2011 Fiscal Year Final Research Report
evaluation of ultrahigh precision machining tool using on-machine measurement of diffratcion gratings
| Project/Area Number |
20760092
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| Research Category |
Grant-in-Aid for Young Scientists (B)
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| Allocation Type | Single-year Grants |
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| Research Field |
Production engineering/Processing studies
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| Research Institution | The Institute of Physical and Chemical Research |
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Principal Investigator |
MORITA Shin-ya 独立行政法人理化学研究所, 超精密加工技術開発チーム, 協力研究員 (30360655)
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| Project Period (FY) |
2008 – 2011
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| Keywords | 機上測定 / 超精密加工機 / 超精密切削 / 回折格子 / 単結晶ダイヤモンド工具 |
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| Research Abstract |
A performance evaluation method of ultrahigh precision machine tools has been developed for the manufacturing of high-efficiency ultrahigh-dispersion diffraction gratings, using on-machine measurement units. In order to construct fabricating processes of diffraction grating groove, long-life diamond cutting tools for brittle materials, diamond burnishing for soft or amorphous metal materials tools has been developed. A compact laser autofocus displacement sensor has been developed and on-machine profile measurement system has been constructed and a profile of grating substrates has been measured. On-machine diffracted light measurement method has been developed, and a difference between burnished groove and micro cut groove has been observed.
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