o r p t i o n o f t r ime h y l a l umi n um a n d wa t e r o n a l umi n um o x i d e s u r f a c e2009

    • Author(s)
      M. Oz e k i, T. Ha r a g u c h i, K. Hi r a k awa, K. U wa i
    • Journal Title

      S u r f a c e He t e r o g e n e i t y E f f e c t s i n Ad s o r p t i o n a n d C a t a l y s i s o n S o l i d 7

      Pages: 2 0

    • Peer Reviewed
  • [Journal Article] E t c h i n g r e a c t i o n o f me t h y l c h l o r i d e mo l e c u l e o n t h e Ga As ( 0 0 1 )-2 x 4 s u r f a c e2007

    • Author(s)
      M. Oz e k i, Y. Iwa s a, Y. S h imi z u
    • Journal Title

      Ap p l i e d S u r f a c e S c i e n c e 253,No13

      Pages: 5 9 1 4-5 9 1 9

    • Peer Reviewed
  • [Presentation] Di s s o c i a t i v e a d s o r p t i o n o f TMA o n Al 2O32009

    • Author(s)
      M. Oz e k i, T. Ha r a g u c h i, K. Hi r a k awa, K. Uwa i
    • Organizer
      I S SHAC- 2 0 0 9
    • Place of Presentation
      Kazimierz Dolny/Poland
    • Year and Date
      2009-07-07
  • [Presentation] Surface dynamics of methylchloride on GaAs(00 1)2008

    • Author(s)
      M. Ozeki, M. Tomikawa, N. Onitsuka
    • Organizer
      EXMATEC 2008
    • Place of Presentation
      Poland
    • Year and Date
      2008-06-03

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Published: 2011-06-18   Modified: 2016-04-21  

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