2010 Fiscal Year Final Research Report
Study on nanocrystalline silicon planar cathodes with low emission divergence and narrow electron energy spread
| Project/Area Number |
20560333
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| Research Category |
Grant-in-Aid for Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Electron device/Electronic equipment
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| Research Institution | Hachinohe Institute of Technology |
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Principal Investigator |
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| Co-Investigator(Kenkyū-buntansha) |
MIMURA Hidenori 静岡大学, 電子工学研究所, 教授 (90144055)
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| Project Period (FY) |
2008 – 2010
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| Keywords | 微小冷陰極 / トンネル電子放射 / エミッションプロファイル / エネルギー分析 / シリコン微結晶 / 真空ナノエレクトロニクス |
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| Research Abstract |
We investigated emission uniformity from the planar cathodes based on nc-Si prepared by pulsed Nd : YAG laser ablation. Distributions of electron emission showed strong dependence on thin metal morphology. The emission occurred at limited parts of the emission area for the cathode with discontinuous metal and the whole for the cathode with continuous metal due to series resistance effects. Continuity and conductivity of thin metal film are important for uniform and high directional emission from the planar cathodes.
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