2021 Fiscal Year Final Research Report
EUV Wavefront Synthesizer for Real-Time and Extended Depth-of-Focus Imaging
| Project/Area Number |
19K05314
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Multi-year Fund |
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| Section | 一般 |
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| Review Section |
Basic Section 30020:Optical engineering and photon science-related
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| Research Institution | Tokyo Polytechnic University |
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Principal Investigator |
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| Co-Investigator(Kenkyū-buntansha) |
原田 哲男 兵庫県立大学, 高度産業科学技術研究所, 准教授 (30451636)
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| Project Period (FY) |
2019-04-01 – 2022-03-31
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| Keywords | 多層膜ミラー / 超深度イメージング / ポリマーブレンド |
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| Outline of Final Research Achievements |
To realize extended focal-depth imaging by the wave-front coding method in the extreme ultraviolet (EUV) region, the development of a "wave front synthesizer" that can modulate low-order aberrations on the wave front of the imaging objective is primary required. To realize this synthesizer, the following were studied in this project. For dynamic modulation of low-order aberration, we searched for a novel optical design to control the wavefront by applying decenters, tilts and load deformation to two aspherical mirrors, and obtained practical solutions. Then, a prototype objective mirror was installed in the point diffraction interferometer to experimentally modulate the low-order aberration term, and it was successfully demonstrated that the wavefront can be controlled with an accuracy bellow 1 nm.
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| Free Research Field |
X線光学、応用光学
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| Academic Significance and Societal Importance of the Research Achievements |
研究代表者は、EUV顕微法が拓く新領域として、軽元素で顕著な元素コントラストを活用した、ポリマー試料の合成・破壊過程の実時間・ナノイメージングを想定している。そのためには、厚い試料の実時間観察に好適なWFCの実現が強く求められている。研究代表者は、上述の10年に渡る開発で、理論(全幅探索設計法)・実験(点回折干渉計、デフォーマブル多層膜ミラー)の両面でEUV波面の0.1nm精度補正法を独自に開発している。本研究では、これらの基に「波面シンセサイザー」の基盤技術を確立し、新たな超深度EUVイメージング法の端緒としたい。
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