The fabrication of nano-structure by energy-controlled molecular-beam growth

• Project/Area Number: 19560015
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Applied materials science/Crystal engineering
• Research Institution: University of Miyazaki
• Principal Investigator: OZEKI Masashi University of Miyazaki, 工学部, 教授 (70336288)
• Co-Investigator(Kenkyū-buntansha): FUKUYAMA Atuhiko 宮崎大学, 工学部, 准教授 (10264368) ; MAEDA Koji 宮崎大学, 工学部, 准教授 (50219268)
• Project Period (FY): 2007 – 2009
• Project Status: Completed (Fiscal Year 2009)
• Budget Amount: ¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000); Fiscal Year 2009: ¥1,690,000 (Direct Cost: ¥1,300,000、Indirect Cost: ¥390,000); Fiscal Year 2008: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000); Fiscal Year 2007: ¥1,560,000 (Direct Cost: ¥1,200,000、Indirect Cost: ¥360,000)
• Keywords: 結晶成長 / ナノ構造 / 超音速分子線 / GaAs / 微細構造 / 選択成長 / 塩化メチル / ガリウム砒素

Research Abstract

The new fabrication technique of the GaAs nano-structure was studied by using the energy-controlled source molecules. The best gallium and arsenic sources for this purpose were triisobutylgallium and trisdimethylaminoarsine, respectively. These molecules were injected onto important crystal surfaces and the growth processes were analyzed. The results suggested that the selective growth toward the some crystal axes could be carried out by controlling the incident direction of the source molecules.

Research Products

• [Journal Article] Dy n ami c a l b e h a v i o r o f me t h y l-c h l o r i d e o n GaAs ( 0 0 1 ) (2009)
  • Author(s): M. Oz e k i, M. Tomi k awa, N. On i t s u k a
  • Journal Title: Ma t e r i a l s S c i e n c e a n d E n g i n e e r i n g B 165 Pages: 107-110
  • Peer Reviewed
• [Journal Article] D i s s o c i a t i v e a d s o r p t i o n o f t r ime h y l a l umi n um a n d wa t e r o n a l umi n um o x i d e s u r f a c e (2009)
  • Author(s): M. Oz e k i, T. Ha r a g u c h i, K. Hi r a k awa, K. U wa i
  • Journal Title: S u r f a c e He t e r o g e n e i t y E f f e c t s i n Ad s o r p t i o n a n d C a t a l y s i s o n S o l i d 7 Pages: 20-20
  • Peer Reviewed
• [Journal Article] Dynamical behavior of methylchloride on GaAs(001) (2009)
  • Author(s): M.Ozeki
  • Journal Title: Materials Science and Engineering B 165 Pages: 107-110
  • NAID: 110006881388
  • Peer Reviewed
• [Journal Article] Dissociative adsorption of trim ehylaluminum and water on aluminum oxide surface (2009)
  • Author(s): M.Ozeki
  • Journal Title: Surface Heterogeneity Effects in Adsorption and Catalysis on Solid 7 Pages: 20-23
  • Peer Reviewed
• [Journal Article] Surface dynamics of methylchloride on GaAs (001) (2009)
  • Author(s): M. Ozeki
  • Journal Title: Expert Evaluation & Control of Compound Semi- conductor Materials & Technologies 9 Pages: 179-205
  • Peer Reviewed
• [Journal Article] Dynamical behavior of methylchloride on GaAs (001) (2009)
  • Author(s): 尾関雅志
  • Journal Title: 宮崎大学工学部紀要 37 Pages: 135-142
  • NAID: 110006881388
• [Journal Article] E t c h i n g r e a c t i o n o f me t h y l c h l o r i d e mo l e c u l e o n t h e Ga As ( 0 0 1 )-2 x 4 s u r f a c e (2007)
  • Author(s): M. Oz e k i, Y. Iwa s a, Y. S h imi z u
  • Journal Title: Ap p l i e d S u r f a c e S c i e n c e 253,No13 Pages: 5914-5919
  • Peer Reviewed
• [Journal Article] Etching reaction of methylchloride molecule on the GaAs (001)-2x4 surface (2007)
  • Author(s): M. Ozeki
  • Journal Title: Applied Surface Science 253 Pages: 5914-5919
  • Peer Reviewed
• [Presentation] Di s s o c i a t i v e a d s o r p t i o n o f TMA o n Al 2O3 (2009)
  • Author(s): M. Oz e k i, T. Ha r a g u c h i, K. Hi r a k awa, K. Uwa i
  • Organizer: I S SHAC- 2 0 0 9
  • Place of Presentation: Kazimierz Dolny/Poland
  • Year and Date: 2009-07-07
• [Presentation] Dissociative adsorption of TMA on Al_2O_3 (2009)
  • Author(s): M.Ozeki
  • Organizer: ISSHAC-7
  • Place of Presentation: Kazimierz Dolny/Poland
  • Year and Date: 2009-07-07
• [Presentation] GaAs (001)表面上の塩化メチル分子の動的振舞い (2008)
  • Author(s): 尾関雅志
  • Organizer: 九州応用物理学会
  • Place of Presentation: 宮崎大学
  • Year and Date: 2008-11-30
• [Presentation] Surface dynamics of methylchloride on GaAs(00 1) (2008)
  • Author(s): M. Ozeki, M. Tomikawa, N. Onitsuka
  • Organizer: EXMATEC 2008
  • Place of Presentation: Poland
  • Year and Date: 2008-06-03
• [Presentation] Surface dynamics of methylchloride on GaAs (001) (2008)
  • Author(s): M. Ozeki
  • Organizer: EXMATEC 2008
  • Place of Presentation: Poland Lodz
  • Year and Date: 2008-06-03