2021 Fiscal Year Final Research Report

Development of large arrays of superconducting detector for millimeter and sub-millimeter wave observation

Research Project

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Project/Area Number	19K14736
Research Category	Grant-in-Aid for Early-Career Scientists
Allocation Type	Multi-year Fund
Review Section	Basic Section 15020:Experimental studies related to particle-, nuclear-, cosmic ray and astro-physics
Research Institution	The University of Tokyo
Principal Investigator	Kiuchi Kenji 東京大学, 大学院理学系研究科(理学部), 助教 (00791071)
Project Period (FY)	2019-04-01 – 2022-03-31
Keywords	宇宙観測 / 超伝導検出器 / MKIDs / 天文観測
Outline of Final Research Achievements	Next generation astronomical observation and/or cosmological observation will use 100,000 to 1,000,000 superconducting detectors. For this purpose, we have to fabricate superconducting detectors on more than 100 wafers. We have developed superconducting microwave kinetic inductance detectors (MKIDs) using commercial-class external foundries. MKIDs were fabricated on a 6-inch (150mm) silicon wafers and an 8-inch (200mm) silicon wafers. The 8-inch wafers are the largest class silicon wafer used for a superconducting detector. We established the fabrication method to fabricate a large superconducting detector arrays.
Free Research Field	宇宙観測
Academic Significance and Societal Importance of the Research Achievements	超伝導素子は宇宙・天文観測や素粒子実験のような物理実験のみならず、量子コンピュータや量子情報等幅ひろい用途があり近年開発が活発になっている。これまで、大学や研究機関の専用装置で作製される事が多かった超伝導検出器を、一般の半導体素子を作製する工場で作製可能にしたことで将来の大型物理実験に対応する作製能力を確保した。また、産業用途に向けて一般の半導体工場で超伝導素子が作製可能であることを示し、超伝導素子の作製が容易になった点において価値がある。