2009 Fiscal Year Final Research Report
Research on Nano-scale Servo Control for Atomic Force Microscope and Positioning Stage
| Project/Area Number |
20686028
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| Research Category |
Grant-in-Aid for Young Scientists (A)
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| Allocation Type | Single-year Grants |
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| Research Field |
Control engineering
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| Research Institution | Yokohama National University |
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Principal Investigator |
FUJIMOTO Hiroshi Yokohama National University, 大学院・工学研究院, 准教授 (20313033)
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| Project Period (FY) |
2008 – 2009
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| Keywords | 制御機器 / 高速高精度位置決め制御 |
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| Research Abstract |
The objective of this study is to develop the fundamental technology to realize nano-scale servo systems with high-speed and high performance positioning control systems. In order to contribute the progress of science, the advanced control method of nano-probe which is utilized in atomic force microscope. We also studied the novel design and fabrication of nano-scale multi-degree-of-freedom positioning stage.
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