Challenge of New Concept of Photo-Excited Nano-Removal Processing by Parallel Control of Spatially Localized Light

2021 Fiscal Year Final Research Report

• Project/Area Number: 19K21913
• Research Category: Grant-in-Aid for Challenging Research (Exploratory)
• Allocation Type: Multi-year Fund
• Review Section: Medium-sized Section 18:Mechanics of materials, production engineering, design engineering, and related fields
• Research Institution: The University of Tokyo
• Principal Investigator: Takahashi Satoru 東京大学, 先端科学技術研究センター, 教授 (30283724)
• Co-Investigator(Kenkyū-buntansha): 道畑 正岐 東京大学, 大学院工学系研究科(工学部), 准教授 (70588855) ; 西川 正俊 法政大学, 生命科学部, 准教授 (30444516)
• Project Period (FY): 2019-06-28 – 2022-03-31
• Keywords: ナノ・マイクロ加工 / レーザートラップ / 空間局在光場制御 / 放射圧並列制御

Outline of Final Research Achievements

The realization of removal and correction processing of resist microtopography and soft materials with a micromachining resolution of 10 nm scale is expected to have a significant ripple effect in the field of micromachining. In this study, we investigated a method of creating a spatial light-field-controlled and photon-excited micro-machining tool to realize such a new machining method. It was found that the core unit of the microfabrication tool can be fabricated by controlling the microresin with optical radiation pressure.

Free Research Field

ナノ・マイクロ光加工・計測

Academic Significance and Societal Importance of the Research Achievements

本研究の実現により，例えば，微細レジスト構造の修正加工が可能となる．これにより，エラーがあった形状を捨てることなく，活用できたり，あるいは通常のプロセスでは加工できないような，複雑三次元形状の創成が可能となり，マイクロ生産工学として意義深い